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EVA与Silicone密封剂封装对选择性发射极太阳电池效率的影响研究
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作者 王海林 朱君兰 马跃 《太阳能学报》 EI CAS CSCD 北大核心 2013年第10期1750-1754,共5页
:在构建选择性发射极太阳电池组件光学模型的基础上,引入分贝概念,并在此基础上给出太阳电池组件的外量子效率和内量子效率定义式,使研究太阳电池组件中各部分封装材料对其光电转换效率的影响更加方便。根据密封剂EVA和Silicone的... :在构建选择性发射极太阳电池组件光学模型的基础上,引入分贝概念,并在此基础上给出太阳电池组件的外量子效率和内量子效率定义式,使研究太阳电池组件中各部分封装材料对其光电转换效率的影响更加方便。根据密封剂EVA和Silicone的光透射率测量数据,计算两种密封剂在280~1200nm波段内的吸收损耗。使用光谱响应测试仪分别测量密封剂EVA和Silicone封装的单片电池片在封装前后的量子效率,计算两种密封剂在短波段300~500nto处为选择性发射极电池组件带来的短路电流密度衰减。经比较得出,选择性发射极太阳电池组件使用密封剂Silicone封装可提高其短波响应,提高量子效率。 展开更多
关键词 选择性发射极 封装 silicone 量子效率
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Special epoxy silicone adhesive for inertial confinement fusion experiment 被引量:3
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作者 李芝华 李波 郑子樵 《Journal of Central South University of Technology》 EI 2007年第2期153-156,共4页
The effects of toughener and coupling agent on special epoxy silicone adhesive were discussed by researching the surface morphology characters, thermal properties and shear strength of the adhesive. The results indica... The effects of toughener and coupling agent on special epoxy silicone adhesive were discussed by researching the surface morphology characters, thermal properties and shear strength of the adhesive. The results indicate that silicone coupling agent (KH-550) can improve the shear strength of the epoxy silicone adhesive effectively. The mass fraction of the toughener in the epoxy silicone adhesive plays an important role in its properties. When the mass fraction of the toughener is less than 14%, the shear strength of the adhesive is low. When the mass fraction of the toughener is over 33%, thermal properties and shear strength of the adhesive decrease with the increasing of the toughener. The mass fraction of toughener of 25% results in good integral properties of the epoxy silicone adhesive. The morphologic analysis indicates that the micro-phase separation exists in the epoxy molecular chain and the silicone molecular chain of the epoxy silicone adhesive. 展开更多
关键词 inertial confinement fusion experiment epoxy silicone toughener coupling agent micro-phase separation
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Resistance Allocation Plan of Semiconducting Silicone Rubber Applied to Insulators for Anti-icing
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作者 WEI Xiaoxing JIA Zhidong +2 位作者 SUN Zhenting GUAN Zhicheng ZHAO Yuming 《中国电机工程学报》 EI CSCD 北大核心 2012年第13期I0016-I0016,共1页
The anti——icing and de·-icing methods of insulator strings are still under laboratory studies while many technologies are applied in operation to overhead conductors.The anti—icing method using semiconducting ... The anti——icing and de·-icing methods of insulator strings are still under laboratory studies while many technologies are applied in operation to overhead conductors.The anti—icing method using semiconducting silicone rubber coating applied to the bottom side of the insulators could get good results in a climate chamber.However,the resistance of the coating is an important factor influencing the anti—icing performance of the coated insulators.Thus the coating resistance should be determined. 展开更多
关键词 semiconducting silicone rubber ANTI-ICING selection of resistance leakage current precontamination pollution flashover
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Improvement of surface hydrophobicity on silicone rubber modified by CF_4 radio frequency capacitively coupled plasma
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作者 高松华 周克省 闻立时 《Journal of Central South University》 SCIE EI CAS 2009年第3期365-370,共6页
In order to improve the surface hydrophobicity, silicone rubber (SIR) samples were exposed to CF4 radio frequency (RF) capacitively coupled plasma (CCP). Attenuated total reflection Fourier transform infrared (... In order to improve the surface hydrophobicity, silicone rubber (SIR) samples were exposed to CF4 radio frequency (RF) capacitively coupled plasma (CCP). Attenuated total reflection Fourier transform infrared (ATR-FTIR) spectrum and X-ray photoelectron spectroscopy (XPS) were used to observe the variation of the functional groups of the modified SIR. Static contact angle (SCA) was employed to estimate the change of hydrophobicity of the modified SIR. The surface energy of SIR is reduced largely from 27.37 mJ/m^2 of original SIR sample to 2.94 mJ/m^2 of SIR sample treated by CF4 CCP modification at RF power of 200 W for a treatment time of 5 rnin. According to the XPS, ATR-FTIR and surface energy analysis, it is suggested that the improvement of hydrophobicity on the modified SIR surface is mainly ascribed to the decrease of surface energy, which is caused by the cooperation of the fluosilicic structure of Si--F or Si--F2 and the fluoric groups of C--CFn induced by the methyl replacement reaction and residual methyl groups of SIR surface. 展开更多
关键词 surface hydrophobicity silicone rubber radio frequency capacitively coupled plasma static contact angle
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Key fungal communities related to alleviating replanting stress of Lanzhou lily under silicon fertilizer and microbial agents application
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作者 WANG Yi-qin YU Yan-lin +5 位作者 YANG Hong-yu LI Hui HOU Lei MAN Hua-li HAN Jia SHI Gui-ying 《植物营养与肥料学报》 北大核心 2025年第2期395-406,共12页
