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Metal-sensitive diaphragm fiber optic Fabry-Perot pressure sensor with temperature compensation
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作者 WANG Hao-xing LIU Jia +6 位作者 WANG Hai-yang WANG Jun LI Yuan-hao YIN Jian-xiong WAN Shun DAI Yun-teng JIA Ping-gang 《中国光学(中英文)》 2025年第5期1255-1265,共11页
A metal-sensitive diaphragm fiber optic pressure sensor with temperature compensation is developed for pressure monitoring in high-temperature environments,such as engine fuel systems,oil and gas wells,and aviation hy... A metal-sensitive diaphragm fiber optic pressure sensor with temperature compensation is developed for pressure monitoring in high-temperature environments,such as engine fuel systems,oil and gas wells,and aviation hydraulic systems.The sensor combines a metal-sensitive diaphragm and a sapphire wafer to form a temperature-pressure dual Fabry-Perot(FP)interference cavity.A cross-correlation signal demodulation algorithm and a temperature decoupling method are utilized to reduce the influence of temperature crosstalk on pressure measurement.Experimental results show that the maximum nonlinear error of the sensor pressure measurement is 0.75%full scale(FS)and 0.99%FS at room temperature and 300°C,respectively,in a pressure range of 0−10 MPa and 0−1.5 MPa.The sensor’s pressure measurement accuracy is 1.7%FS when using the temperature decoupling method.The sensor exhibits good static pressure characteristics,stability,and reliability,providing an effective solution for high-temperature pressure monitoring applications. 展开更多
关键词 high-temperature pressure sensor dual Fabry-Perot interference cavity temperature compensa-tion cross-correlation algorithm
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