期刊文献+
共找到2篇文章
< 1 >
每页显示 20 50 100
磁控溅射沉积钌薄膜的微观结构及生长过程 被引量:4
1
作者 沈月 余登德 +5 位作者 王书明 许彦亭 王传军 施晨琦 闻明 杜风贞 《贵金属》 CAS CSCD 北大核心 2020年第3期44-52,共9页
采用射频磁控溅射,通过改变基底温度、溅射时间、基底形貌,制备不同参数的钌薄膜。结果表明,该工艺制备的钌薄膜均没有明显的择优取向。随着溅射温度的升高,薄膜的致密性不断提高,表面由平整向起伏型结构转变,晶粒尺寸出现先增大后减小... 采用射频磁控溅射,通过改变基底温度、溅射时间、基底形貌,制备不同参数的钌薄膜。结果表明,该工艺制备的钌薄膜均没有明显的择优取向。随着溅射温度的升高,薄膜的致密性不断提高,表面由平整向起伏型结构转变,晶粒尺寸出现先增大后减小的趋势。随着溅射时间的增加,晶粒尺寸小幅增加,晶粒由圆形状演变为致密的长条状。在表面形貌较平坦的基底上更易获得光滑而致密的钌薄膜。在此基础上,研究并讨论了不同基底形貌上钌薄膜的生长方式。 展开更多
关键词 磁控溅射 薄膜 微观形貌 薄膜生长模型
在线阅读 下载PDF
Vacuum deposited film growth,morphology and interfacial electronic structures of 2,7-dioctyl[1]benzothieno[3,2-b]benzothiophene(C8-BTBT)
2
作者 WEI Jun-hua NIU Dong-mei GAO Yong-li 《Journal of Central South University》 SCIE EI CAS CSCD 2022年第4期1041-1061,共21页
Interfaces play critical roles in electronic devices and provide great diversity of film morphology and device performance.We retrospect the substrate mediated vacuum film growth of benchmark high mobility material 2,... Interfaces play critical roles in electronic devices and provide great diversity of film morphology and device performance.We retrospect the substrate mediated vacuum film growth of benchmark high mobility material 2,7-dioctyl[1]benzothieno[3,2-b]benzothiophene(C8-BTBT)and the interface electronic structures.The film growth of C8-BTBT molecules is diversified depending on the substrate-molecule and molecule-molecule interactions.On atomic smooth substrates C8-BTBT film grows in layer-by-layer mode while on coarse substrate it grows in islands mode.The initial molecular layer at dielectric,semiconductor and conductive substrates displays slight different lattice structure.The initial molecule orientation depends on the substrate and will gradually change to standing up configuration as in bulk phase.C8-BTBT behaves as electron donor when contacting with dielectric and stable conductive materials.This usually induces a dipole layer pointing to C8-BTBT and an upward bend bending in C8-BTBT side toward the interface.Although it is air stable,C8-BTBT is chemically reactive with some transition metals and compounds.The orientation change from lying down to standing up in the film usually leads to decrease of ionization potential.The article provides insights to the interface physical and chemical processes and suggestions for optimal design and fabrication of C8-BTBT based devices. 展开更多
关键词 interface film morphology packing configuration growth mode electronic structure chemical reaction interface dipole
在线阅读 下载PDF
上一页 1 下一页 到第
使用帮助 返回顶部