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气压对于低气压双频容性耦合Ar/O2等离子体放电特性影响的研究 被引量:3
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作者 吴良超 殷桂琴 +2 位作者 孟祥国 周有有 王兢婧 《核聚变与等离子体物理》 CAS CSCD 北大核心 2020年第4期372-378,共7页
研究了气压对双射频氩氧混合等离子体电子温度和电子密度的影响。在13.56MHz低频功率和94.92MHz高频功率固定为60W和氩氧气体比为1:9的情况下,利用发射光谱法分析了气压不同时氩氧混合等离子体的放电光谱中的特征谱线的变化规律。使用... 研究了气压对双射频氩氧混合等离子体电子温度和电子密度的影响。在13.56MHz低频功率和94.92MHz高频功率固定为60W和氩氧气体比为1:9的情况下,利用发射光谱法分析了气压不同时氩氧混合等离子体的放电光谱中的特征谱线的变化规律。使用一维质点网格法(PIC-MC)静电模型计算了电子温度和电子密度。结果表明:电子温度随着气压的增加先降低后升高,与实验结果趋势相吻合;电子密度随着气压的增加先增大后减小。 展开更多
关键词 双频容性耦合等离子体 发射光谱法 蒙特卡罗碰撞方法 等离子体清洗
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Elbow precision machining technology by abrasive flow based on direct Monte Carlo method 被引量:4
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作者 LI Jun-ye ZHU Zhi-bao +4 位作者 WANG Bin-yu ZHANG Xin-ming WANG Fei ZHAO Wei-hong XU Cheng-yu 《Journal of Central South University》 SCIE EI CAS CSCD 2020年第12期3667-3683,共17页
The investigation was carried out on the technical problems of finishing the inner surface of elbow parts and the action mechanism of particles in elbow precision machining by abrasive flow.This work was analyzed and ... The investigation was carried out on the technical problems of finishing the inner surface of elbow parts and the action mechanism of particles in elbow precision machining by abrasive flow.This work was analyzed and researched by combining theory,numerical and experimental methods.The direct simulation Monte Carlo(DSMC)method and the finite element analysis method were combined to reveal the random collision of particles during the precision machining of abrasive flow.Under different inlet velocity,volume fraction and abrasive particle size,the dynamic pressure and turbulence flow energy of abrasive flow in elbow were analyzed,and the machining mechanism of particles on the wall and the influence of different machining parameters on the precision machining quality of abrasive flow were obtained.The test results show the order of the influence of different parameters on the quality of abrasive flow precision machining and establish the optimal process parameters.The results of the surface morphology before and after the precision machining of the inner surface of the elbow are discussed,and the surface roughness Ra value is reduced from 1.125μm to 0.295μm after the precision machining of the abrasive flow.The application of DSMC method provides special insights for the development of abrasive flow technology. 展开更多
关键词 precision machining by abrasive flow direct simulation Monte Carlo method abrasive particle collision processing technology
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