Two beamlines and stations for soft X-ray lithography and hard X-ray lithography at NSRL are presented. Synchrotron radiation lithography (SRL) and mask techniques are developed, and the micro-electro-mechanical syste...Two beamlines and stations for soft X-ray lithography and hard X-ray lithography at NSRL are presented. Synchrotron radiation lithography (SRL) and mask techniques are developed, and the micro-electro-mechanical systems (MEMS) techniques are also investigated at NSRL. In this paper, some results based on SRL and MEMS techniques are reported, and sub-micron and high aspect ratio microstructures are given. Some micro-devices, such as microreactors are fabricated at NSRL.展开更多
为了达到二期工程实现机器长期、可靠、稳定运行的目标,对HLS控制系统进行了全面的改造和升级.在改造中,我们在国内率先采用国际加速器控制界流行的软件开发工具EPICS(experimental physics and industrial control system)作为开发环境...为了达到二期工程实现机器长期、可靠、稳定运行的目标,对HLS控制系统进行了全面的改造和升级.在改造中,我们在国内率先采用国际加速器控制界流行的软件开发工具EPICS(experimental physics and industrial control system)作为开发环境,并以其构架要求设计了软硬件系统,建立起一个分布式的控制系统.在此基础上开发了大量用于光源运行和机器研究的应用软件.运行结果表明,合肥光源控制系统改造很好地完成了二期工程的设计要求,满足了机器运行和机器研究的需要.展开更多
文摘Two beamlines and stations for soft X-ray lithography and hard X-ray lithography at NSRL are presented. Synchrotron radiation lithography (SRL) and mask techniques are developed, and the micro-electro-mechanical systems (MEMS) techniques are also investigated at NSRL. In this paper, some results based on SRL and MEMS techniques are reported, and sub-micron and high aspect ratio microstructures are given. Some micro-devices, such as microreactors are fabricated at NSRL.
文摘为了达到二期工程实现机器长期、可靠、稳定运行的目标,对HLS控制系统进行了全面的改造和升级.在改造中,我们在国内率先采用国际加速器控制界流行的软件开发工具EPICS(experimental physics and industrial control system)作为开发环境,并以其构架要求设计了软硬件系统,建立起一个分布式的控制系统.在此基础上开发了大量用于光源运行和机器研究的应用软件.运行结果表明,合肥光源控制系统改造很好地完成了二期工程的设计要求,满足了机器运行和机器研究的需要.
