Post-traumatic peritendinous adhesion presents a significant challenge in clinical medicine.This study proposes the use of diamond-like carbon(DLC)deposited on polylactic acid(PLA)membranes as a biophysical mechanism ...Post-traumatic peritendinous adhesion presents a significant challenge in clinical medicine.This study proposes the use of diamond-like carbon(DLC)deposited on polylactic acid(PLA)membranes as a biophysical mechanism for anti-adhesion barrier to encase ruptured tendons in tendon-injured rats.The results indicate that PLA/DLC composite membrane exhibits more efficient anti-adhesion effect than PLA membrane,with histological score decreasing from 3.12±0.27 to 2.20±0.22 and anti-adhesion effectiveness increasing from 21.61%to 44.72%.Mechanistically,the abundant C=O bond functional groups on the surface of DLC can reduce reactive oxygen species level effectively;thus,the phosphorylation of NF-κB and M1 polarization of macrophages are inhibited.Consequently,excessive inflammatory response augmented by M1 macrophage-originated cytokines including interleukin-6(IL-6),interleukin-1β(IL-1β),and tumor necrosis factor-α(TNF-α)is largely reduced.For biocompatibility evaluation,PLA/DLC membrane is slowly absorbed within tissue and displays prolonged barrier effects compared to traditional PLA membranes.Further studies show the DLC depositing decelerates the release of degradation product lactic acid and its induction of macrophage M2 polarization by interfering esterase and PLA ester bonds,which further delays the fibrosis process.It was found that the PLA/DLC membrane possess an efficient biophysical mechanism for treatment of peritendinous adhesion.展开更多
In this work, diamond-like carbon （DLC） films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputtering physical vapour deposition （PEUMS-PVD） and microwa...In this work, diamond-like carbon （DLC） films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputtering physical vapour deposition （PEUMS-PVD） and microwave electron cyclotron resonance plasma enhanced chemical vapour deposition （MW-ECRPECVD） techniques. The influence of substrate negative self-bias voltage and Si target power on the structure and nano-mechanical behaviour of the DLC films were investigated by Raman spectroscopy, nano-indentation, and the film structural morphology by atomic force microscopy （AFM）. With the increase of deposition bias voltage, the G band shifted to higher wave-number and the integrated intensity ratio ID/IG increased. We considered these as evidences for the development of graphitization in the films. As the substrate negative self-bias voltage increased, particle bombardment function was enhanced and the sp^3-bond carbon density reducing, resulted in the peak values of hardness （H） and elastic modulus （E）. Silicon addition promoted the formation of sp^3 bonding and reduced the hardness. The incorporated Si atoms substituted sp^2- bond carbon atoms in ring structures, which promoted the formation of sp^3-bond. The structural transition from C-C to C-Si bonds resulted in relaxation of the residual stress which led to the decrease of internal stress and hardness. The results of AFM indicated that the films was dense and homogeneous, the roughness of the films was decreased due to the increase of substrate negative self-bias voltage and the Si target power.展开更多
Diamond-like carbon （DLC） films was deposited successfully on stainless steel sub- strates with Si/SiC intermediate layers by combining plasma enhanced unbalanced magnetron sputtering physical vapor deposition （PEU...Diamond-like carbon （DLC） films was deposited successfully on stainless steel sub- strates with Si/SiC intermediate layers by combining plasma enhanced unbalanced magnetron sputtering physical vapor deposition （PEUMS-PVD） and microwave electron cyclotron resonance plasma enhanced chemical vapor deposition （MW-ECR PECVD） techniques. The effect of sil- icon dopant on the structure, morphology, nanomechanical properties and electrochemical be- havior of DLC films were investigated by Raman spectroscopy, nano-indentation, atomic force microscopy （AFM） and potentiodynamic method and electrochemical impedance spectroscopy （EIS）. It showed that the incorporated silicon atoms substituted sp2-bonded carbon atoms in the ring structures, promoting the formation of sp3-bonds. The structural transition from C-C to C-Si bonds resulted in the relaxation of the residual stress, leading to the decrease in films hardness. The DLC films with Si/SiC intermediate layers led to significant improvement in the corrosion resistance of the stainless steel substrate due to effective isolation and good chemical inertness of the DLC films.展开更多
Diamond-like carbon (DLC) films are deposited on quartz substrate using pure CH4 in the surface wave plasma equipment. A direct current negative bias up to -90 V is applied to the substrate to investigate the bias eff...Diamond-like carbon (DLC) films are deposited on quartz substrate using pure CH4 in the surface wave plasma equipment. A direct current negative bias up to -90 V is applied to the substrate to investigate the bias effect on the film characteristics. Deposited films are characterized by Raman spectroscopy, infrared (IR) and ultraviolet-visible absorption techniques. There are two broad Raman peaks around 1340 cm-1 and 1600 cm-1 and the first one has a greater sp3 component with an increased bias. Infrared spectroscopy has three sp3 C-H modes at 2852 cm-1, 2926 cm-1 and 2962 cm-1, respectively and also shows an intensity increase with the negative bias. Optical band gap is calculated from the ultraviolet-visible absorption spectroscopy and the increased values with negative bias and deposition time are obtained. After a thermal anneal at about 500℃ for an hour to the film deposited under the bias of-90 V, we get an almost unchanged Raman spectrum and a peak intensity-reduced IR signal, which indicates a reduced H-content in the film. Meanwhile the optical band gap changed from 0.85 eV to 1.5 eV.展开更多
