The alignment coupling between optical waveguide chips and optical fiber arrays is the basis of the alignment coupling of planar optical waveguide devices, and the precise position detection with angle and spacing adj...The alignment coupling between optical waveguide chips and optical fiber arrays is the basis of the alignment coupling of planar optical waveguide devices, and the precise position detection with angle and spacing adjustments is one of the key steps of alignment coupling. A methodology for position detection, and angle and spacing adjustment was proposed for optical waveguide chips and optical fiber arrays based on machine vision. The experimental results show angle detection precision levels higher than 0.05°, line detection precision levels higher than 0.1 μm, and detection time less than 2 s. Therefore, the system developed herein meets the precise requirements necessary for position detection, and angle and spacing adjustments for optical waveguide chips and optical fiber arrays.展开更多
Electron beam lithography(EBL) is a key technology in the fabrication of nanoscale silicon optical waveguide. The influence of exposure dose, the main process parameter of EBL, on the structure profile of poly-methyl ...Electron beam lithography(EBL) is a key technology in the fabrication of nanoscale silicon optical waveguide. The influence of exposure dose, the main process parameter of EBL, on the structure profile of poly-methyl methacrylate(PMMA) after development was studied using a silicon on insulator(SOI) wafer with 220 nm top silicon as the substrate. The relationship between exposure dose and structure pattern width after development was analyzed according to the measurement results. The optimum exposure dose of 220 μC/cm^(2) was found to obtain a final structure consistent with the designed mask value through subsequent processes. At the same time, according to the image segmentation curve tracking technology, the contour extraction process of the dose test results was carried out, and the relationship among mask design value, exposure dose and two-dimensional roughness of boundary contour was analyzed, which can provide reference for the subsequent electron beam lithography of the same substrate material.展开更多
An optical code generating device for security access system application is presented. The code generating device constructed using asymmetric hollow optical waveguide coupler design provides a unique series of output...An optical code generating device for security access system application is presented. The code generating device constructed using asymmetric hollow optical waveguide coupler design provides a unique series of output light intensities which are successively used as an optical code. The design of the waveguide is made using two major components which are asymmetric Y-junction splitter and a linear taper. Waveguiding is done using a hollow waveguide structure. Construction of higher level 1×N hollow waveguide coupler is done utilizing a basic 1×2 asymmetric waveguide coupler design together with a cascaded design scheme. Non-sequential ray tracing of the asymmetric hollow optical waveguide couplers is performed to predict the optical transmission properties of the waveguide. A representation of the code combination that can be generated from the device is obtained using combinatory number theory.展开更多
Plasmon induced transparency(PIT)in the transparent window provides new insights into the design of optical filters,switches and storage,and integrated optics.The slow light effect makes PIT applicable to both sensors...Plasmon induced transparency(PIT)in the transparent window provides new insights into the design of optical filters,switches and storage,and integrated optics.The slow light effect makes PIT applicable to both sensors and slow light devices.Besides,PIT can overcome the diffraction limit of light,which makes it possible to manipulate light on a half-wavelength scale and brings good news to the miniaturization of optical devices.In this paper,we first summarize the researches of PIT phenomenon based on metal-dielectric-metal(MDM)waveguide systems and analyze the physical mechanisms of PIT including bright-dark mode interactions and phase-coupling-induced transparency.Then,we review the applications of PIT in optical sensing,optical filtering,optical switching,slow light devices and optical logic devices.At last,we outline important challenges that need to be addressed,provide corresponding solutions and predict important directions for future research in this area.展开更多
Fabrication and characterization of electro-optic modulators based on the novel organic electro-optic materials composed of self-assembled superlattices (SAS) were presented, both wet-dipping self-assembly and vapor p...Fabrication and characterization of electro-optic modulators based on the novel organic electro-optic materials composed of self-assembled superlattices (SAS) were presented, both wet-dipping self-assembly and vapor phase deposition approaches were discussed. Prototype waveguide electro-optic modulators were fabricated using SAS films integrated with low-loss polymeric materials functioning as partial guiding and cladding layers.Promising electro-optic thin film materials including DTPT and PEPCOOH grown from the vapor phase were used for fabrication and test of electro-optic prototype modulators. Finally,the EO coefficient of tens of pm/V was obtained,which can sufficiently support high-speed and small size EO modulators.展开更多
基金Projects(51475479,51075402)supported by the National Natural Science Foundation of ChinaProject(2012AA040406)supported by the National High Technology Research and Development Program of China+2 种基金Project(20110162130004)supported by the Research Fund for the Doctoral Program of Higher Education of ChinaProject(14JJ2010)supported by the Natural Science Foundation of Hunan Province,ChinaProject(GZKF-201401)supported by the Open Project of Stage Key Laboratory of Fluid Power Transmission and Control(Zhejiang University),China
文摘The alignment coupling between optical waveguide chips and optical fiber arrays is the basis of the alignment coupling of planar optical waveguide devices, and the precise position detection with angle and spacing adjustments is one of the key steps of alignment coupling. A methodology for position detection, and angle and spacing adjustment was proposed for optical waveguide chips and optical fiber arrays based on machine vision. The experimental results show angle detection precision levels higher than 0.05°, line detection precision levels higher than 0.1 μm, and detection time less than 2 s. Therefore, the system developed herein meets the precise requirements necessary for position detection, and angle and spacing adjustments for optical waveguide chips and optical fiber arrays.
