体心立方(body⁃centered cubic,BCC)金属W作为微型化器件中重要的互连材料,其电迁移行为对小尺寸集成电路的稳定性至关重要。本文利用原位透射电子显微(transmission electron microscopy,TEM)技术,在原子尺度下研究了电迁移诱导BCC金属...体心立方(body⁃centered cubic,BCC)金属W作为微型化器件中重要的互连材料,其电迁移行为对小尺寸集成电路的稳定性至关重要。本文利用原位透射电子显微(transmission electron microscopy,TEM)技术,在原子尺度下研究了电迁移诱导BCC金属W表面结构动态演变过程。结果表明,自由表面是主要电迁移路径;而{110}面和<111>方向分别是优选的迁移面迁移方向;电迁移过程中W表面形成特定的原子台阶或锯齿状结构。对于非低能晶面{002},在电流作用下仍能发生定向迁移,形成新的台阶结构。研究结果揭示了电迁移过程中表面结构的演化规律,为优化BCC金属材料的微观结构设计、提高其在高电流密度环境下的结构性能稳定性提供借鉴。展开更多
An Al-3Ti-0.2C-1RE grain refiner was prepared by in-situ reaction method.The microstructure was investigated by optical microscopy(OM),scanning electron microscopy(SEM) equipped with energy-dispersive spectrometry(EDS...An Al-3Ti-0.2C-1RE grain refiner was prepared by in-situ reaction method.The microstructure was investigated by optical microscopy(OM),scanning electron microscopy(SEM) equipped with energy-dispersive spectrometry(EDS) and X-ray diffraction(XRD).The results show that the Al-3Ti-0.2C-1RE grain refiner is composed of α-Al,TiAl3,TiC and Ti2 Al20 Ce phases.Compared with Al-3Ti-0.2C refiner,the morphology of TiAl3 phase is changed and Ti2 Al20 Ce phases form with the addition of RE.Accordingly,the refining performance is improved.The phase forming process of the refiner is as follows: Blocky Ti2 Al20 Ce and fine blocky TiAl3 form in the melt at the initial stage of reaction,then the fine blocky TiAl3 gradually disappears,and the blocky Ti2 Al20 Ce grows bigger with the increase of holding time.The predominant mechanism to synthesize TiC particles is the reaction between high concentration of solute Ti atoms and graphite particles.展开更多
文摘体心立方(body⁃centered cubic,BCC)金属W作为微型化器件中重要的互连材料,其电迁移行为对小尺寸集成电路的稳定性至关重要。本文利用原位透射电子显微(transmission electron microscopy,TEM)技术,在原子尺度下研究了电迁移诱导BCC金属W表面结构动态演变过程。结果表明,自由表面是主要电迁移路径;而{110}面和<111>方向分别是优选的迁移面迁移方向;电迁移过程中W表面形成特定的原子台阶或锯齿状结构。对于非低能晶面{002},在电流作用下仍能发生定向迁移,形成新的台阶结构。研究结果揭示了电迁移过程中表面结构的演化规律,为优化BCC金属材料的微观结构设计、提高其在高电流密度环境下的结构性能稳定性提供借鉴。
基金Project(51174177)supported by the National Natural Science Foundation of China
文摘An Al-3Ti-0.2C-1RE grain refiner was prepared by in-situ reaction method.The microstructure was investigated by optical microscopy(OM),scanning electron microscopy(SEM) equipped with energy-dispersive spectrometry(EDS) and X-ray diffraction(XRD).The results show that the Al-3Ti-0.2C-1RE grain refiner is composed of α-Al,TiAl3,TiC and Ti2 Al20 Ce phases.Compared with Al-3Ti-0.2C refiner,the morphology of TiAl3 phase is changed and Ti2 Al20 Ce phases form with the addition of RE.Accordingly,the refining performance is improved.The phase forming process of the refiner is as follows: Blocky Ti2 Al20 Ce and fine blocky TiAl3 form in the melt at the initial stage of reaction,then the fine blocky TiAl3 gradually disappears,and the blocky Ti2 Al20 Ce grows bigger with the increase of holding time.The predominant mechanism to synthesize TiC particles is the reaction between high concentration of solute Ti atoms and graphite particles.