A cylindrical hollow cathode discharge （HCD） in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon （DLC） films on the inner surface of a stainless steel tube. The characteristics of...A cylindrical hollow cathode discharge （HCD） in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon （DLC） films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma im- ages and the optical emission spectrum （OES） were measured in Ar and CHn/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy （SEM）. The results show that the electron exci- tation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp3/sp2 bonds decreases with the applied voltage and the deposition time. The optimizing CH4 content was found to be around CH4/Ar =1/5 for good quality of DLC films in the present system.展开更多
A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon （DLC） nanofilms with different thickness...A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon （DLC） nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp2, sp3 and C-O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17-21 nm, 30-57 nm, 67-123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17-41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm.展开更多
Electron cyclotron resonance （ECR） plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon （H-DLC） films. For different microwave powers, both argon and hy...Electron cyclotron resonance （ECR） plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon （H-DLC） films. For different microwave powers, both argon and hydrogen gas are introduced separately as the ECR working gas to investigate the influence of microwave power on the microstructure and electrical property of the H-DLC films deposited on P-type silicon substrates. A series of characterization methods including the Raman spectrum and atomic force microscopy are used. Results show that, within a certain range, the increase in microwave power affects the properties of the thin films, namely the sp3 ratio, the hardness, the nanoparticle size and the resistivity all increase while the roughness decreases with the increase in microwave power. The maximum of resistivity amounts to 1.1×10^9 Ω.cm. At the same time it is found that the influence of microwave power on the properties of H-DLC films is more pronounced when argon gas is applied as the ECR working gas, compared to hydrogen gas.展开更多
The structures of diamond-like carbon （DLC） films, including a-C：H, a-C, ta-C：H and ta-C films have been investigated as a random covalent network with a dense film structure. The results show that sp2 C in a-C：H...The structures of diamond-like carbon （DLC） films, including a-C：H, a-C, ta-C：H and ta-C films have been investigated as a random covalent network with a dense film structure. The results show that sp2 C in a-C：H and a-C films tends to form olefinic and aromatic groups while sp^3 C in ta-C：H and ta-C films tends to form single or multiple sixfold groups. The hydrogen atoms in hydrogenated DLC films contribute to stabilizing the carbon skeletal networks. The film structures are well related to their properties such as optical gaps, density and hardness. The results also indicate that the high density and the extreme hardness of ta-C films are attributed to the forming of large sp^3 C bonded sixfold groups.展开更多
Fe ions in the fluence range of 2×1015 to 1×1017 cm-2 were implanted into diamond-like carbon (DLC) thin film of 100 nm thick, which were deposited on silicon substrate by plasma enhanced chemical vapor depo...Fe ions in the fluence range of 2×1015 to 1×1017 cm-2 were implanted into diamond-like carbon (DLC) thin film of 100 nm thick, which were deposited on silicon substrate by plasma enhanced chemical vapor deposition. Effects of Fe ion implantation on microstructure and friction coefficient of the DLC were studied. With increasing Fe ion fluence, friction coefficient of the DLC film increased as compared with that of DLC without implantation, and then decreased. The Raman spectra characteristics also show a dependence on the Fe ion fluence. With increasing the ion fluence, the sp2 bonding increased in the DLC film, resulting in the decrease of friction coefficient of the film af- ter implantation. Substantial surface roughness was also measured.展开更多
ZnO nanoparticles-embedded hydrogenated diamond-like carbon （ZnO-DLC） films have been prepared by electro- chemical deposition in ambient conditions. The morphology, composition, and microstructure of the films have...ZnO nanoparticles-embedded hydrogenated diamond-like carbon （ZnO-DLC） films have been prepared by electro- chemical deposition in ambient conditions. The morphology, composition, and microstructure of the films have been investigated. The results show that the resultant films are hydrogenated diamond-like carbon films embedded with ZnO nanoparticles in wurtzite structure, and the content and size of the ZnO nanoparticles increase with increasing deposition voltage, which are confirmed by X-ray photoelectron spectroscopy （XPS）, Raman, and transmission electron microscope （TEM）. Furthermore, a possible mechanism used to describe the growth process of ZnO-DLC films by electrochemical deposition is also discussed.展开更多
