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用于截头圆锥形溅射靶的高靶利用率磁性装置
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《表面技术》 EI CAS CSCD 北大核心 2004年第2期76-76,共1页
关键词 截头圆锥形溅射 靶利用率 磁性装置 磁控管溅射涂敷系统 东京电子株式会社 专利
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Corrosion resistance of self-healing three-dimensional Ti/Al-doped TiO_(2)nanotubes Ti_(3)AlC_(2)coating deposited by magnetron sputtered on copper
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作者 WANG Guo-qing WANG Ning +5 位作者 HU Yi-teng WANG Jing GAO Chuan-hui WANG Jie XUE Jun-jie YAN Ke-xin 《Journal of Central South University》 2025年第3期867-881,共15页
Copper is a versatile material,commonly utilized in power transmission and electronic devices,but its relative high reactivity necessitates a long-lasting protective technique.Here,we report a method that combines pla... Copper is a versatile material,commonly utilized in power transmission and electronic devices,but its relative high reactivity necessitates a long-lasting protective technique.Here,we report a method that combines plasma-enhanced non-equilibrium magnetron sputtering physical vapor deposition(PEUMS-PVD)and anodization to construct a self-healing three-dimensional Ti/Al-doped TiO_(2)nanotubes/Ti_(3)AlC_(2)coating on the surface of Cu substrates.This novel strategy enhances the corrosion resistance of copper substrates in marine environments,with corrosion current densities of up to 4.5643×10^(−8)A/cm^(2).Among them,the doping of nano-aluminum particles makes the coating self-healing.The mechanistic analysis of the corrosion behaviors during early immersion experiments was conducted using electrochemical noise,and revealed that during the initial stages of coating immersion,uniform corrosion predominates,with a minor occurrence of localized corrosion. 展开更多
关键词 magnetron sputtering TiO_(2)nanotubes Ti_(3)AlC_(2)coating corrosion resistance performance
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Electrochemical Behaviour of Sputtering Deposited DLC Films 被引量:1
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作者 LIU Erjia,ZENG A,LIU L X( School of Mechanical and Production Engineering, Nanyang Technological University ,50 Nanyang Avenue, Singapore 639798) 《中山大学学报(自然科学版)》 CAS CSCD 北大核心 2003年第A19期11-14,共4页
Diamondlike carbon (DLC) films were deposited via magnetron sputtering process. The energetic ion hombardment on the surface of growing film is one of the major parameters that control the atom mobility on the flirt... Diamondlike carbon (DLC) films were deposited via magnetron sputtering process. The energetic ion hombardment on the surface of growing film is one of the major parameters that control the atom mobility on the flirt1 surface and further the physical and chemical characteristics of the films. In this study, the energy of carbon ions was monitored by changing sputtering powerdensity, and its effect on the electrochemical performance of the films was investigated. For the deposition at a higher sputtering power density, a higher sp^3 content in the DLC films was achieved with denser structure and increased film-substrate adhesion. The impedance at the interface of Si substrate/sulfufic acid solution was significantly enhanced, and at the same time higher film resistance, lower capacitance, higher breakdown potential and longer breakdown time were observed, which were related to the significant sp^3 content of the DLC films. 展开更多
关键词 DLC薄膜 钻石形碳膜 磁控管溅射沉积法 电化学特性 薄膜生长
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MgB2超导薄膜
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《现代化工》 CAS CSCD 北大核心 2002年第12期61-61,共1页
关键词 二硼化镁 硼系超导电路 美国威斯康星大学 射频磁控管溅射 MGB2 超导薄膜
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超导永久磁石在高真空下的等离子体成膜技术
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《现代化工》 CAS CSCD 北大核心 2004年第9期71-71,共1页
关键词 超导永久磁石 等离子体成膜 磁控管溅射 太阳能电池 日本名古屋大学
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Microstructure and magnetic properties of granularFePt/(FePt)_(27)Ti_(73) films for ultrahigh-density recording media 被引量:2
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作者 于红云 孙会元 +4 位作者 封顺珍 高凤菊 周鸿娟 聂向富 孙玉平 《Journal of Central South University of Technology》 2005年第2期155-158,共4页
FePt granular films were prepared by direct current facing-target magnetron sputtering system onto glass substrates and subsequently in-situ annealed in vacuum. Vibrating sample magnetometer, X-ray diffraction and sca... FePt granular films were prepared by direct current facing-target magnetron sputtering system onto glass substrates and subsequently in-situ annealed in vacuum. Vibrating sample magnetometer, X-ray diffraction and scanning probe microscope were applied to study the magnetic properties, microstructures, morphologies and domain structures of the samples. (FePt)27Ti73 bilayer films were fabricated at various conditions to investigate the effect of Ti on FePt grains. The results show that without Ti matrix layer, FePt films deposited onto the glass substrates are fcc disordered; with addition of Ti matrix layer, FePt/Ti films form a ternary (FePt)27Ti73 alloy possessing fcc and L10 (111) mixed texture. FePt/(FePt)27Ti73 films with perfectly ordered L10(111) structure and unique magnetic properties can be obtained at Ti thickness of 35nm and substrate temperature of 250℃. The maximum coercivity is more than 240kA/m and the squareness ratio is more than 0.9. The obtained results suggest that the granular FePt/(FePt)27Ti73 films can be applicable to ultrahigh-density magnetic recording media. 展开更多
关键词 FePt magnetic layer ordered L1_0 structure facing-target magnetron sputtering system magnetic (recording) media
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Local segregation in Cu-In precursors and its effects on microstructures of selenized CuInSe_2 thin films
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作者 方玲 张弓 +2 位作者 庄大明 赵明 吴敏生 《Journal of Central South University of Technology》 2005年第1期13-16,共4页
Local segregation in Cu-In precursors and its effects on the element distribution and microstructures of selenized CuInSe2 thin films were investigated. Cu-In precursors with an ideal total mole ratio of Cu to In of 0... Local segregation in Cu-In precursors and its effects on the element distribution and microstructures of selenized CuInSe2 thin films were investigated. Cu-In precursors with an ideal total mole ratio of Cu to In of 0.92 were prepared by middle frequency alternating current magnetron sputtering with Cu-In alloy target, then CuInSe2 absorbers for solar cells were formed by selenization process in selenium atmosphere. Scanning electron microscope and energy dispersive X-ray spectroscope were used respectively to observe the surface morphologies and determine the compositions of both Cu-In precursors and CuInSe2 thin films. Their microstructures were characterized by X-ray diffractometry and Raman spectroscope. The results show that Cu-In precursors are mainly composed of (Cu11In9) phase with In-rich solid solution. Stoichiometric CuInSe2 thin films with a homogeneous element distribution and single chalcopyrite phase can be synthesized from a segregated Cu-In precursor film with an ideal total mole ratio of Cu to In of 0.92. CuInSe2 thin film shows P-type conductivity and its resistivity reaches 1.2×103Ω·cm. 展开更多
关键词 solar cell Cu-In precursor CuInSe_2 thin film SELENIZATION magnetron sputtering
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