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微机电系统压电振动台迟滞补偿方法研究 被引量:2
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作者 郝瑞 彭倍 周吴 《中国机械工程》 EI CAS CSCD 北大核心 2021年第17期2118-2124,共7页
微机电系统(MEMS)压电振动台作为加速度传感器现场标定平台的新秀,能够提供片上物理驱动环境,为加速度传感器的快速重新标定提供持续稳定的加速度信号,然而用于压电振动台驱动的压电材料具有明显的迟滞特性,严重影响平台振动信号的稳定... 微机电系统(MEMS)压电振动台作为加速度传感器现场标定平台的新秀,能够提供片上物理驱动环境,为加速度传感器的快速重新标定提供持续稳定的加速度信号,然而用于压电振动台驱动的压电材料具有明显的迟滞特性,严重影响平台振动信号的稳定性和连续性。基于上述振动台振动特性,建立基于多项式拟合的压电迟滞模型,采用前馈控制和反馈控制相结合的复合控制方法对压电振动台进行控制和加速度滞后补偿。实验结果表明,在10 V(317 Hz)正弦电压激励下,MEMS压电振动台提供的简谐振动信号的加速度最大误差从1.3g降到了0.05g。 展开更多
关键词 MEMS压电振动平台 压电迟滞模型 复合控制 加速度传感器自标定
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Modeling and sliding mode control based on inverse compensation of piezo-positioning system
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作者 LI Zhi-bin XIN Yuan-ze +1 位作者 ZHANG Jian-qiang SUN Chong-shang 《中国光学(中英文)》 北大核心 2025年第1期170-185,共16页
In order to enhance the control performance of piezo-positioning system,the influence of hysteresis characteristics and its compensation method are studied.Hammerstein model is used to represent the dynamic hysteresis... In order to enhance the control performance of piezo-positioning system,the influence of hysteresis characteristics and its compensation method are studied.Hammerstein model is used to represent the dynamic hysteresis nonlinear characteristics of piezo-positioning actuator.The static nonlinear part and dynamic linear part of the Hammerstein model are represented by models obtained through the Prandtl-Ishlinskii(PI)model and Hankel matrix system identification method,respectively.This model demonstrates good generalization capability for typical input frequencies below 200 Hz.A sliding mode inverse compensation tracking control strategy based on P-I inverse model and integral augmentation is proposed.Experimental results show that compared with PID inverse compensation control and sliding mode control without inverse compensation,the sliding mode inverse compensation control has a more ideal step response and no overshoot,moreover,the settling time is only 6.2 ms.In the frequency domain,the system closed-loop tracking bandwidth reaches 119.9 Hz,and the disturbance rejection bandwidth reaches 86.2 Hz.The proposed control strategy can effectively compensate the hysteresis nonlinearity,and improve the tracking accuracy and antidisturbance capability of piezo-positioning system. 展开更多
关键词 piezo-positioning system hysteresis nonlinearity Hammerstein model Prandtl-Ishlinskii(P-I)model system identification sliding mode control
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