Nitrogen-doped diamond-like carbon （DLC：N） films prepared by the filtered cathodic vacuum arc technology are functionalized with various chemical molecules including dopamine （DA）, 3-Aminobenzeneboronic acid （A...Nitrogen-doped diamond-like carbon （DLC：N） films prepared by the filtered cathodic vacuum arc technology are functionalized with various chemical molecules including dopamine （DA）, 3-Aminobenzeneboronic acid （APBA）, and adenosine triphosphate （ATP）, and the impacts of surface functionalities on the surface morphologies, compositions, microstructures, and cell compatibility of the DLC：N films are systematically investigated. We demonstrate that the surface groups of DLC：N have a significant effect on the surface and structural properties of the film. The activity of PC12 cells depends on the particular type of surface functional groups of DLC：N films regardless of surface roughness and wettability. Our research offers a novel way for designing functionalized carbon films as tailorable substrates for biosensors and biomedical engineering applications.展开更多
Diamond-like carbon （DLC） films have been deposited using three different techniques： （a） electron cyclotron resonance——plasma source ion implantation, （b） low-pressure dielectric barrier discharge, （c） fil...Diamond-like carbon （DLC） films have been deposited using three different techniques： （a） electron cyclotron resonance——plasma source ion implantation, （b） low-pressure dielectric barrier discharge, （c） filtered——pulsed cathodic arc discharge, The surface and mechanical properties of these films are compared using atomic force microscopebased tests. The experimental results show that hydrogenated DLC films are covered with soft surface layers enriched with hydrogen and sp^3 hybridized carbon while the soft surface layers of tetrahedral amorphous carbon （ta-C） films have graphite-like structure, The formation of soft surface layers can be associated with the surface diffusion and growth induced by the low-energy deposition process. For typical CVD methods, the atomic hydrogen in the plasmas can contribute to the formation of hydrogen and sp^3 hybridized carbon enriched surface layers, The high-energy ion implantation causes the rearrangement of atoms beneath the surface layer and leads to an increase in film density. The ta-C films can be deposited using the medium energy carbon ions in the highly-ionized plasma.展开更多
In order to deposit good films, we need to study the uniformity of plasma density and the plasma density under different gas pressures and powers. The plasma density was diagnosed by a Langmuir probe. The optical emis...In order to deposit good films, we need to study the uniformity of plasma density and the plasma density under different gas pressures and powers. The plasma density was diagnosed by a Langmuir probe. The optical emission spectroscopy （OES） of CH4 and H2 discharge was obtained with raster spectroscopy, with characteristic peaks of H and CH achieved. Diamond-like carbon films were achieved based on the study of plasma density and OES and characterized by atomic force microscope （AFM）, X-ray diffraction instrument （XRD）, Raman spectroscope and profiler.展开更多
Atomic force microscopy is used to estimate and compare the surface morphology of hydrogenated and hydrogen-free diamond-like carbon （DLC） films. The films were prepared by using DC magnetron sputtering of a graphit...Atomic force microscopy is used to estimate and compare the surface morphology of hydrogenated and hydrogen-free diamond-like carbon （DLC） films. The films were prepared by using DC magnetron sputtering of a graphite target, pulsed cathodic carbon arcs, electron cyclotron resonance （ECR）, plasma source ion implantation and dielectric barrier discharge （DBD）. The difference in the surface structure is presented for each method of deposition. The influences of various discharge parameters on the film surface properties are discussed based upon the experimental results. The coalescence process via the diffusion of adsorbed carbon species is responsible for the formation of hydrogen-free DLC films with rough surfaces. The films with surface roughness at an atomic level can be deposited by energetic ion impacts in a highly ionized carbon plasma. The hydrocarbon species dangling bonds created by atomic hydrogen lead to the uniform growth of at the a-C：H film surfaces of the ECR or DBD plasmas展开更多
The growth of diamond-like carbon （DLC） films is studied using molecular dynamics simulations. The effect of impact angle on film structure is carefully studied, which shows that the transverse migration of the inci...The growth of diamond-like carbon （DLC） films is studied using molecular dynamics simulations. The effect of impact angle on film structure is carefully studied, which shows that the transverse migration of the incident atoms is the main channel of film relaxation. A transverse-migration-induced film relaxation model is presented to elucidate the process of film relaxation which advances the original model of subplantation. The process of DLC film growth on a rough surface is also investigated, as well as the evolution of microstructure and surface morphology of the film. A preferential-to-homogeneous growth mode and a smoothing of the film are observed, which are due to the transverse migration of the incident atoms.展开更多
