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制绒Si片清洗工艺的研究 被引量:5
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作者 王淑珍 乔琦 +5 位作者 陈肖静 王永谦 朱拓 张光春 施正荣 李果华 《半导体技术》 CAS CSCD 北大核心 2010年第4期305-308,共4页
研究对比了不同清洗工艺对制绒Si片性能的影响,采用原子力显微镜和少子寿命测试仪测试经不同化学清洗工艺处理之后的Si片表面微粗糙度和少子寿命。研究发现,使用浓硫酸、双氧水混合液和稀释的氢氟酸溶液清洗Si片能够有效改善Si片表面的... 研究对比了不同清洗工艺对制绒Si片性能的影响,采用原子力显微镜和少子寿命测试仪测试经不同化学清洗工艺处理之后的Si片表面微粗糙度和少子寿命。研究发现,使用浓硫酸、双氧水混合液和稀释的氢氟酸溶液清洗Si片能够有效改善Si片表面的质量,Si片表面的微粗糙度由原先的5.96μm降低到4.45μm;采用等离子体增强化学气相沉积法在清洗之后的Si片上生长本征氢化非晶Si层,对Si片进行表面钝化,钝化之后的Si片少子寿命可达107.88μs。测试结果还表明,采用此种清洗方法处理的Si片少子寿命稳定性有很大提高。 展开更多
关键词 晶体硅太阳电池 硅片清洗 表面微粗糙度 少子寿命
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Calcium phosphate deposition on surface of porous and dense TiNi alloys in simulated body fluid 被引量:1
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作者 刘珏 刘超 +2 位作者 李婧 刘敏 阮建明 《Journal of Central South University》 SCIE EI CAS CSCD 2016年第1期1-9,共9页
Porous and dense TiNi alloys were successfully fabricated by powder metallurgy(P/M) method, and to further improve their surface biocompatibility, surface modification techniques including grind using silicon-carbide(... Porous and dense TiNi alloys were successfully fabricated by powder metallurgy(P/M) method, and to further improve their surface biocompatibility, surface modification techniques including grind using silicon-carbide(SiC) paper, acid etching and alkali treatment were employed to produce either irregularly rough surface or micro-porous surface roughness. X-ray diffractometry(XRD), scanning electron microscopy(SEM) and energy dispersive X-ray spectroscopy(EDX) attached to SEM were used to characterize surface structure and the Ca-P coatings. Effects of the above surface treatments on the surface morphology, apatite forming ability were systematically investigated. Results indicate that all the above surface treatments increase the apatite forming ability of TiNi alloys in varying degrees when soaked in simulated body fluid(SBF). More apatite coatings formed on TiNi samples sintered at 1050℃ and 1100℃ due to their high porosity and pure TiNi phase that is beneficial to heterogeneous nucleation. Furthermore, more uniform apatite was fabricated on the sample sintered from the mixture of Ni and Ti powders. 展开更多
关键词 calcium phosphate TiNi alloy surface treatment MICROSTRUCTURE simulated body fluid (SBF)
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