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杂质氧在离子束混合形成MoSi_2中的行为 被引量:1
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作者 姬成周 黄致新 刘伊犁 《北京师范大学学报(自然科学版)》 CAS CSCD 1989年第A04期39-44,共6页
Mo膜中的杂质氧明显减慢了Xe^+离子轰击诱生的MoSi_2的生长速率,氧的内扩散和再分布是由损伤分布支配的.小电流密度(<5×10^(-7)A/cm^2)Xe^+离子轰击引起的Mo/Si混合区,随轰击剂量增大而增大,但不生成钼硅化物相;衬底适当加温(&g... Mo膜中的杂质氧明显减慢了Xe^+离子轰击诱生的MoSi_2的生长速率,氧的内扩散和再分布是由损伤分布支配的.小电流密度(<5×10^(-7)A/cm^2)Xe^+离子轰击引起的Mo/Si混合区,随轰击剂量增大而增大,但不生成钼硅化物相;衬底适当加温(>300℃)条件下,Xe^+离子轰击诱生的MoSi_2为六角结构.后退火温度大于850℃时,六角结构的MoSi_2转变为四角结构.选择适当的轰击剂量和衬底温度,利用离子束混合技术可以生长出不含氧杂质的均匀的Mosi_2层. 展开更多
关键词 离子束混合 再分布 硅化物生成
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Formation kinetics and transition mechanism of CaO·SiO2 in low-calcium system during high-temperature sintering 被引量:2
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作者 PAN Xiao-lin CUI Wei-xue +1 位作者 ZHANG Can YU Hai-yan 《Journal of Central South University》 SCIE EI CAS CSCD 2020年第11期3269-3277,共9页
The crystal structure,formation kinetics and micro-morphology of CaO·SiO2 during high-temperature sintering process were studied in low-calcium system by XRD,FT-IR,Raman and SEM-EDS methods.When the molar ratio o... The crystal structure,formation kinetics and micro-morphology of CaO·SiO2 during high-temperature sintering process were studied in low-calcium system by XRD,FT-IR,Raman and SEM-EDS methods.When the molar ratio of CaCO3 to SiO2 is 1.0,β-2CaO·SiO2 forms firstly during the heating process,and then CaO·SiO2 is generated by the transformation reaction of pre-formed 2CaO·SiO2 with SiO2.3CaO·SiO2 and 3CaO·2SiO2 do not form either in the heating or sintering process.Rising the sintering temperature and prolonging the holding time promote the phase transition of 2CaO·SiO2 to CaO·SiO2,resulting in the sintered products a small blue shift and broadening in Raman spectra.The content of CS can reach 97.4%when sintered at 1400℃ for 1 h.The formation kinetics of CaO·SiO2 follows the second-order chemical reaction model,and the corresponding apparent activation energy and pre-exponential factor are 505.82 kJ/mol and 2.16×10^14 s^−1 respectively. 展开更多
关键词 calcium silicate compounds formation kinetics crystal structure MICROSTRUCTURE sinter process
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