本文介绍了数字集成电路测试系统的工作原理,提出了两种AC参数的定量测试方法:二分步长测试和on the fly测试。通过预先设置驱动/比较时间和测试向量、执行功能测试、从结果存储器获取"通过/失效"结果,可以计算出AC参数的量...本文介绍了数字集成电路测试系统的工作原理,提出了两种AC参数的定量测试方法:二分步长测试和on the fly测试。通过预先设置驱动/比较时间和测试向量、执行功能测试、从结果存储器获取"通过/失效"结果,可以计算出AC参数的量值。测试一个AC参数,二分步长测试方法需多次执行测试向量,on the fly测试法仅需执行一次测试,但要求测试系统具备on the fly资源。两种方法的测试精度相同,均能有效解决AC参数的定量测试,后者更适于高速器件的测试。文中介绍的方法在BC3192集成电路测试系统上对MAX488器件进行测试,在250 kHz的测试频率下,两种方法测得的tSKEW参数结果近似相等,具有很好的一致性。展开更多
Lithography is one of the most important and complicated key equipment for the integr ated circuit man ufacture.The 2一D positioning device is the importan t subsystem of lithography.Compared with conventional 2一D po...Lithography is one of the most important and complicated key equipment for the integr ated circuit man ufacture.The 2一D positioning device is the importan t subsystem of lithography.Compared with conventional 2一D positioning systems with cumbersome stacked arrangement,the 2-D positioning systems with planar motors have received increasing attention recently.Currently,many types of planar motors have been proposed.展开更多
文摘本文介绍了数字集成电路测试系统的工作原理,提出了两种AC参数的定量测试方法:二分步长测试和on the fly测试。通过预先设置驱动/比较时间和测试向量、执行功能测试、从结果存储器获取"通过/失效"结果,可以计算出AC参数的量值。测试一个AC参数,二分步长测试方法需多次执行测试向量,on the fly测试法仅需执行一次测试,但要求测试系统具备on the fly资源。两种方法的测试精度相同,均能有效解决AC参数的定量测试,后者更适于高速器件的测试。文中介绍的方法在BC3192集成电路测试系统上对MAX488器件进行测试,在250 kHz的测试频率下,两种方法测得的tSKEW参数结果近似相等,具有很好的一致性。
文摘Lithography is one of the most important and complicated key equipment for the integr ated circuit man ufacture.The 2一D positioning device is the importan t subsystem of lithography.Compared with conventional 2一D positioning systems with cumbersome stacked arrangement,the 2-D positioning systems with planar motors have received increasing attention recently.Currently,many types of planar motors have been proposed.
