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磁控溅射Ni-0.5Y微晶涂层高温氧化机理研究 被引量:2
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作者 靳惠明 陈荣发 +1 位作者 姜世杭 杨树和 《真空科学与技术》 CSCD 北大核心 2003年第6期439-442,共4页
研究了纯镍及其表面磁控溅射Ni 0 5Y微晶涂层在 10 0 0℃空气中的恒温氧化和循环氧化行为。通过扫描电镜(SEM)和透射电镜 (TEM)对涂层以及表面NiO膜的形貌和结构进行了研究。此外 ,还用激光拉曼 (Raman)谱对两种样品表面NiO膜内应力大... 研究了纯镍及其表面磁控溅射Ni 0 5Y微晶涂层在 10 0 0℃空气中的恒温氧化和循环氧化行为。通过扫描电镜(SEM)和透射电镜 (TEM)对涂层以及表面NiO膜的形貌和结构进行了研究。此外 ,还用激光拉曼 (Raman)谱对两种样品表面NiO膜内应力大小进行了测量。结果表明 ,Ni 0 5Y微晶涂层与基体镍相比有更低的氧化增重速率 ,表面NiO氧化膜的晶粒尺寸明显减小 ,膜的高温塑性得以改善。同时 ,氧化膜内的压应力水平也有所降低 ,因而改善了NiO膜的粘附性和保护性。 展开更多
关键词 表面磁控溅射 氧化机理 Ni-0.5Y微晶涂层 粘附性 塑性 保护性
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Microstructure and magnetic properties of granularFePt/(FePt)_(27)Ti_(73) films for ultrahigh-density recording media 被引量:2
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作者 于红云 孙会元 +4 位作者 封顺珍 高凤菊 周鸿娟 聂向富 孙玉平 《Journal of Central South University of Technology》 2005年第2期155-158,共4页
FePt granular films were prepared by direct current facing-target magnetron sputtering system onto glass substrates and subsequently in-situ annealed in vacuum. Vibrating sample magnetometer, X-ray diffraction and sca... FePt granular films were prepared by direct current facing-target magnetron sputtering system onto glass substrates and subsequently in-situ annealed in vacuum. Vibrating sample magnetometer, X-ray diffraction and scanning probe microscope were applied to study the magnetic properties, microstructures, morphologies and domain structures of the samples. (FePt)27Ti73 bilayer films were fabricated at various conditions to investigate the effect of Ti on FePt grains. The results show that without Ti matrix layer, FePt films deposited onto the glass substrates are fcc disordered; with addition of Ti matrix layer, FePt/Ti films form a ternary (FePt)27Ti73 alloy possessing fcc and L10 (111) mixed texture. FePt/(FePt)27Ti73 films with perfectly ordered L10(111) structure and unique magnetic properties can be obtained at Ti thickness of 35nm and substrate temperature of 250℃. The maximum coercivity is more than 240kA/m and the squareness ratio is more than 0.9. The obtained results suggest that the granular FePt/(FePt)27Ti73 films can be applicable to ultrahigh-density magnetic recording media. 展开更多
关键词 FePt magnetic layer ordered L1_0 structure facing-target magnetron sputtering system magnetic (recording) media
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