A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna arra...A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna array is realized.Then the low power devices such as through silicon via(TSV)transfer chips,filters and antenna tuners are flip-welded on the glass wafer,and the glass wafer is reformed into a wafer permanently bonded with glass and resin by the injection molding process with resin material.Finally,the thinning resin surface leaks out of the TSV transfer chip,the rewiring is carried out on the resin surface,and then the power amplifier,low-noise amplifier,power management and other devices are flip-welded on the resin wafer surface.A ball grid array(BGA)is implanted to form the final package.The loss of the RF transmission line is measured by using the RF millimeter wave probe table.The results show that the RF transmission loss from the chip end to the antenna end in the fan-out package is very small,and it is only 0.26 dB/mm when working in 60 GHz.A slot coupling antenna is designed on the glass wafer.The antenna can operate at 60 GHz and the maximum gain can reach 6 dB within the working bandwidth.This demonstration successfully provides a feasible solution for the 3D fan-out integration of RF microsystem and antenna in 5G communications.展开更多
In this paper, we present a three-dimensional（3D） vacuum packaging technique at a wafer level for a radio frequency micro-electromechanical system（RF MEMS） resonator, in which low-loss silicon vias is used to tran...In this paper, we present a three-dimensional（3D） vacuum packaging technique at a wafer level for a radio frequency micro-electromechanical system（RF MEMS） resonator, in which low-loss silicon vias is used to transmit RF signals.Au–Sn solder bonding is adopted to provide a vacuum encapsulation as well as electrical conductions. A RF model of the encapsulation cap is established to evaluate the parasitic effect of the packaging, which provides an effective design solution of 3D RF MEMS encapsulation. With the proposed packaging structure, the signal-to-background ratio（SBR） of 24 dB is achieved, as well as the quality factor（Q-factor） of the resonator increases from 8000 to 10400 after packaging.The packaged resonator has a linear frequency–temperature（ f –T） characteristic in a temperature range between 0℃ and 100℃. And the package shows favorable long-term stability of the Q-factor over 200 days, which indicates that the package has excellent hermeticity. Furthermore, the average shear strength is measured to be 43.58 MPa among 10 samples.展开更多
本文回顾和梳理了当前片上雷达(Radar on Chip,RoC)的架构和射频前端、天线及信号处理等芯片化研究进展,以及基于异质异构集成、3D先进封装技术的雷达系统集成实现方案。在此基础上,从物理形态、实现工艺及技术发展等方面对片上雷达未...本文回顾和梳理了当前片上雷达(Radar on Chip,RoC)的架构和射频前端、天线及信号处理等芯片化研究进展,以及基于异质异构集成、3D先进封装技术的雷达系统集成实现方案。在此基础上,从物理形态、实现工艺及技术发展等方面对片上雷达未来发展趋势进行了分析,指出基于硅基半导体工艺,片上集成多路雷达收发前端、波形产生及信号处理等雷达功能单元,实现片上系统(System on Chip,SoC);或者通过异质异构及先进封装技术,将高度集成的雷达芯片集成在一个封装内,实现封装系统(System in Package,SiP),从而满足雷达系统微型化、轻重量、低成本和低功耗的发展需求。同时,基于芯片化可扩充多通道阵列模块也有望构建大型复杂阵列雷达系统。该方案为未来小型化武器装备提供有效的探测感知手段,也为蓬勃发展的民用雷达提供可行的技术路径。展开更多
文摘A 3D fan-out packaging method for the integration of 5G communication RF microsystem and antenna is studied.First of all,through the double-sided wiring technology on the glass wafer,the fabrication of 5G antenna array is realized.Then the low power devices such as through silicon via(TSV)transfer chips,filters and antenna tuners are flip-welded on the glass wafer,and the glass wafer is reformed into a wafer permanently bonded with glass and resin by the injection molding process with resin material.Finally,the thinning resin surface leaks out of the TSV transfer chip,the rewiring is carried out on the resin surface,and then the power amplifier,low-noise amplifier,power management and other devices are flip-welded on the resin wafer surface.A ball grid array(BGA)is implanted to form the final package.The loss of the RF transmission line is measured by using the RF millimeter wave probe table.The results show that the RF transmission loss from the chip end to the antenna end in the fan-out package is very small,and it is only 0.26 dB/mm when working in 60 GHz.A slot coupling antenna is designed on the glass wafer.The antenna can operate at 60 GHz and the maximum gain can reach 6 dB within the working bandwidth.This demonstration successfully provides a feasible solution for the 3D fan-out integration of RF microsystem and antenna in 5G communications.
基金supported by the National Natural Science Foundation of China(Grant Nos.61234007,61404136,and 61504130)the Fund from the Ministry of Science and Technology of China(Grant No.2013YQ16055103)+1 种基金the Key Research&Development Program of Jiangsu Province,China(Grant No.BE2016007-2)the Major Project of Natural Science Research of the Higher Education Institutions of Jiangsu Province,China(Grant No.16KJA510006)
文摘In this paper, we present a three-dimensional（3D） vacuum packaging technique at a wafer level for a radio frequency micro-electromechanical system（RF MEMS） resonator, in which low-loss silicon vias is used to transmit RF signals.Au–Sn solder bonding is adopted to provide a vacuum encapsulation as well as electrical conductions. A RF model of the encapsulation cap is established to evaluate the parasitic effect of the packaging, which provides an effective design solution of 3D RF MEMS encapsulation. With the proposed packaging structure, the signal-to-background ratio（SBR） of 24 dB is achieved, as well as the quality factor（Q-factor） of the resonator increases from 8000 to 10400 after packaging.The packaged resonator has a linear frequency–temperature（ f –T） characteristic in a temperature range between 0℃ and 100℃. And the package shows favorable long-term stability of the Q-factor over 200 days, which indicates that the package has excellent hermeticity. Furthermore, the average shear strength is measured to be 43.58 MPa among 10 samples.
文摘本文回顾和梳理了当前片上雷达(Radar on Chip,RoC)的架构和射频前端、天线及信号处理等芯片化研究进展,以及基于异质异构集成、3D先进封装技术的雷达系统集成实现方案。在此基础上,从物理形态、实现工艺及技术发展等方面对片上雷达未来发展趋势进行了分析,指出基于硅基半导体工艺,片上集成多路雷达收发前端、波形产生及信号处理等雷达功能单元,实现片上系统(System on Chip,SoC);或者通过异质异构及先进封装技术,将高度集成的雷达芯片集成在一个封装内,实现封装系统(System in Package,SiP),从而满足雷达系统微型化、轻重量、低成本和低功耗的发展需求。同时,基于芯片化可扩充多通道阵列模块也有望构建大型复杂阵列雷达系统。该方案为未来小型化武器装备提供有效的探测感知手段,也为蓬勃发展的民用雷达提供可行的技术路径。
