The quadrupole mass spectrometer array (QMSA) is the most important embranchment in the miniaturization of the quadrupole mass spectrometer (QMS). Making miniature mass filter is one of the key technology in the manuf...The quadrupole mass spectrometer array (QMSA) is the most important embranchment in the miniaturization of the quadrupole mass spectrometer (QMS). Making miniature mass filter is one of the key technology in the manufacture of QMSA. In this paper, the method of LIGA technology and its application in making mass spectrometer are introduced. This resolve radically the question how to making a miniature QMS in volume, weight, power and cost.展开更多
TH703 2001063768微镜单元的设计与加工工艺研究=Research on design and fabrication process of micromirror cell[刊,中]/蒋军彪,冯培德,魏芳琳,徐建东(飞行自动控制所.陕西,西安(710065))//航空精密制造技术.—2001,37(1).
文摘The quadrupole mass spectrometer array (QMSA) is the most important embranchment in the miniaturization of the quadrupole mass spectrometer (QMS). Making miniature mass filter is one of the key technology in the manufacture of QMSA. In this paper, the method of LIGA technology and its application in making mass spectrometer are introduced. This resolve radically the question how to making a miniature QMS in volume, weight, power and cost.
文摘TH703 2001063768微镜单元的设计与加工工艺研究=Research on design and fabrication process of micromirror cell[刊,中]/蒋军彪,冯培德,魏芳琳,徐建东(飞行自动控制所.陕西,西安(710065))//航空精密制造技术.—2001,37(1).
