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O_2气中激光烧蚀Ta_2O_5产物离子的氧化反应
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作者 辜振宁 王雪峰 +2 位作者 秦启宗 陈宏 郑兰荪 《物理化学学报》 SCIE CAS CSCD 北大核心 1998年第11期961-964,共4页
The mass spectra of both positive and negative charged Ta-containing ions from laser ablatiou of Ta2O5 were measured using a time-of-flight mass spectrometer. Formation of iomc Ta-containing oxides such as TaO and TaO... The mass spectra of both positive and negative charged Ta-containing ions from laser ablatiou of Ta2O5 were measured using a time-of-flight mass spectrometer. Formation of iomc Ta-containing oxides such as TaO and TaO from Ta2O5 ablation in ambient O2 were observed for the first time. The influence of ambient O2 pressure on the intensities of ablated Ta-containing ions has also been studied. It is found that the subsequent oxidation reactions were involved in the ablation of Ta2O5 at different O2 pressure. The enthalpies of possible okidation reactions were theoretically calculated, and the possible formation reastions of the ionic Ta-contauing oxides are discussed. 展开更多
关键词 激光烧蚀 离子氧化 五氧化二钽薄膜 PLC 制备
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