硅微机械陀螺结构的驱动和检测模态谐振频率差(Δf)是决定其结构机械灵敏度的主要因素,当Δf≈0时,陀螺结构处于频率调谐状态,此时陀螺的机械灵敏度达到最大峰值且噪声和分辨率等指标可得到有效提高。提出了一种基于正交信号和驱动位移...硅微机械陀螺结构的驱动和检测模态谐振频率差(Δf)是决定其结构机械灵敏度的主要因素,当Δf≈0时,陀螺结构处于频率调谐状态,此时陀螺的机械灵敏度达到最大峰值且噪声和分辨率等指标可得到有效提高。提出了一种基于正交信号和驱动位移相位差的鉴相控制方法,以判断陀螺结构是否处于频率调谐状态,并通过调节检测模态刚度达到频率调谐目的。首先,介绍了陀螺结构检测模态谐振频率调节的原理,并结合结构参数量化分析了频率调节范围。其次,分析了鉴相控制方法,并在其基础上设计了频率调谐控制系统,建立了整机系统模型,并对其进行了稳定性分析。最后,结合整机模型进行了仿真,采用所提出的方法可实现(Δf)的快速、稳定、自主调节,系统的标度因数指标调谐前后分别为13.1 m V/(°/s)和220.6 m V/(°/s),大大提高了结构的机械灵敏度,验证了设计方案。展开更多
A new closed-loop driving scheme for the silicon micromachined vibratory gyroscope (SMVG) is proposed. The push-pull driving is adopted and in-phase AC and reverse-phase DC voltages are applied in the driving electrod...A new closed-loop driving scheme for the silicon micromachined vibratory gyroscope (SMVG) is proposed. The push-pull driving is adopted and in-phase AC and reverse-phase DC voltages are applied in the driving electrodes placed in both sides of the active combs, respectively. Driving performance analyses show that the frequency spectrum between driving moments and noise signals is separated. Therefore, the model of the closed-loop control is set up with the phase lock loop (PLL). The requirements for phases and gains of the sinusoidal selfdrive-oscillation are met by PLL, thus the closed-loop circuit reaches the self-drive-oscillation. Phase conditions of the sinusoidal self-drive-oscillation and the characteristic of phase discrimination of the PLL are used to eliminate the coupling between driving and sense signals, and noise signals. Finally, experimental results show that the variations of both the driving frequency and the amplitude are all under 0.02%. The precision and the reliability of the gyroscope are greatly improved.展开更多
文摘硅微机械陀螺结构的驱动和检测模态谐振频率差(Δf)是决定其结构机械灵敏度的主要因素,当Δf≈0时,陀螺结构处于频率调谐状态,此时陀螺的机械灵敏度达到最大峰值且噪声和分辨率等指标可得到有效提高。提出了一种基于正交信号和驱动位移相位差的鉴相控制方法,以判断陀螺结构是否处于频率调谐状态,并通过调节检测模态刚度达到频率调谐目的。首先,介绍了陀螺结构检测模态谐振频率调节的原理,并结合结构参数量化分析了频率调节范围。其次,分析了鉴相控制方法,并在其基础上设计了频率调谐控制系统,建立了整机系统模型,并对其进行了稳定性分析。最后,结合整机模型进行了仿真,采用所提出的方法可实现(Δf)的快速、稳定、自主调节,系统的标度因数指标调谐前后分别为13.1 m V/(°/s)和220.6 m V/(°/s),大大提高了结构的机械灵敏度,验证了设计方案。
文摘A new closed-loop driving scheme for the silicon micromachined vibratory gyroscope (SMVG) is proposed. The push-pull driving is adopted and in-phase AC and reverse-phase DC voltages are applied in the driving electrodes placed in both sides of the active combs, respectively. Driving performance analyses show that the frequency spectrum between driving moments and noise signals is separated. Therefore, the model of the closed-loop control is set up with the phase lock loop (PLL). The requirements for phases and gains of the sinusoidal selfdrive-oscillation are met by PLL, thus the closed-loop circuit reaches the self-drive-oscillation. Phase conditions of the sinusoidal self-drive-oscillation and the characteristic of phase discrimination of the PLL are used to eliminate the coupling between driving and sense signals, and noise signals. Finally, experimental results show that the variations of both the driving frequency and the amplitude are all under 0.02%. The precision and the reliability of the gyroscope are greatly improved.
