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数字化白光扫描干涉仪的研究 被引量:18
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作者 张以谟 井文才 +2 位作者 张红霞 李海峰 李朝辉 《光学精密工程》 EI CAS CSCD 2004年第6期560-565,共6页
研究并设计实现了微形貌测量白光扫描干涉仪系统和光纤偏振耦合点监测白光扫描干涉仪系统。前者采用Mirau相移干涉形式,用压电陶瓷传感器PZT作移项器,主要用于微形貌测量,精度可达nm量级。后者采用光路补偿白光Michelson干涉形式,用格... 研究并设计实现了微形貌测量白光扫描干涉仪系统和光纤偏振耦合点监测白光扫描干涉仪系统。前者采用Mirau相移干涉形式,用压电陶瓷传感器PZT作移项器,主要用于微形貌测量,精度可达nm量级。后者采用光路补偿白光Michelson干涉形式,用格兰棱镜对偏振态进行调整控制,用移动参考臂来补偿由于耦合点所造成的光程差,光纤寄生偏振耦合测试仪的空间分辨率达到50mm,测量范围达到1km,探测灵敏度不小于-80dB(耦合模式与主模式的功率比)。 展开更多
关键词 白光干涉仪 扫描模式 微形貌测量 偏振耦合点位置测量
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Choice of reference surfaces for machined surface roughness in milling of SiC_p/Al composites 被引量:4
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作者 王阳俊 黄海波 +1 位作者 陈立国 孙立宁 《Journal of Central South University》 SCIE EI CAS 2014年第11期4150-4156,共7页
In order to choose the appropriate reference surface on the machined surface roughness of Si Cp/Al composites, the cutting experiments of Si Cp/Al composites were carried out, and the machined surface topography was m... In order to choose the appropriate reference surface on the machined surface roughness of Si Cp/Al composites, the cutting experiments of Si Cp/Al composites were carried out, and the machined surface topography was measured by OLS3000 Confocal laser scanning microscope. The 3D measured data of machined surface topography were analyzed by the area power spectrum density. The result shows that the texture of machined surface topography in milling of Si Cp/Al composites is almost isotropic. This is the reason that the values of Rq at different locations on the same machined surface are obviously different. Through the comparison of performance of different filtering methods, the robust least squares reference surface can be used to extract the surface roughness of SiC p/Al composites effectively. 展开更多
关键词 SiCp/Al composites surface topography milling filtering method power spectrum density
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