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STM钨针尖电化学加工及其装置的改进 被引量:9
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作者 姚琲 李春艳 +2 位作者 刘平 王慧 杨梅 《电子显微学报》 CAS CSCD 北大核心 2003年第3期256-258,共3页
本文报导利用自由落体的原理 ,设计了一种新的针尖和液面脱离装置制作了STM钨针尖 ,并与利用步进电机提升针尖的方法进行了比较。分析和实验说明 ,本方法脱离速度较快 ,简单经济 ,效果良好。
关键词 扫描隧道显微镜 扫描探针显微镜 针尖 液面脱离装置 电化学腐蚀 电化学加工 显微镜设计
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Composite iterative learning controller design for gradually varying references with applications in an AFM system
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作者 方勇纯 张玉东 董晓坤 《Journal of Central South University》 SCIE EI CAS 2014年第1期180-189,共10页
Learning control for gradually varying references in iteration domain was considered in this research, and a composite iterative learning control strategy was proposed to enable a plant to track unknown iteration-depe... Learning control for gradually varying references in iteration domain was considered in this research, and a composite iterative learning control strategy was proposed to enable a plant to track unknown iteration-dependent trajectories. Specifically, by decoupling the current reference into the desired trajectory of the last trial and a disturbance signal with small magnitude, the learning and feedback parts were designed respectively to ensure fine tracking performance. After some theoretical analysis, the judging condition on whether the composite iterative learning control approach achieves better control results than pure feedback contro! was obtained for varying references. The convergence property of the closed-loop system was rigorously studied and the saturation problem was also addressed in the controller. The designed composite iterative learning control strategy is successfully employed in an atomic force microscope system, with both simulation and experimental results clearly demonstrating its superior performance. 展开更多
关键词 iterative learning control SATURATION feedback control feedforward control atomic force microscope
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Composition design and properties of CoNbZr amorphous films deposited by unbalanced magnetron sputtering
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作者 郭光伟 唐光泽 +2 位作者 王亚军 马欣新 王玉江 《Journal of Central South University》 SCIE EI CAS 2009年第5期719-724,共6页
Co87Nb10Zr3,Co76Nb19Zr5,Co64Nb26Zr10 and Co64Nb16Zr20 amorphous films were deposited on noncrystalline glass substrates by DC unbalanced magnetron sputtering. The compositions of amorphous films were tailored in the l... Co87Nb10Zr3,Co76Nb19Zr5,Co64Nb26Zr10 and Co64Nb16Zr20 amorphous films were deposited on noncrystalline glass substrates by DC unbalanced magnetron sputtering. The compositions of amorphous films were tailored in the light of the individual deposition rate of Co,Nb and Zr. The amorphous films with the anticipated composition were prepared by means of co-sputtering Co,Nb and Zr targets simultaneously. It is indicated that there is interaction among three targets during co-sputtering. The morphology and composition of the films were observed by SEM,AFM and EDS. The structure and magnetic property were measured by XRD and physical property measurement system(PPMS) . The coercivity changes with the composition,varying from 240 to 1 600 A/m. After vacuum isothermal annealing at temperatures of 475,500,525 and 550 ℃ for 15 and 30 min,respectively,it is found that high Nb content is beneficial to improving thermal stability of amorphous films. The crystallized films have the mean grain size of 2-19 nm. 展开更多
关键词 CoNbZr amorphous film magnetron co-sputtering isothermal annealing
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