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不同磨料对硬质合金刀片化学机械抛光的影响 被引量:3
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作者 毛美姣 刘舜 +1 位作者 胡自化 陈小告 《润滑与密封》 CAS CSCD 北大核心 2019年第10期144-150,共7页
为了提高硬质合金刀片前刀面化学机械抛光(CMP)的材料去除率和表面质量,采用6种不同硬度磨料(金刚石、碳化硼、碳化硅、氧化铝、氧化锆、氧化硅)对硬质合金刀片CMP加工,采用表面粗糙度测量仪和超景深三维显微系统观察抛光前后刀片的表... 为了提高硬质合金刀片前刀面化学机械抛光(CMP)的材料去除率和表面质量,采用6种不同硬度磨料(金刚石、碳化硼、碳化硅、氧化铝、氧化锆、氧化硅)对硬质合金刀片CMP加工,采用表面粗糙度测量仪和超景深三维显微系统观察抛光前后刀片的表面形貌,探讨硬质合金刀具CMP材料去除机制。实验结果表明:碳化硼磨料因粒径分散性大,造成硬质合金刀片表面划痕较多;低硬度的氧化硅、氧化锆、碳化硅磨料只能去除硬质合金刀片表面局部划痕区域;接近硬质合金刀片硬度的氧化铝磨料,可获得较好的表面质量;硬度最大的金刚石磨料在CMP加工时,在硬质合金刀片表面上产生机械应力,促进化学反应,获得比其他磨料更高的材料去除率和更好的表面质量。因此,在硬质合金刀片粗加工时可以选用氧化铝磨料,精加工时选用金刚石磨料。 展开更多
关键词 硬质合金刀片 化学机械抛光 磨料硬度 材料去除
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Influence of abrasive hardness on erosion wear of abrasive air jets 被引量:8
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作者 LIU Yong CHEN Chang-jiang +2 位作者 WEI Jian-ping LIU Xiao-tian WANG Xiang-dong 《Journal of Central South University》 SCIE EI CAS CSCD 2020年第2期356-371,共16页
To make clear the influence of abrasive hardness on the erosion effect,the erosion experiments of abrasive air jet with the same impact energy were carried out.The influence of abrasive hardness on the erosion effect ... To make clear the influence of abrasive hardness on the erosion effect,the erosion experiments of abrasive air jet with the same impact energy were carried out.The influence of abrasive hardness on the erosion effect is clarified by comparing the different erosion depths.The main conclusions are as follows.Under the same mass flow rate and mesh number,the abrasive with a higher density needs greater pressure irrespective of hardness.After erosion damage,the abrasive size exhibits a Weibull distribution.The shape parameterβand Weibull distribution function of four types of abrasives are derived by the least squares method;moreover,βis found to have a quadratic relation with abrasive hardness.The results of the erosion experiments show that abrasive hardness and erosion depth are quadratically related.By calculating the increase in surface energy after abrasive erosion crushing,it is found that abrasive hardness has a quadratic relation with surface energy and that the increases in erosion depth and surface energy consumption are basically identical.In conclusion,the effect is a soft abrasive impact when the ratio of abrasive hardness(Ha)to the material hardness(Hm)is<2.6,and it is a hard abrasive impact when Ha/Hm>3. 展开更多
关键词 abrasive air jet abrasive hardness rock erosion abrasive size distribution coal bed methane
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