基金Project(52175445) supported by the National Natural Science Foundation of ChinaProject(ZZYJKT2020-09) supported by the State Key Laboratory of High Performance Complex Manufacturing (Central South University),China+1 种基金Projects(2020JJ4247, 2022JJ30743) supported by the Natural Foundation of Hunan Province,ChinaProject(1053320190337) supported by the Fundamental Research Funds for the Central University,China。
文摘Electron beam lithography(EBL) is a key technology in the fabrication of nanoscale silicon optical waveguide. The influence of exposure dose, the main process parameter of EBL, on the structure profile of poly-methyl methacrylate(PMMA) after development was studied using a silicon on insulator(SOI) wafer with 220 nm top silicon as the substrate. The relationship between exposure dose and structure pattern width after development was analyzed according to the measurement results. The optimum exposure dose of 220 μC/cm^(2) was found to obtain a final structure consistent with the designed mask value through subsequent processes. At the same time, according to the image segmentation curve tracking technology, the contour extraction process of the dose test results was carried out, and the relationship among mask design value, exposure dose and two-dimensional roughness of boundary contour was analyzed, which can provide reference for the subsequent electron beam lithography of the same substrate material.
基金Universiti Teknologi MARA for the financial support on this project.
文摘An optical code generating device for security access system application is presented. The code generating device constructed using asymmetric hollow optical waveguide coupler design provides a unique series of output light intensities which are successively used as an optical code. The design of the waveguide is made using two major components which are asymmetric Y-junction splitter and a linear taper. Waveguiding is done using a hollow waveguide structure. Construction of higher level 1×N hollow waveguide coupler is done utilizing a basic 1×2 asymmetric waveguide coupler design together with a cascaded design scheme. Non-sequential ray tracing of the asymmetric hollow optical waveguide couplers is performed to predict the optical transmission properties of the waveguide. A representation of the code combination that can be generated from the device is obtained using combinatory number theory.
基金Project(2018JJ4086)supported by the Natural Science Foundation of Hunan Province,ChinaProject(520)supported by the Training and Innovation Base for Graduate of Education Department of Hunan Province,China+1 种基金Project(201802368048)supported by Industry-University Cooperation and Education Project of National Education Department,ChinaProject(CSUZC201925)supported by the Open Sharing Fund for the Large-scale Instruments and Equipments of Central South University,China。
文摘Plasmon induced transparency(PIT)in the transparent window provides new insights into the design of optical filters,switches and storage,and integrated optics.The slow light effect makes PIT applicable to both sensors and slow light devices.Besides,PIT can overcome the diffraction limit of light,which makes it possible to manipulate light on a half-wavelength scale and brings good news to the miniaturization of optical devices.In this paper,we first summarize the researches of PIT phenomenon based on metal-dielectric-metal(MDM)waveguide systems and analyze the physical mechanisms of PIT including bright-dark mode interactions and phase-coupling-induced transparency.Then,we review the applications of PIT in optical sensing,optical filtering,optical switching,slow light devices and optical logic devices.At last,we outline important challenges that need to be addressed,provide corresponding solutions and predict important directions for future research in this area.
文摘Fabrication and characterization of electro-optic modulators based on the novel organic electro-optic materials composed of self-assembled superlattices (SAS) were presented, both wet-dipping self-assembly and vapor phase deposition approaches were discussed. Prototype waveguide electro-optic modulators were fabricated using SAS films integrated with low-loss polymeric materials functioning as partial guiding and cladding layers.Promising electro-optic thin film materials including DTPT and PEPCOOH grown from the vapor phase were used for fabrication and test of electro-optic prototype modulators. Finally,the EO coefficient of tens of pm/V was obtained,which can sufficiently support high-speed and small size EO modulators.
