1 IntroductionThe authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages[1]. The surface encoder con-sists of two fundamental el...1 IntroductionThe authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages[1]. The surface encoder con-sists of two fundamental elements: a sinusoidalmicrostructured metrology surface, which is re-ferred to as the angle grid, and a two-dimension-al (2D) slope sensor[2-3].展开更多
基金supported by agrant from Ministry of Education, Culture,Sports, Science and Technology of Japan(MEXT)
文摘1 IntroductionThe authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages[1]. The surface encoder con-sists of two fundamental elements: a sinusoidalmicrostructured metrology surface, which is re-ferred to as the angle grid, and a two-dimension-al (2D) slope sensor[2-3].
