A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezoresistive reasonable position was obtained through finite element analysis by ANSYS and the structu...A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezoresistive reasonable position was obtained through finite element analysis by ANSYS and the structure was formed by MEMS processes including lithography, ion implantation, PECVD and etching,etc. The standing wave barrel results show that the lowest sensitivity of the hydrophone is-200 d B and reach up to-160 d B(in which the voltage amplification factor is 300). It has a good frequency response characteristics in 25 Hz ～ 1500 Hz band. Directivity tests displayed that the hydrophone has a good "8"-shaped directivity,in which the resolution is not less than 30 d B, and asymmetry of the maximum axial sensitivity value is less than 1.2 d B.展开更多
The Vector Hydrophone(VH) is widely used to remotely detect underwater targets. Accurately measuring the self-noise of the VH provides an important basis for evaluating the performance of the detection system in which...The Vector Hydrophone(VH) is widely used to remotely detect underwater targets. Accurately measuring the self-noise of the VH provides an important basis for evaluating the performance of the detection system in which it is utilized, since the ability to acquire weak signals is determined by the VH self-noise level. To accurately measure the VH self-noise level in actual working conditions, the Dual-channel Transfer Function Method(DTFM) is proposed to reduce ambient background noise interference. In this paper, the underlying principles of DTFM in reducing ambient background noise is analyzed. The numerical simulations to determine the influence of ambient background noise, and the sensitivity difference of the two VHs on the measurement results are studied. The results of measuring the VH self-noise level in a small laboratory water tank by using DTMF indicate that ambient background noise interference can be reduced effectively by employing DTMF, more accurate self-noise level can be obtained as well. The DTMF provides an effective method for accurately measuring the self-noise level of VHs and also provides technical support for the practical application of the VH in underwater acoustics.展开更多
基金supported by the National Science Foundation of China (51205374, 61127008)Shanxi province Science foundation for Youths (2012021013-3)
文摘A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezoresistive reasonable position was obtained through finite element analysis by ANSYS and the structure was formed by MEMS processes including lithography, ion implantation, PECVD and etching,etc. The standing wave barrel results show that the lowest sensitivity of the hydrophone is-200 d B and reach up to-160 d B(in which the voltage amplification factor is 300). It has a good frequency response characteristics in 25 Hz ～ 1500 Hz band. Directivity tests displayed that the hydrophone has a good "8"-shaped directivity,in which the resolution is not less than 30 d B, and asymmetry of the maximum axial sensitivity value is less than 1.2 d B.
文摘The Vector Hydrophone(VH) is widely used to remotely detect underwater targets. Accurately measuring the self-noise of the VH provides an important basis for evaluating the performance of the detection system in which it is utilized, since the ability to acquire weak signals is determined by the VH self-noise level. To accurately measure the VH self-noise level in actual working conditions, the Dual-channel Transfer Function Method(DTFM) is proposed to reduce ambient background noise interference. In this paper, the underlying principles of DTFM in reducing ambient background noise is analyzed. The numerical simulations to determine the influence of ambient background noise, and the sensitivity difference of the two VHs on the measurement results are studied. The results of measuring the VH self-noise level in a small laboratory water tank by using DTMF indicate that ambient background noise interference can be reduced effectively by employing DTMF, more accurate self-noise level can be obtained as well. The DTMF provides an effective method for accurately measuring the self-noise level of VHs and also provides technical support for the practical application of the VH in underwater acoustics.