Various ion sources are key components to prepare functional coatings,such as diamond-like carbon(DLC)films.In this article,we present our trying of surface modification on basis of Si-incorporation diamond-like carbo...Various ion sources are key components to prepare functional coatings,such as diamond-like carbon(DLC)films.In this article,we present our trying of surface modification on basis of Si-incorporation diamond-like carbon(Si-DLC)produced by a magnetic field enhanced radio frequency ion source,which is established to get high density plasma with the help of magnetic field.Under proper deposition process,a contact angle of 111°hydrophobic surface was achieved without any surface patterning,where nanostructure SiC grains appeared within the amorphous microstructure.The surface property was influenced by ion flow parameters as well as the resultant surface microstructure.The magnetic field enhanced radio frequency ion source developed in this paper was useful for protective film applications.展开更多
A high growth rate fabrication of diamond-like carbon（DLC）films at room temperature was achieved by helicon wave plasma chemical vapor deposition（HWP-CVD）using Ar/CH4gas mixtures.The microstructure and morphology ...A high growth rate fabrication of diamond-like carbon（DLC）films at room temperature was achieved by helicon wave plasma chemical vapor deposition（HWP-CVD）using Ar/CH4gas mixtures.The microstructure and morphology of the films were characterized by Raman spectroscopy and scanning electron microscopy.The diagnosis of plasma excited by a helicon wave was measured by optical emission spectroscopy and a Langmuir probe.The mechanism of high growth rate fabrication for DLC films by HWP-CVD has been discussed.The growth rate of the DLC films reaches a maximum value of 54μm h^-1at the CH4flow rate of 85 sccm,which is attributed to the higher plasma density during the helicon wave plasma discharge.The CH and Hαradicals play an important role in the growth of DLC films.The results show that the Hαradicals are beneficial to the formation and stabilization of C=C bond from sp^2to sp^3.展开更多
Dielectric barrier discharge at atmospheric presure has been applied to prepare hydrocarbon films on large- area glass and silicon substrates. When hydrogen and methane mixture(2:1) is used as discharge gas and the s...Dielectric barrier discharge at atmospheric presure has been applied to prepare hydrocarbon films on large- area glass and silicon substrates. When hydrogen and methane mixture(2:1) is used as discharge gas and the substrate is heated to 300 C, hard hydrogenated amorphous carbon film is deposited. From the IR deconvolution analysis of the C-H stretching absorption for the coating, the hydrocarbon group ration (CH3:CH2:CH) and C-C bond type ratio (sp3c/sp2c) are about 10%: 21%: 69% and 3:1~6:1,respectively. Their Knoop hardness is up to 10Gpa. No film isdeposited when the content of methane in the mixed gases is decreased to 5% at 300 C silicon substrate.展开更多
An ideal type-Ⅲnodal point is generated by crossing a completely flat band and a dispersive band along a certain momentum direction.To date,the type-Ⅲnodal points found in two-dimensional(2D)materials have been most...An ideal type-Ⅲnodal point is generated by crossing a completely flat band and a dispersive band along a certain momentum direction.To date,the type-Ⅲnodal points found in two-dimensional(2D)materials have been mostly accidental and random rather than ideal cases,and no one mentions what kind of lattice can produce ideal nodal points.Here,we propose that ideal type-Ⅲnodal points can be obtained in a diamond-like lattice.The flat bands in the lattice originate from destructive interference of wavefunctions,and thus are intrinsic and robust.Moreover,the specific lattice can be realized in some 2D carbon networks,such as T-graphene and its derivatives.All the carbon structures possess type-ⅢDirac points.In two of the structures,consisting of triangular carbon rings,the type-ⅢDirac points are located just on the Fermi level and the Fermi surface is very clean.Our research not only opens a door to finding the ideal type-ⅢDirac points,but also provides 2D materials for exploring their physical properties experimentally.展开更多
基金supported by the National Natural Science Foundation of China(No.82172408,81772314,and 81922045)the Original Exploration project(22ZR1480300)+5 种基金Outstanding Academic Leaders(Youth)project(21XD1422900)of Shanghai Science and Technology Innovation Action PlanPrinciple Investigator Innovation Team of Both Shanghai Sixth People’s Hospital and Shanghai Institute of Nutrition and Health,Shanghai Jiao Tong University Medical College“Two-hundred Talent”Program(No.20191829)The Second Three-Year Action Plan for Promoting Clinical Skills and Clinical Innovation in Municipal Hospitals of Shanghai Shenkang(No.SHDC2020CR4032)Shanghai Excellent Academic Leader ProgramShanghai Engineering Research Center for Orthopaedic Material Innovation and Tissue Regeneration(No.20DZ2254100)China Postdoctoral Science Foundation(2023M742347).
