A medium wave(MW)640×512(25μm)Mercury Cadmium Telluride(HgCdTe)polarimetric focal plane array(FPA)was demonstrated.The micro-polarizer array(MPA)has been carefully designed in terms of line grating structure opt...A medium wave(MW)640×512(25μm)Mercury Cadmium Telluride(HgCdTe)polarimetric focal plane array(FPA)was demonstrated.The micro-polarizer array(MPA)has been carefully designed in terms of line grating structure optimization and crosstalk suppression.A monolithic fabrication process with low damage was explored,which was verified to be compatible well with HgCdTe devices.After monolithic integration of MPA,NETD<9.5 mK was still maintained.Furthermore,to figure out the underlying mechanism that dominat⁃ed the extinction ratio(ER),specialized MPA layouts were designed,and the crosstalk was experimentally vali⁃dated as the major source that impacted ER.By expanding opaque regions at pixel edges to 4μm,crosstalk rates from adjacent pixels could be effectively reduced to approximately 2%,and promising ERs ranging from 17.32 to 27.41 were implemented.展开更多
俄罗斯RD&P Center ORION发展了一种基于平面HgCdTe光电二极管列阵和定制硅集成读出电路的焦平面列阵技术。做在碲镉汞液相外延层上的光伏探测器列阵以及硅读出电路是通过铟丘连接在蓝宝石互连衬底上的。冷却的硅读出电路是用n-MOS...俄罗斯RD&P Center ORION发展了一种基于平面HgCdTe光电二极管列阵和定制硅集成读出电路的焦平面列阵技术。做在碲镉汞液相外延层上的光伏探测器列阵以及硅读出电路是通过铟丘连接在蓝宝石互连衬底上的。冷却的硅读出电路是用n-MOS工艺制作的。本文描述了一些3μm-5μm和8μm-12μm时间延迟和积分(TDI)扫描红外焦平面线列的一般结构和发展结果,这些焦平面线列的规格分别为4×48、2×96、4×128和2×256。介绍了基于碲镉汞外延层的光伏型列阵的性能。描述了以TDI模式工作的混成焦平面列阵的测试方法及典型的调查结果。在8μm-12μm波长范围内,带四个TDI元件的4×48和4×128焦平面列阵的探测率高于(1-2)×10^(11)cmW-1Hz1/2,带两个TDI元件的2×96和2×256焦平面列阵的探测率高于(7-10)×10^(10)cmW-1Hz1/2。展开更多
基金Supported by the self-funded project of Kunming Institute of Physics。
文摘A medium wave(MW)640×512(25μm)Mercury Cadmium Telluride(HgCdTe)polarimetric focal plane array(FPA)was demonstrated.The micro-polarizer array(MPA)has been carefully designed in terms of line grating structure optimization and crosstalk suppression.A monolithic fabrication process with low damage was explored,which was verified to be compatible well with HgCdTe devices.After monolithic integration of MPA,NETD<9.5 mK was still maintained.Furthermore,to figure out the underlying mechanism that dominat⁃ed the extinction ratio(ER),specialized MPA layouts were designed,and the crosstalk was experimentally vali⁃dated as the major source that impacted ER.By expanding opaque regions at pixel edges to 4μm,crosstalk rates from adjacent pixels could be effectively reduced to approximately 2%,and promising ERs ranging from 17.32 to 27.41 were implemented.
文摘俄罗斯RD&P Center ORION发展了一种基于平面HgCdTe光电二极管列阵和定制硅集成读出电路的焦平面列阵技术。做在碲镉汞液相外延层上的光伏探测器列阵以及硅读出电路是通过铟丘连接在蓝宝石互连衬底上的。冷却的硅读出电路是用n-MOS工艺制作的。本文描述了一些3μm-5μm和8μm-12μm时间延迟和积分(TDI)扫描红外焦平面线列的一般结构和发展结果,这些焦平面线列的规格分别为4×48、2×96、4×128和2×256。介绍了基于碲镉汞外延层的光伏型列阵的性能。描述了以TDI模式工作的混成焦平面列阵的测试方法及典型的调查结果。在8μm-12μm波长范围内,带四个TDI元件的4×48和4×128焦平面列阵的探测率高于(1-2)×10^(11)cmW-1Hz1/2,带两个TDI元件的2×96和2×256焦平面列阵的探测率高于(7-10)×10^(10)cmW-1Hz1/2。
