TN249 2004053486 片式电阻激光微调过程中的调阻精度控制=Precision control during chip resistor laser trimming[刊,中]/王志娟(中科院长春光机所,吉林,长春(130022)),孙继凤…∥光电子·激光。—2004,15(1)。—86-88 提出了一...TN249 2004053486 片式电阻激光微调过程中的调阻精度控制=Precision control during chip resistor laser trimming[刊,中]/王志娟(中科院长春光机所,吉林,长春(130022)),孙继凤…∥光电子·激光。—2004,15(1)。—86-88 提出了一种基于激光刻蚀路径的修调电阻精度控制方法。该方法通过动态确定L型调阻图形的横、纵向切割长度实现对调阻精度的控制。展开更多
Although it has a significant advantage in gain properties,the lack of selective etching processes hinders ZnO lasing in on-chip applications.Herein,the circular ZnO microdisk pivoted on Si substrate is fabricated thr...Although it has a significant advantage in gain properties,the lack of selective etching processes hinders ZnO lasing in on-chip applications.Herein,the circular ZnO microdisk pivoted on Si substrate is fabricated through depositing ZnO on patterned silicon on an insulator(SOI)substrate.The cavity structure,morphology,and photoluminescence(PL)properties are studied systematically.The cavity shows a well-defined circular structure with oxygen vacancies.Under the synergistic action of surface tension and stress,the ZnO microdisk shows a unique toroid structure with a high sidewall surface finish.The ZnO microcavity(8μm in diameter)shows optically pumped whispering gallery modes(WGMs)lasing in the ultraviolet region with a Q factor exceeding 1300.More interestingly,the quality of the toroid ZnO microdisk cavity is high enough to support the bandgap renormalization(BGR)phenomenon.With the increasing pumping power,the lasing spectra will be modulated.The lasing spectrum undergoes a Burstein-Moss(BM)effect-induced blueshift and an electron-hole plasma(EHP)effect-induced redshift.展开更多
文摘TN249 2004053486 片式电阻激光微调过程中的调阻精度控制=Precision control during chip resistor laser trimming[刊,中]/王志娟(中科院长春光机所,吉林,长春(130022)),孙继凤…∥光电子·激光。—2004,15(1)。—86-88 提出了一种基于激光刻蚀路径的修调电阻精度控制方法。该方法通过动态确定L型调阻图形的横、纵向切割长度实现对调阻精度的控制。
文摘Although it has a significant advantage in gain properties,the lack of selective etching processes hinders ZnO lasing in on-chip applications.Herein,the circular ZnO microdisk pivoted on Si substrate is fabricated through depositing ZnO on patterned silicon on an insulator(SOI)substrate.The cavity structure,morphology,and photoluminescence(PL)properties are studied systematically.The cavity shows a well-defined circular structure with oxygen vacancies.Under the synergistic action of surface tension and stress,the ZnO microdisk shows a unique toroid structure with a high sidewall surface finish.The ZnO microcavity(8μm in diameter)shows optically pumped whispering gallery modes(WGMs)lasing in the ultraviolet region with a Q factor exceeding 1300.More interestingly,the quality of the toroid ZnO microdisk cavity is high enough to support the bandgap renormalization(BGR)phenomenon.With the increasing pumping power,the lasing spectra will be modulated.The lasing spectrum undergoes a Burstein-Moss(BM)effect-induced blueshift and an electron-hole plasma(EHP)effect-induced redshift.