文摘Post-traumatic peritendinous adhesion presents a significant challenge in clinical medicine.This study proposes the use of diamond-like carbon(DLC)deposited on polylactic acid(PLA)membranes as a biophysical mechanism for anti-adhesion barrier to encase ruptured tendons in tendon-injured rats.The results indicate that PLA/DLC composite membrane exhibits more efficient anti-adhesion effect than PLA membrane,with histological score decreasing from 3.12±0.27 to 2.20±0.22 and anti-adhesion effectiveness increasing from 21.61%to 44.72%.Mechanistically,the abundant C=O bond functional groups on the surface of DLC can reduce reactive oxygen species level effectively;thus,the phosphorylation of NF-κB and M1 polarization of macrophages are inhibited.Consequently,excessive inflammatory response augmented by M1 macrophage-originated cytokines including interleukin-6(IL-6),interleukin-1β(IL-1β),and tumor necrosis factor-α(TNF-α)is largely reduced.For biocompatibility evaluation,PLA/DLC membrane is slowly absorbed within tissue and displays prolonged barrier effects compared to traditional PLA membranes.Further studies show the DLC depositing decelerates the release of degradation product lactic acid and its induction of macrophage M2 polarization by interfering esterase and PLA ester bonds,which further delays the fibrosis process.It was found that the PLA/DLC membrane possess an efficient biophysical mechanism for treatment of peritendinous adhesion.
文摘In this work, diamond-like carbon （DLC） films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputtering physical vapour deposition （PEUMS-PVD） and microwave electron cyclotron resonance plasma enhanced chemical vapour deposition （MW-ECRPECVD） techniques. The influence of substrate negative self-bias voltage and Si target power on the structure and nano-mechanical behaviour of the DLC films were investigated by Raman spectroscopy, nano-indentation, and the film structural morphology by atomic force microscopy （AFM）. With the increase of deposition bias voltage, the G band shifted to higher wave-number and the integrated intensity ratio ID/IG increased. We considered these as evidences for the development of graphitization in the films. As the substrate negative self-bias voltage increased, particle bombardment function was enhanced and the sp^3-bond carbon density reducing, resulted in the peak values of hardness （H） and elastic modulus （E）. Silicon addition promoted the formation of sp^3 bonding and reduced the hardness. The incorporated Si atoms substituted sp^2- bond carbon atoms in ring structures, which promoted the formation of sp^3-bond. The structural transition from C-C to C-Si bonds resulted in relaxation of the residual stress which led to the decrease of internal stress and hardness. The results of AFM indicated that the films was dense and homogeneous, the roughness of the films was decreased due to the increase of substrate negative self-bias voltage and the Si target power.
文摘Diamond-like carbon （DLC） films was deposited successfully on stainless steel sub- strates with Si/SiC intermediate layers by combining plasma enhanced unbalanced magnetron sputtering physical vapor deposition （PEUMS-PVD） and microwave electron cyclotron resonance plasma enhanced chemical vapor deposition （MW-ECR PECVD） techniques. The effect of sil- icon dopant on the structure, morphology, nanomechanical properties and electrochemical be- havior of DLC films were investigated by Raman spectroscopy, nano-indentation, atomic force microscopy （AFM） and potentiodynamic method and electrochemical impedance spectroscopy （EIS）. It showed that the incorporated silicon atoms substituted sp2-bonded carbon atoms in the ring structures, promoting the formation of sp3-bonds. The structural transition from C-C to C-Si bonds resulted in the relaxation of the residual stress, leading to the decrease in films hardness. The DLC films with Si/SiC intermediate layers led to significant improvement in the corrosion resistance of the stainless steel substrate due to effective isolation and good chemical inertness of the DLC films.
