随着Si片尺寸加大和特征尺寸的缩小,对Si片的洁净程度、表面的化学态以及表面缺陷等要求越来越高。针对300 mm 65 nm Cu互连晶片清洗后表面常出现边缘和辐射状污染的问题。在理论分析的基础上,研究了缩短化学药液喷射臂和去离子水喷射...随着Si片尺寸加大和特征尺寸的缩小,对Si片的洁净程度、表面的化学态以及表面缺陷等要求越来越高。针对300 mm 65 nm Cu互连晶片清洗后表面常出现边缘和辐射状污染的问题。在理论分析的基础上,研究了缩短化学药液喷射臂和去离子水喷射臂的间隔时间,实现不同喷射臂无间隔连续喷射技术,并优化化学药液喷射臂的摆臂速度、轨迹和起始终止角度等参数。采用北京七星华创电子股份有限公司自主研发的300 mm 65 nm Cu互连单片清洗机进行工艺实验,结果表明:清洗后晶片表面无边缘和辐射状污染,清洗后晶片表面临界颗粒直径0.12μm,临界颗粒数每片30个;临界尺寸变化不大于2%。展开更多
Deuterated potassium dihydrogen phosphate damage performance at 351 nm is studied on a large-aperture laser system. Bulk and rear-surface damage are initiated under the 3ω fluences of 6.T J/cm2 and 33/cm2, and show d...Deuterated potassium dihydrogen phosphate damage performance at 351 nm is studied on a large-aperture laser system. Bulk and rear-surface damage are initiated under the 3ω fluences of 6.T J/cm2 and 33/cm2, and show different growth characteristics under multiple laser irradiations with the fluence of 6 J/cm2. The size and number of bulk damage keep unchanged once initiated. However, surface damage size also does not grow, while surface damage number increases linearly with laser shots. Different damage thresholds and growth behaviors suggest different formations of bulk and surface damage precursors. The cause of surface damage is supposed to be near-surface absorbing particles buried under the sol-gel coating.展开更多
文摘随着Si片尺寸加大和特征尺寸的缩小,对Si片的洁净程度、表面的化学态以及表面缺陷等要求越来越高。针对300 mm 65 nm Cu互连晶片清洗后表面常出现边缘和辐射状污染的问题。在理论分析的基础上,研究了缩短化学药液喷射臂和去离子水喷射臂的间隔时间,实现不同喷射臂无间隔连续喷射技术,并优化化学药液喷射臂的摆臂速度、轨迹和起始终止角度等参数。采用北京七星华创电子股份有限公司自主研发的300 mm 65 nm Cu互连单片清洗机进行工艺实验,结果表明:清洗后晶片表面无边缘和辐射状污染,清洗后晶片表面临界颗粒直径0.12μm,临界颗粒数每片30个;临界尺寸变化不大于2%。
基金Supported by the National Natural Science Foundation of China under Grant No 61505187
文摘Deuterated potassium dihydrogen phosphate damage performance at 351 nm is studied on a large-aperture laser system. Bulk and rear-surface damage are initiated under the 3ω fluences of 6.T J/cm2 and 33/cm2, and show different growth characteristics under multiple laser irradiations with the fluence of 6 J/cm2. The size and number of bulk damage keep unchanged once initiated. However, surface damage size also does not grow, while surface damage number increases linearly with laser shots. Different damage thresholds and growth behaviors suggest different formations of bulk and surface damage precursors. The cause of surface damage is supposed to be near-surface absorbing particles buried under the sol-gel coating.
