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一种基于斯坦福RRAM模型的参数提取方法
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作者 孙海燕 张硕 +1 位作者 张晓波 戴澜 《半导体技术》 CAS 北大核心 2022年第8期670-675,共6页
阻变随机存取存储器(RRAM)是一种新型非易失性存储器件,比主流的闪存(Flash)器件具有更快的读/写速度、更低的编程电压和功耗。然而由于工艺不成熟等因素,RRAM准确的器件模型需要在已有的斯坦福物理模型基础上,对多达6个曲线拟合参数反... 阻变随机存取存储器(RRAM)是一种新型非易失性存储器件,比主流的闪存(Flash)器件具有更快的读/写速度、更低的编程电压和功耗。然而由于工艺不成熟等因素,RRAM准确的器件模型需要在已有的斯坦福物理模型基础上,对多达6个曲线拟合参数反复进行调整,具有一定的建模难度。提出了一种简并参数的建模方法,通过器件实测数据计算出其中4个曲线拟合参数I_(0)、g_(0)、γ_(0)、β。该方法大大降低了将物理模型适配为实际模型的建模难度,且由于基于实测数据,该建模方法理论上对不同工艺具有适配性。最后在不同工艺条件下制作了基于HfO_(x)材料的RRAM器件,并验证了该方法的有效性、先进性和准确性。 展开更多
关键词 阻变随机存取存储器(RRAM) 非易失性存储器 器件模型 hfox材料 导电细丝理论
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High uniformity and forming-free ZnO-based transparent RRAM with HfO_x inserting layer 被引量:1
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作者 Shi-Jian Wu Fang Wang +5 位作者 Zhi-Chao Zhang Yi Li Ye-Mei Han Zheng-Chun Yang Jin-Shi Zhao Kai-Liang Zhang 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第8期549-553,共5页
The impacts of HfOx inserting layer thickness on the electrical properties of the ZnO-based transparent resistance random access memory (TRRAM) device were investigated in this paper. The bipolar resistive switching... The impacts of HfOx inserting layer thickness on the electrical properties of the ZnO-based transparent resistance random access memory (TRRAM) device were investigated in this paper. The bipolar resistive switching behavior of a single ZnO film and bilayer HfOx/ZnO films as active layers for TRRAM devices was demonstrated. It was revealed that the bilayer TRRAM device with a 10-nm HfOx inserted layer had a more stable resistive switching behavior than other devices including the single layer device, as well as being forming free, and the transmittance was more than 80% in the visible region. For the HfOx/ZnO devices, the current conduction behavior was dominated by the space-charge-limited current mechanism in the low resistive state (LRS) and Schottky emission in the high resistive state (HRS), while the mechanism for single layer devices was controlled by ohmic conduction in the LRS and Poole-Frenkel emission in the HRS. 展开更多
关键词 transparent resistive random access memory (TRRAM) hfox inserting layer UNIFORMITY forming-free
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