基金The project supported by the National Natural Science Foundation of China (No. 19835030 and 19875053)
文摘Diamond-like carbon (DLC) films are deposited on quartz substrate using pure CH4 in the surface wave plasma equipment. A direct current negative bias up to -90 V is applied to the substrate to investigate the bias effect on the film characteristics. Deposited films are characterized by Raman spectroscopy, infrared (IR) and ultraviolet-visible absorption techniques. There are two broad Raman peaks around 1340 cm-1 and 1600 cm-1 and the first one has a greater sp3 component with an increased bias. Infrared spectroscopy has three sp3 C-H modes at 2852 cm-1, 2926 cm-1 and 2962 cm-1, respectively and also shows an intensity increase with the negative bias. Optical band gap is calculated from the ultraviolet-visible absorption spectroscopy and the increased values with negative bias and deposition time are obtained. After a thermal anneal at about 500℃ for an hour to the film deposited under the bias of-90 V, we get an almost unchanged Raman spectrum and a peak intensity-reduced IR signal, which indicates a reduced H-content in the film. Meanwhile the optical band gap changed from 0.85 eV to 1.5 eV.
基金supported by National Natural Science Foundation of China(No.11005009)
文摘A cylindrical hollow cathode discharge （HCD） in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon （DLC） films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma im- ages and the optical emission spectrum （OES） were measured in Ar and CHn/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy （SEM）. The results show that the electron exci- tation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp3/sp2 bonds decreases with the applied voltage and the deposition time. The optimizing CH4 content was found to be around CH4/Ar =1/5 for good quality of DLC films in the present system.
基金Project supported by the National Key Basic Research Program of China （Grant No 2003CB716201）, the Major Research Plan of the National Natural Science Foundation of China （Grant No 50390060）, the National Natural Science Foundation of China （Grant No 50575121）, the National Science Foundation for Post-doctoral Scientists of China （Grant No 20060390064）, the Electro- Mechanic Technology Foundation of NSK Ltd. of Japan, the Scientific Startup Research Foundation for the New Staff of Dallan University of Technology, and the Open Foundation of Key Laboratory for Precision and Non-Traditional Machining Technology of the Ministry of Education, Dalian University of Technology （Grant No JMTZ200703）.
文摘A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon （DLC） nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp2, sp3 and C-O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17-21 nm, 30-57 nm, 67-123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17-41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm.
基金supported by Shenzhen Key Laboratory of Sensors Technology Open Fund of China (Nos.SST200908, SST200911)
文摘Electron cyclotron resonance （ECR） plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon （H-DLC） films. For different microwave powers, both argon and hydrogen gas are introduced separately as the ECR working gas to investigate the influence of microwave power on the microstructure and electrical property of the H-DLC films deposited on P-type silicon substrates. A series of characterization methods including the Raman spectrum and atomic force microscopy are used. Results show that, within a certain range, the increase in microwave power affects the properties of the thin films, namely the sp3 ratio, the hardness, the nanoparticle size and the resistivity all increase while the roughness decreases with the increase in microwave power. The maximum of resistivity amounts to 1.1×10^9 Ω.cm. At the same time it is found that the influence of microwave power on the properties of H-DLC films is more pronounced when argon gas is applied as the ECR working gas, compared to hydrogen gas.
文摘The structures of diamond-like carbon （DLC） films, including a-C：H, a-C, ta-C：H and ta-C films have been investigated as a random covalent network with a dense film structure. The results show that sp2 C in a-C：H and a-C films tends to form olefinic and aromatic groups while sp^3 C in ta-C：H and ta-C films tends to form single or multiple sixfold groups. The hydrogen atoms in hydrogenated DLC films contribute to stabilizing the carbon skeletal networks. The film structures are well related to their properties such as optical gaps, density and hardness. The results also indicate that the high density and the extreme hardness of ta-C films are attributed to the forming of large sp^3 C bonded sixfold groups.
