The mapping relationships among the motion coordinate errors along nine single coordinate lines,the straightness error and 21 other initial error items,and the mapping relationships among the tool geometric errors rel...The mapping relationships among the motion coordinate errors along nine single coordinate lines,the straightness error and 21 other initial error items,and the mapping relationships among the tool geometric errors related to work-piece space and initial error items are researched using laser interferometer for a three-axis machining center.Then,a nine-line measurement method and a volumetric error compensation method are put forward. Moreover,the rapid identification of initial error items and compensation of volumetric error are realized.展开更多
In order to improve the process precision of an XY laser annealing table, a geometric error modeling, and an identification and compensation method were proposed. Based on multi-body system theory, a geometric error m...In order to improve the process precision of an XY laser annealing table, a geometric error modeling, and an identification and compensation method were proposed. Based on multi-body system theory, a geometric error model for the laser annealing table was established. It supports the identification of 7 geometric errors affecting the annealing accuracy. An original identification method was presented to recognize these geometric errors. Positioning errors of 5 lines in the workspace were measured by a laser interferometer, and the 7 geometric errors were identified by the proposed algorithm. Finally, a software-based error compensation method was adopted, and a compensation mechanism was developed in a postprocessor based on LabVIEW. The identified geometric errors can be compensated by converting ideal NC codes to actual NC codes. A validation experiment has been conducted on the laser annealing table, and the results indicate that positioning errors of two validation lines decreased from ±37 μm and ±33 μm to ±5 μm and ±4.5 μm, respectively. The geometric error modeling, identification and compensation method presented in this work can be straightforwardly extended to any configurations of 2-dimensional worktable.展开更多
文摘The mapping relationships among the motion coordinate errors along nine single coordinate lines,the straightness error and 21 other initial error items,and the mapping relationships among the tool geometric errors related to work-piece space and initial error items are researched using laser interferometer for a three-axis machining center.Then,a nine-line measurement method and a volumetric error compensation method are put forward. Moreover,the rapid identification of initial error items and compensation of volumetric error are realized.
基金Projects(2012ZX04010-011,2009ZX02037-02) supported by the Key National Science and Technology Project of China
文摘In order to improve the process precision of an XY laser annealing table, a geometric error modeling, and an identification and compensation method were proposed. Based on multi-body system theory, a geometric error model for the laser annealing table was established. It supports the identification of 7 geometric errors affecting the annealing accuracy. An original identification method was presented to recognize these geometric errors. Positioning errors of 5 lines in the workspace were measured by a laser interferometer, and the 7 geometric errors were identified by the proposed algorithm. Finally, a software-based error compensation method was adopted, and a compensation mechanism was developed in a postprocessor based on LabVIEW. The identified geometric errors can be compensated by converting ideal NC codes to actual NC codes. A validation experiment has been conducted on the laser annealing table, and the results indicate that positioning errors of two validation lines decreased from ±37 μm and ±33 μm to ±5 μm and ±4.5 μm, respectively. The geometric error modeling, identification and compensation method presented in this work can be straightforwardly extended to any configurations of 2-dimensional worktable.
