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卧式扩散炉管的硅热氧化均匀性
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作者 李立谦 张现磊 +1 位作者 周涛 张志林 《半导体技术》 北大核心 2025年第2期187-193,共7页
基于卧式扩散炉管的硅热氧化工艺,对影响SiO_(2)薄膜厚度均匀性的工装和工艺气体体积流量进行了研究,并使用数学模型对不同工装条件下炉管内气体流动分布及平衡态气体体积流量进行分析和讨论。测试结果和分析结论表明,保证炉管出气口的... 基于卧式扩散炉管的硅热氧化工艺,对影响SiO_(2)薄膜厚度均匀性的工装和工艺气体体积流量进行了研究,并使用数学模型对不同工装条件下炉管内气体流动分布及平衡态气体体积流量进行分析和讨论。测试结果和分析结论表明,保证炉管出气口的气密性对生成的SiO_(2)薄膜厚度的均匀性至关重要。在通入O_(2)量可携带足够H2O蒸气进入扩散炉管中参与反应的情况下,SiO_(2)薄膜厚度的均匀性与通入O_(2)体积流量无关。当通入O_(2)体积流量过小时,其携带入的H2O蒸气不足,造成SiO_(2)薄膜厚度的均匀性差。在加装石英挡板且O_(2)体积流量为1.5 L/min时,可在卧式扩散炉管中制备出厚度不均匀性小于1%的SiO_(2)薄膜。对于理解硅的热氧化过程中的动力学分布和提升SiO_(2)薄膜厚度均匀性有着重要的意义。 展开更多
关键词 卧式扩散炉管 气体体积流量 气体流动分布 气密性 均匀性
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Coupled simulation of BES-CFD and performance assessment of energy recovery ventilation system for office model 被引量:6
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作者 Yunqing FAN T.Hayashi K.Ito 《Journal of Central South University》 SCIE EI CAS 2012年第3期633-638,共6页
Thermal comfort and indoor air quality as well as the energy efficiency have been recognized as essential parts of sustainable building assessment. This work aims to analyze the energy conservation of the heat recover... Thermal comfort and indoor air quality as well as the energy efficiency have been recognized as essential parts of sustainable building assessment. This work aims to analyze the energy conservation of the heat recovery ventilator and to investigate the effect of the air supply arrangement. Three types of mixing ventilation are chosen for the analysis of coupling ANSYS/FLUENT (a computational fluid dynamics (CFD) program) with TRNSYS (a building energy simulation (BES) software). The adoption of mutual complementary boundary conditions for CFD and BES provides more accurate and complete information of indoor air distribution and thermal performance in buildings. A typical office-space situated in a middle storey is chosen for the analysis. The office-space is equipped with air-conditioners on the ceiling. A heat recovery ventilation system directly supplies flesh air to the office space. Its thermal performance and indoor air distribution predicted by the coupled method are compared under three types of ventilation system. When the supply and return openings for ventilation are arranged on the ceiling, there is no critical difference between the predictions of the coupled method and BES on the energy consumption of HVAC because PID control is adopted for the supply air temperature of the occupied zone. On the other hand, approximately 21% discrepancy for the heat recovery estimation in the maximum between the simulated results of coupled method and BES-only can be obviously found in the floor air supply ventilation case. The discrepancy emphasizes the necessity of coupling CFD with BES when vertical air temperature gradient exists. Our future target is to estimate the optimum design of heat recovery ventilation system to control CO2 concentration by adjusting flow rate of flesh air. 展开更多
关键词 building energy simulation computational fluid dynamics (CFD) FLUENT TRNSYS energy saving
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