文摘Fe ions in the fluence range of 2×1015 to 1×1017 cm-2 were implanted into diamond-like carbon (DLC) thin film of 100 nm thick, which were deposited on silicon substrate by plasma enhanced chemical vapor deposition. Effects of Fe ion implantation on microstructure and friction coefficient of the DLC were studied. With increasing Fe ion fluence, friction coefficient of the DLC film increased as compared with that of DLC without implantation, and then decreased. The Raman spectra characteristics also show a dependence on the Fe ion fluence. With increasing the ion fluence, the sp2 bonding increased in the DLC film, resulting in the decrease of friction coefficient of the film af- ter implantation. Substantial surface roughness was also measured.
文摘ZnO nanoparticles-embedded hydrogenated diamond-like carbon （ZnO-DLC） films have been prepared by electro- chemical deposition in ambient conditions. The morphology, composition, and microstructure of the films have been investigated. The results show that the resultant films are hydrogenated diamond-like carbon films embedded with ZnO nanoparticles in wurtzite structure, and the content and size of the ZnO nanoparticles increase with increasing deposition voltage, which are confirmed by X-ray photoelectron spectroscopy （XPS）, Raman, and transmission electron microscope （TEM）. Furthermore, a possible mechanism used to describe the growth process of ZnO-DLC films by electrochemical deposition is also discussed.
基金supported by the National Natural Science Foundation of China(Grant Nos.51272237,51272231,and 51010002)the China Postdoctoral Science Foundation(Grant Nos.2012M520063,2013T60587,and Bsh1201016)
文摘Nitrogen-doped diamond-like carbon （DLC：N） films prepared by the filtered cathodic vacuum arc technology are functionalized with various chemical molecules including dopamine （DA）, 3-Aminobenzeneboronic acid （APBA）, and adenosine triphosphate （ATP）, and the impacts of surface functionalities on the surface morphologies, compositions, microstructures, and cell compatibility of the DLC：N films are systematically investigated. We demonstrate that the surface groups of DLC：N have a significant effect on the surface and structural properties of the film. The activity of PC12 cells depends on the particular type of surface functional groups of DLC：N films regardless of surface roughness and wettability. Our research offers a novel way for designing functionalized carbon films as tailorable substrates for biosensors and biomedical engineering applications.
基金Project supported by National Natural Science Foundation of China （Grant No 10405005）.
文摘Diamond-like carbon （DLC） films have been deposited using three different techniques： （a） electron cyclotron resonance——plasma source ion implantation, （b） low-pressure dielectric barrier discharge, （c） filtered——pulsed cathodic arc discharge, The surface and mechanical properties of these films are compared using atomic force microscopebased tests. The experimental results show that hydrogenated DLC films are covered with soft surface layers enriched with hydrogen and sp^3 hybridized carbon while the soft surface layers of tetrahedral amorphous carbon （ta-C） films have graphite-like structure, The formation of soft surface layers can be associated with the surface diffusion and growth induced by the low-energy deposition process. For typical CVD methods, the atomic hydrogen in the plasmas can contribute to the formation of hydrogen and sp^3 hybridized carbon enriched surface layers, The high-energy ion implantation causes the rearrangement of atoms beneath the surface layer and leads to an increase in film density. The ta-C films can be deposited using the medium energy carbon ions in the highly-ionized plasma.
基金supported in part by the National Natural Science Foundation of China （10575039） the Chinese Specialized Research Fund for the Doctoral Programme of Higher Education （2004057408）+1 种基金the Key Project of Science Research Fund of Guangdong （China） （05100534）the Science Project Foundation of Guangzhou City （China） （2005Z3-D2031）.
文摘In order to deposit good films, we need to study the uniformity of plasma density and the plasma density under different gas pressures and powers. The plasma density was diagnosed by a Langmuir probe. The optical emission spectroscopy （OES） of CH4 and H2 discharge was obtained with raster spectroscopy, with characteristic peaks of H and CH achieved. Diamond-like carbon films were achieved based on the study of plasma density and OES and characterized by atomic force microscope （AFM）, X-ray diffraction instrument （XRD）, Raman spectroscope and profiler.
基金supported by National Natural Science Foundation of China(No.10405005)
文摘Atomic force microscopy is used to estimate and compare the surface morphology of hydrogenated and hydrogen-free diamond-like carbon （DLC） films. The films were prepared by using DC magnetron sputtering of a graphite target, pulsed cathodic carbon arcs, electron cyclotron resonance （ECR）, plasma source ion implantation and dielectric barrier discharge （DBD）. The difference in the surface structure is presented for each method of deposition. The influences of various discharge parameters on the film surface properties are discussed based upon the experimental results. The coalescence process via the diffusion of adsorbed carbon species is responsible for the formation of hydrogen-free DLC films with rough surfaces. The films with surface roughness at an atomic level can be deposited by energetic ion impacts in a highly ionized carbon plasma. The hydrocarbon species dangling bonds created by atomic hydrogen lead to the uniform growth of at the a-C：H film surfaces of the ECR or DBD plasmas
基金Project supported by the National Natural Science Foundation of China （Grant Nos 50390060 and 50675111） and the State Key Development Program for Basic Research of China （Grant No 2003CB716201）.
