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SiC单晶生长界面形状计算机模型的建立及验证 被引量:2
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作者 窦瑛 程红娟 孟大磊 《半导体技术》 CAS CSCD 北大核心 2015年第11期850-855,共6页
利用多物理场耦合模拟软件研究了3英寸(1英寸=2.54 cm)碳化硅(Si C)单晶生长中感应线圈位置对单晶生长系统温度场的影响。分析了感应线圈位置变化对晶体表面径向温度、晶体内部轴向温度以及晶体生长界面形状的影响。同时分析了不同生长... 利用多物理场耦合模拟软件研究了3英寸(1英寸=2.54 cm)碳化硅(Si C)单晶生长中感应线圈位置对单晶生长系统温度场的影响。分析了感应线圈位置变化对晶体表面径向温度、晶体内部轴向温度以及晶体生长界面形状的影响。同时分析了不同生长时期晶体的界面形状和各向温差的变化规律,建立了3英寸Si C单晶生长界面形状计算机模型,进而将计算机模拟得到的晶体界面形状与单晶生长对照实验获得晶体的界面形状相对比,验证了该模型的可靠性。以此为依据,优化了单晶生长工艺参数,获得了理想的适合3英寸Si C单晶生长的温度场,并成功获得了高质量的3英寸Si C单晶。 展开更多
关键词 数值模拟 SIC单晶 温度场 线圈位置 生长界面形状
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Influence of relative positions between RF coil and crucible on sapphire crystals by edge-defined film-fed growth(EFG) technique 被引量:1
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作者 吴小凤 姚正军 +4 位作者 裴广庆 罗西希 徐尚君 林玉划 杨红勤 《Journal of Central South University》 SCIE EI CAS CSCD 2015年第10期3731-3737,共7页
To obtain the stable temperature field required for growing sapphire crystals, the influence of relative positions between RF coil and crucible on the performances of sapphires produced by edge-defined film-fed growth... To obtain the stable temperature field required for growing sapphire crystals, the influence of relative positions between RF coil and crucible on the performances of sapphires produced by edge-defined film-fed growth(EFG) technique was investigated. For comparison, the crucible was located at the top(case A) and the middle(case B) of the RF coil, respectively. Furthermore, the lattice integrities were studied by the double-crystal X-ray diffraction, and the dislocations were observed under the optical microscope and atomic force microscope after corroding in molten KOH at 390 ℃. The crystals in case B exhibit better lattice integrity with smaller full width at half maximum of 29.13 rad·s, while the value in case A is 45.17 rad·s. The morphologies of dislocation etch pits in both cases show typical triangular symmetry with smooth surfaces. However, the dislocation density of 2.8×104 cm-2 in case B is only half of that in case A, and the distribution is more uniform, compared to the U-shaper in case A. 展开更多
关键词 sapphire single-crystal edge-defined film-fed growth two relative positions lattice integrity dislocations
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