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Laser-Surface Interaction of Compound Semiconductors-Desorption Induced by Electronic Excitation of Surface States
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作者 Noriaki Itoh Yasuo Nakai +3 位作者 Ken Hattori Akiko Okano Hidehiko Yamashita Jun-ichi kanasaki 《原子与分子物理学报》 CAS CSCD 北大核心 1990年第4期1598-1599,共2页
In this talk a review is given of currently carricd out studies on laser-induced desorption from surfaces of compound semiconductors.The reviewincludes only the non-thermal processes.which can be detected by eitherirr... In this talk a review is given of currently carricd out studies on laser-induced desorption from surfaces of compound semiconductors.The reviewincludes only the non-thermal processes.which can be detected by eitherirradiation with laser of subgap photon energies or with extremely low-intensity pulsed lasers.It is emphasized also that laser induced non-thermaldesorption is a powerful technique for surface characterization and surfacecleaning. 展开更多
关键词 化合物半导体 激光-表面相互作用 电子激发
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