针对空洞层上硅工艺在制作高质量的单晶硅感压膜和真空密封腔上的优势,提出了将其应用于制作电容式绝对压力传感器。应用板壳理论建立了传感器压力检测的理论膜型,对传感器的感压膜进行理论计算和有限元仿真,并利用电容变化模型分析了...针对空洞层上硅工艺在制作高质量的单晶硅感压膜和真空密封腔上的优势,提出了将其应用于制作电容式绝对压力传感器。应用板壳理论建立了传感器压力检测的理论膜型,对传感器的感压膜进行理论计算和有限元仿真,并利用电容变化模型分析了传感器的灵敏度。给出了基于Pcap01芯片的微电容检测系统的设计,对于半径为100μm,厚度为1. 7μm的圆形感压膜,初始电容值为0. 278 p F,传感器灵敏度为0. 86 f F/k Pa。展开更多
The pressure characteristics inside single loop oscillating heat pipe （OHP） having 4.5 mm inner diameter copper tube with the loop height of 440 mm were addressed. Distilled water was used as working fluid inside th...The pressure characteristics inside single loop oscillating heat pipe （OHP） having 4.5 mm inner diameter copper tube with the loop height of 440 mm were addressed. Distilled water was used as working fluid inside the OHP with different filling ratios of 40%, 60% and 80% of total inside volume. Experimental results show that the thermal characteristics are significantly inter-related with pressure fluctuations as well as pressure frequency. And the pressure frequency also depends upon the evaporator temperature that is maintained in the range of 60-96 ℃. Piezoresistive absolute pressure sensor （Model-Kistler 4045A5） was used to take data. The investigation shows that the filling ratio of 60% gives the highest inside pressure magnitude at maximum number of pressure frequency at any of set evaporator temperature and the lowest heat flow resistance is achieved at 60% filling ratio.展开更多
文摘针对空洞层上硅工艺在制作高质量的单晶硅感压膜和真空密封腔上的优势,提出了将其应用于制作电容式绝对压力传感器。应用板壳理论建立了传感器压力检测的理论膜型,对传感器的感压膜进行理论计算和有限元仿真,并利用电容变化模型分析了传感器的灵敏度。给出了基于Pcap01芯片的微电容检测系统的设计,对于半径为100μm,厚度为1. 7μm的圆形感压膜,初始电容值为0. 278 p F,传感器灵敏度为0. 86 f F/k Pa。
基金Project(2011-0009022) supported by Basic Science Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education,Science and Technology of Korea
文摘The pressure characteristics inside single loop oscillating heat pipe （OHP） having 4.5 mm inner diameter copper tube with the loop height of 440 mm were addressed. Distilled water was used as working fluid inside the OHP with different filling ratios of 40%, 60% and 80% of total inside volume. Experimental results show that the thermal characteristics are significantly inter-related with pressure fluctuations as well as pressure frequency. And the pressure frequency also depends upon the evaporator temperature that is maintained in the range of 60-96 ℃. Piezoresistive absolute pressure sensor （Model-Kistler 4045A5） was used to take data. The investigation shows that the filling ratio of 60% gives the highest inside pressure magnitude at maximum number of pressure frequency at any of set evaporator temperature and the lowest heat flow resistance is achieved at 60% filling ratio.
