In Fourier transform profilometry （FTP）, we must restrain spectrum overlapping caused by the nonlinearity of the charge coupled device （CCD） and increase the measurement accuracy of the object shape. Firstly, the ...In Fourier transform profilometry （FTP）, we must restrain spectrum overlapping caused by the nonlinearity of the charge coupled device （CCD） and increase the measurement accuracy of the object shape. Firstly, the causes of producing higher-order spectrum components and inducing spectrum overlapping are analysed theoretically, and a simple physical ex- planation and analytical deduction are given. Secondly, aiming to suppress spectrum overlapping and improve measurement accuracy, the influence of spatial carrier frequency of projection grating on them is analysed. A method of increasing the spatial carrier frequency of projection grating to restrain or reduce the spectrum overlapping significantly is proposed. We then analyze the mechanism of how the spectrum overlapping is reduced. Finally, the simulation results and experimental measurements verify the correction of the proposed theory and method.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 61173122, 60970098, 60803024, 90715043, and 61144006)the Postdoctoral Startup Foundation of Central South University, China (Grant No. 1332/74341016030)
文摘In Fourier transform profilometry （FTP）, we must restrain spectrum overlapping caused by the nonlinearity of the charge coupled device （CCD） and increase the measurement accuracy of the object shape. Firstly, the causes of producing higher-order spectrum components and inducing spectrum overlapping are analysed theoretically, and a simple physical ex- planation and analytical deduction are given. Secondly, aiming to suppress spectrum overlapping and improve measurement accuracy, the influence of spatial carrier frequency of projection grating on them is analysed. A method of increasing the spatial carrier frequency of projection grating to restrain or reduce the spectrum overlapping significantly is proposed. We then analyze the mechanism of how the spectrum overlapping is reduced. Finally, the simulation results and experimental measurements verify the correction of the proposed theory and method.
