金属功函数波动作为器件制造过程中的主要工艺波动源之一,其波动变化对器件电学特性有极大的影响。本文提出一种简便、快速预测半导体场效应管金属功函数波动效应的方法,并将其与商业软件中计算功函数波动的统计阻抗场法进行对比分析。...金属功函数波动作为器件制造过程中的主要工艺波动源之一,其波动变化对器件电学特性有极大的影响。本文提出一种简便、快速预测半导体场效应管金属功函数波动效应的方法,并将其与商业软件中计算功函数波动的统计阻抗场法进行对比分析。参考IBM公司发布的14 nm SOI FinFET结构建立FinFET器件仿真模型并与实验数据对比验证后,引入金属功函数波动,分别用统计阻抗场法与本文提出的快速预测方法计算得到对应随机波动下模型的阈值电压V_(th)、关断电流I_(off)、工作电流I_(on)等电学特性参数的随机分布及这些参数结果的期望值、标准差、极差等统计参数,通过两者结果对比验证了快速预测方法的准确性。展开更多
The harmonic oscillator with time? dependent frequency and driving is studied by means of a new, simple method. By means of simple transformations of variables, the time dependent Schrdinger equation is first tr...The harmonic oscillator with time? dependent frequency and driving is studied by means of a new, simple method. By means of simple transformations of variables, the time dependent Schrdinger equation is first transformed into the time independent one. And then exact wave function is found in terms of solutions of the classical equation of motion of the oscillator.展开更多
In this paper, Noblesse's New Slender-Ship Wave-Making Theory was investigated numerically. Detailed expressions of zeroth and lst order wave resistance have been derived and calculation programs have also been co...In this paper, Noblesse's New Slender-Ship Wave-Making Theory was investigated numerically. Detailed expressions of zeroth and lst order wave resistance have been derived and calculation programs have also been compiled. In the single and double integral terms of Green function, the kernel function of wave resistance expression, special function expansion method and Chebyshev polynomials approach have been adopted respectively, which greatly simplify the calculation and increase the convergence speed.展开更多
文摘金属功函数波动作为器件制造过程中的主要工艺波动源之一,其波动变化对器件电学特性有极大的影响。本文提出一种简便、快速预测半导体场效应管金属功函数波动效应的方法,并将其与商业软件中计算功函数波动的统计阻抗场法进行对比分析。参考IBM公司发布的14 nm SOI FinFET结构建立FinFET器件仿真模型并与实验数据对比验证后,引入金属功函数波动,分别用统计阻抗场法与本文提出的快速预测方法计算得到对应随机波动下模型的阈值电压V_(th)、关断电流I_(off)、工作电流I_(on)等电学特性参数的随机分布及这些参数结果的期望值、标准差、极差等统计参数,通过两者结果对比验证了快速预测方法的准确性。
基金National Natural Science Foundation (K19972 0 11)
文摘The harmonic oscillator with time? dependent frequency and driving is studied by means of a new, simple method. By means of simple transformations of variables, the time dependent Schrdinger equation is first transformed into the time independent one. And then exact wave function is found in terms of solutions of the classical equation of motion of the oscillator.
文摘In this paper, Noblesse's New Slender-Ship Wave-Making Theory was investigated numerically. Detailed expressions of zeroth and lst order wave resistance have been derived and calculation programs have also been compiled. In the single and double integral terms of Green function, the kernel function of wave resistance expression, special function expansion method and Chebyshev polynomials approach have been adopted respectively, which greatly simplify the calculation and increase the convergence speed.
