TN305 96032038光刻物镜部分相干成像的模拟计算方法研究=Simulatedcalculation methods of partial coherentimaging of photolithographic objectives[学,中]/唐波(中科院光电技术研究所.四川,成都(610209)).-61页.-1995,4. 介绍了一...TN305 96032038光刻物镜部分相干成像的模拟计算方法研究=Simulatedcalculation methods of partial coherentimaging of photolithographic objectives[学,中]/唐波(中科院光电技术研究所.四川,成都(610209)).-61页.-1995,4. 介绍了一种模拟计算部分相干光成像的实用化方法。根据Hopkins的部分相干理论,推导出数值计算模型。根据计算公式编制了部分相干成像模拟计算软件,可用于研究光刻成像中物镜的数值孔径、光源的波长、相干因子、离焦、波像差。展开更多
A 3-D numerical simulation with CFX software on physical field of multi-air channel coal burner in rotary kiln was carried out. The effects of various operational and structural parameters on flame feature and tempera...A 3-D numerical simulation with CFX software on physical field of multi-air channel coal burner in rotary kiln was carried out. The effects of various operational and structural parameters on flame feature and temperature distribution were investigated. A thermal measurement was conducted on a rotary kiln (4.5m in diameter, 90m in length) with four-air channel coal burner to determine the boundary conditions and to verify the simulation results. The calculation result shows that the distribution of velocity near burner exit is saddle-like; recirculation zones near nozzle and wall are useful for mixture primary air with coal and high temperature fume. A little central airflow can avoid coal backing up and cool nozzle. Adjusting the ratio of internal airflow to outer airflow is an effective and major means to regulate flame and temperature distribution in sintering region. Large whirlcone angle can intensify disturbution range at flame root to accelerate ignition and mixture. Large coal size can reduce high temperature region and result in coal combusting insufficiently. Too much combustion air will lengthen flame and increase heat loss.展开更多
文摘TN305 96032038光刻物镜部分相干成像的模拟计算方法研究=Simulatedcalculation methods of partial coherentimaging of photolithographic objectives[学,中]/唐波(中科院光电技术研究所.四川,成都(610209)).-61页.-1995,4. 介绍了一种模拟计算部分相干光成像的实用化方法。根据Hopkins的部分相干理论,推导出数值计算模型。根据计算公式编制了部分相干成像模拟计算软件,可用于研究光刻成像中物镜的数值孔径、光源的波长、相干因子、离焦、波像差。
文摘A 3-D numerical simulation with CFX software on physical field of multi-air channel coal burner in rotary kiln was carried out. The effects of various operational and structural parameters on flame feature and temperature distribution were investigated. A thermal measurement was conducted on a rotary kiln (4.5m in diameter, 90m in length) with four-air channel coal burner to determine the boundary conditions and to verify the simulation results. The calculation result shows that the distribution of velocity near burner exit is saddle-like; recirculation zones near nozzle and wall are useful for mixture primary air with coal and high temperature fume. A little central airflow can avoid coal backing up and cool nozzle. Adjusting the ratio of internal airflow to outer airflow is an effective and major means to regulate flame and temperature distribution in sintering region. Large whirlcone angle can intensify disturbution range at flame root to accelerate ignition and mixture. Large coal size can reduce high temperature region and result in coal combusting insufficiently. Too much combustion air will lengthen flame and increase heat loss.
