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硅微电容传声器的防粘连结构
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作者 潘昕 汪承灏 +1 位作者 徐联 魏建辉 《传感技术学报》 CAS CSCD 北大核心 2006年第05B期2279-2282,共4页
粘连是硅微电容传声器释放牺牲层过程中不容忽视的一个严重问题,大大降低了器件的成品率.在背板上制备微突出(bump)结构,可以较彻底阻止粘连现象发生,提高传声器的成品率.以往的防粘连微突出结构大都制备在上背板结构硅微电容传声器的... 粘连是硅微电容传声器释放牺牲层过程中不容忽视的一个严重问题,大大降低了器件的成品率.在背板上制备微突出(bump)结构,可以较彻底阻止粘连现象发生,提高传声器的成品率.以往的防粘连微突出结构大都制备在上背板结构硅微电容传声器的背板上,它制备工艺简单,但是无法得到厚背板,形成“软”背板,影响传声器的性能.本文提出在下背板上制备防粘连微突出结构,因为其可以做的较厚,避免了软背板的缺点,这时利用氮化硅形成微突出,运用该法制备的硅微电容传声器有效的防止粘连现象发生.对该方案还可进行改进,利用重硼掺杂单晶硅形成微突出,该工艺流程重复性好.最终我们研制成具有防粘结构的硅微电容传声器. 展开更多
关键词 机电系统 电容传声器 防粘连 微突出
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Bioleaching of chalcocite by mixed microorganisms subjected to mutation 被引量:2
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作者 康健 邱冠周 +3 位作者 高健 王海华 吴学玲 丁建南 《Journal of Central South University》 SCIE EI CAS 2009年第2期218-222,共5页
Mixed microorganisms with elevated activity of chalcocite-leaching were screened by mutation methods. The original microorganisms collected from acid mine drainage of different sites were mixed and then treated with m... Mixed microorganisms with elevated activity of chalcocite-leaching were screened by mutation methods. The original microorganisms collected from acid mine drainage of different sites were mixed and then treated with mutagens NO2^- , diethyl sulfate (DES), UV and their combinations, respectively. Five groups of mixed microorganisms with much stronger ore-leaching ability were obtained by screening on the leaching media. Among them, group E of mixed microorganisms (treated with 1% DES for 60 min) with the best perfonnance on chalcocite-leaching, increases the content of Cu^2+ by 101.4% in 20 d of leaching compared with the control culture. In addition, group E is more tolerant to Cu^2+ in media than the control without mutation treatment. Analysis for the diversity of microbial clones indicates that half of operational taxonomic units (OTUs) in group E are Acidithiobacillus ferrooxidans. These observations suggest that group E might have potentials for industrial application. 展开更多
关键词 CHALCOCITE mixed microorganisms BIOLEACHING MUTATION
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