We have been developing debris-free laser plasma sources for EUV lithography since 1996. Two types of debris-free sources, such as cryogenic target and gas-puff target laser plasma sources, were designed and built up ...We have been developing debris-free laser plasma sources for EUV lithography since 1996. Two types of debris-free sources, such as cryogenic target and gas-puff target laser plasma sources, were designed and built up in CIOMP. EUV radiation spectra of the sources with a variety of targets have been obtained by different ways.展开更多
The monodispersed latex particles were prepared by soap-free emulsion copolymerization of styrene(St) with hydroxyethyl methacrylate(HEMA). The nucleation mechanism and growth process of polymer latex particles were i...The monodispersed latex particles were prepared by soap-free emulsion copolymerization of styrene(St) with hydroxyethyl methacrylate(HEMA). The nucleation mechanism and growth process of polymer latex particles were investigated. The effects of HEMA on diameter of the latex particles and monomer conversion were discussed. The elemental analysis and XRD results showed that HEMA was dispersed mainly on the surface of the latex particles, it could stabilize the latex particles and lead the nucleation. The nucleation of particles occurs likely by homogeneous nucleation mechanism. The diameter of the latex particles decreased and the conversion increased, as HEMA′s dosage increased.展开更多
The monodispersed copolymer microspheres were prepared by soap free emulsion copolymerization from methyl methacrylate(MMA), butyl acrylate(BA) and acrylic acid(AA). The microspheres have an average diameter d p=1 10 ...The monodispersed copolymer microspheres were prepared by soap free emulsion copolymerization from methyl methacrylate(MMA), butyl acrylate(BA) and acrylic acid(AA). The microspheres have an average diameter d p=1 10 μm and monodispersity C v=2 02%. The monodispersed core shell copolymer microspheres having average diameter d p 1 14 μm and C v 1 18% were then prepared by seeding polymerization. It is confirmed from the number of seed microspheres and core shell microspheres that the polymerization of shell monomers was carried out only on the seed microspheres.展开更多
文摘We have been developing debris-free laser plasma sources for EUV lithography since 1996. Two types of debris-free sources, such as cryogenic target and gas-puff target laser plasma sources, were designed and built up in CIOMP. EUV radiation spectra of the sources with a variety of targets have been obtained by different ways.
文摘The monodispersed latex particles were prepared by soap-free emulsion copolymerization of styrene(St) with hydroxyethyl methacrylate(HEMA). The nucleation mechanism and growth process of polymer latex particles were investigated. The effects of HEMA on diameter of the latex particles and monomer conversion were discussed. The elemental analysis and XRD results showed that HEMA was dispersed mainly on the surface of the latex particles, it could stabilize the latex particles and lead the nucleation. The nucleation of particles occurs likely by homogeneous nucleation mechanism. The diameter of the latex particles decreased and the conversion increased, as HEMA′s dosage increased.
文摘The monodispersed copolymer microspheres were prepared by soap free emulsion copolymerization from methyl methacrylate(MMA), butyl acrylate(BA) and acrylic acid(AA). The microspheres have an average diameter d p=1 10 μm and monodispersity C v=2 02%. The monodispersed core shell copolymer microspheres having average diameter d p 1 14 μm and C v 1 18% were then prepared by seeding polymerization. It is confirmed from the number of seed microspheres and core shell microspheres that the polymerization of shell monomers was carried out only on the seed microspheres.
