1 IntroductionThe authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages[1]. The surface encoder con-sists of two fundamental el...1 IntroductionThe authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages[1]. The surface encoder con-sists of two fundamental elements: a sinusoidalmicrostructured metrology surface, which is re-ferred to as the angle grid, and a two-dimension-al (2D) slope sensor[2-3].展开更多
TB92 2002021470基于投影栅相位法的透明体表面微观形貌测量=Mea-surement of transparence surface microtopographybased on phase - approaching of projected grating[刊,中]/司书春,王蕴珊,周灿林(山东工业大学数理系.山东,济南(25...TB92 2002021470基于投影栅相位法的透明体表面微观形貌测量=Mea-surement of transparence surface microtopographybased on phase - approaching of projected grating[刊,中]/司书春,王蕴珊,周灿林(山东工业大学数理系.山东,济南(250061))。展开更多
基金supported by agrant from Ministry of Education, Culture,Sports, Science and Technology of Japan(MEXT)
文摘1 IntroductionThe authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages[1]. The surface encoder con-sists of two fundamental elements: a sinusoidalmicrostructured metrology surface, which is re-ferred to as the angle grid, and a two-dimension-al (2D) slope sensor[2-3].
文摘TB92 2002021470基于投影栅相位法的透明体表面微观形貌测量=Mea-surement of transparence surface microtopographybased on phase - approaching of projected grating[刊,中]/司书春,王蕴珊,周灿林(山东工业大学数理系.山东,济南(250061))。