文摘The growth of diamond-like carbon （DLC） films is studied using molecular dynamics simulations. The effect of impact angle on film structure is carefully studied, which shows that the transverse migration of the incident atoms is the main channel of film relaxation. A transverse-migration-induced film relaxation model is presented to elucidate the process of film relaxation which advances the original model of subplantation. The process of DLC film growth on a rough surface is also investigated, as well as the evolution of microstructure and surface morphology of the film. A preferential-to-homogeneous growth mode and a smoothing of the film are observed, which are due to the transverse migration of the incident atoms.
文摘Various ion sources are key components to prepare functional coatings,such as diamond-like carbon(DLC)films.In this article,we present our trying of surface modification on basis of Si-incorporation diamond-like carbon(Si-DLC)produced by a magnetic field enhanced radio frequency ion source,which is established to get high density plasma with the help of magnetic field.Under proper deposition process,a contact angle of 111°hydrophobic surface was achieved without any surface patterning,where nanostructure SiC grains appeared within the amorphous microstructure.The surface property was influenced by ion flow parameters as well as the resultant surface microstructure.The magnetic field enhanced radio frequency ion source developed in this paper was useful for protective film applications.
基金supported by National Natural Science Foundation of China(Nos.11175126,11375126,11435009,11505123)the National Magnetic Confinement Fusion Program of China(Nos.2014GB106005,2010GB106000)+1 种基金a project funded by China Postdoctoral Science Foundationa project funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions(PAPD)
文摘A high growth rate fabrication of diamond-like carbon（DLC）films at room temperature was achieved by helicon wave plasma chemical vapor deposition（HWP-CVD）using Ar/CH4gas mixtures.The microstructure and morphology of the films were characterized by Raman spectroscopy and scanning electron microscopy.The diagnosis of plasma excited by a helicon wave was measured by optical emission spectroscopy and a Langmuir probe.The mechanism of high growth rate fabrication for DLC films by HWP-CVD has been discussed.The growth rate of the DLC films reaches a maximum value of 54μm h^-1at the CH4flow rate of 85 sccm,which is attributed to the higher plasma density during the helicon wave plasma discharge.The CH and Hαradicals play an important role in the growth of DLC films.The results show that the Hαradicals are beneficial to the formation and stabilization of C=C bond from sp^2to sp^3.
文摘Dielectric barrier discharge at atmospheric presure has been applied to prepare hydrocarbon films on large- area glass and silicon substrates. When hydrogen and methane mixture(2:1) is used as discharge gas and the substrate is heated to 300 C, hard hydrogenated amorphous carbon film is deposited. From the IR deconvolution analysis of the C-H stretching absorption for the coating, the hydrocarbon group ration (CH3:CH2:CH) and C-C bond type ratio (sp3c/sp2c) are about 10%: 21%: 69% and 3:1~6:1,respectively. Their Knoop hardness is up to 10Gpa. No film isdeposited when the content of methane in the mixed gases is decreased to 5% at 300 C silicon substrate.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.12174157,12074150,and 11874314)。
文摘An ideal type-Ⅲnodal point is generated by crossing a completely flat band and a dispersive band along a certain momentum direction.To date,the type-Ⅲnodal points found in two-dimensional(2D)materials have been mostly accidental and random rather than ideal cases,and no one mentions what kind of lattice can produce ideal nodal points.Here,we propose that ideal type-Ⅲnodal points can be obtained in a diamond-like lattice.The flat bands in the lattice originate from destructive interference of wavefunctions,and thus are intrinsic and robust.Moreover,the specific lattice can be realized in some 2D carbon networks,such as T-graphene and its derivatives.All the carbon structures possess type-ⅢDirac points.In two of the structures,consisting of triangular carbon rings,the type-ⅢDirac points are located just on the Fermi level and the Fermi surface is very clean.Our research not only opens a door to finding the ideal type-ⅢDirac points,but also provides 2D materials for exploring their physical properties experimentally.
