TN256 2005064255 单侧耦合16通道100 GHz硅基二氧化硅阵列波导光栅的 研制=Single-side alignment of 100 GHz 16 channel Si- SiO2 based on AWG design and fabrication[刊,中]/李健 (中科院半导体所.北京(100083)),安俊明…∥光学...TN256 2005064255 单侧耦合16通道100 GHz硅基二氧化硅阵列波导光栅的 研制=Single-side alignment of 100 GHz 16 channel Si- SiO2 based on AWG design and fabrication[刊,中]/李健 (中科院半导体所.北京(100083)),安俊明…∥光学技 术.-2005,31(4).展开更多