【Objectives】Si and microbial application could relieve the crop replanting problems(CRPs).We further studied the change of key microorganisms that are related to the beneficial effects,aiming at provide reference fo... 【Objectives】Si and microbial application could relieve the crop replanting problems(CRPs).We further studied the change of key microorganisms that are related to the beneficial effects,aiming at provide reference for the manufacture and application of both microbial agents and Si fertilizer in food lily production.【Methods】A field experiment was conducted over a three-year period,from March 2019 to March 2022.The experimental field had been continuously cultivated with lily for 9 years.Three treatments were established:silicon fertilizer(SF),microbial agents(“Special 8^(TM)”,MF),and combined application of silicon fertilizer and microbial agents(SMF).A control group with blank soil(CK)was also included.At seedling stage of Lanzhou lilies in 2020 and 2021,the shoot and bulb dry weight,and the plant height and stem diameter of Lanzhou lilies were investigated for calculation of seedling index.In July 2020,20 plants were selected in each plot,and root zone soils were sampled at a depth of 20 cm,10 cm away from the roots,and then mixed to form a composite sample.The soil available Si and organic matter content were analyzed,and the fungal community structure and some specific microbial groups in soils were determined with high-throughput sequencing of ITS.【Results】All the three treatments significantly enhanced the lily plant growth and the seedling index,compared to CK.Besides,SF and MF treatments increased the relative abundances(RA)and diversity of fungal communities,and altered the community structures.The RA of some specific groups were found to be significantly correlated with the seedling index and/or soil available Si.Of them,the RA of the genera Fusarium,Dactylonectria,Humicola,Stilbella,and the species Humicola_grisea showed a positive correlation,while that of the genera Mortierella,Stilbella,Holtermanniella,and the species Mortierella_fatshederae showed a negative correlation with seedling index.The genera Fusarium,Stilbella,the species Humicola_grisea,and Dactylonectria_estremocensis showed a positive correlation,while the genura Stilbella,and the species Mortierella fatshederae showed a negative correlation with available Si content.In the co-occurence network of top twenty fungal genera and top sixteen bacterial genera(RA>0.2%),Holtermanniella was the only genus that interacted with the bacteria and negatively correlated with bacterial genus Blastococcus.Holtermanniella was also the most densely connected genera,followed by the genus Fusarium,Didymella and Humicola.In addition,the genus Holtermanniella was the key species connecting fungal and bacterial community in soil.Fungal functional prediction revealed that SF,MF and SMF treatments decreased plant pathogens guilds and increased the beneficial guilds Ectomycorrhizal,plant saprophyte,leaf saprophyte,and arbuscular mycorrhizal compared to CK.【Conclusions】Combined application of silicon fertilizer and microbial agents can alleviate continuous replanting problems of Lanzhou lilies through restoring the fungal community diversity,and promoting plant residue depredation,thus reducing soil born disease incidence.The beneficial genus Humicola and its one species H.grisea acts as bioconversion,and the genus Acremonium acts as plant pathogen inhibitor. 展开更多
关键词 Lanzhou lily soil fungi diversity pathotroph saprophyte silicon fertilization microbial agent
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Research Progress on Corrosion-Resistant Coatings of Carbon-Based Materials for the Semiconductor Field
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作者 Jianxin TU Kui HAO +5 位作者 Caixia HUO Ziyuan GUO Jianhao WANG Aijun LI Ruicheng BAI Zhihao JI 《中国材料进展》 北大核心 2025年第7期636-647,共12页
Semiconductors and related fields today hold vast application prospects.The semiconductor wafer fabrication process involves steps such as substrate preparation and epitaxy,which occur in high-temperature corrosive en... Semiconductors and related fields today hold vast application prospects.The semiconductor wafer fabrication process involves steps such as substrate preparation and epitaxy,which occur in high-temperature corrosive environments.Consequently,components like crucibles,susceptors and wafer carriers require carbon-based materials such as graphite and carbon-carbon composites.However,traditional carbon materials underperform in these extreme conditions,failing to effectively address the challenges.This leads to issues including product contamination and shortened equipment lifespan.Therefore,effective protection of carbon materials is crucial.This paper reviews current research status on the preparation methods and properties of corrosion-resistant coatings within relevant domestic and international fields.Preparation methods include various techniques such as physical vapor deposition(PVD),chemical vapor deposition(CVD)and the sol-gel method.Furthermore,it offers perspectives on future research directions for corrosion-resistant coated components in semiconductor equipment.These include exploring novel coating materials,improving coating preparation processes,enhancing coating corrosion resistance,as well as further investigating the interfacial interactions between coatings and carbon substrates to achieve better adhesion and compatibility. 展开更多
关键词 SEMICONDUCTOR high-temperature corrosion corrosive atmosphere carbon materials corrosion-resistant coatings silicon carbide tantalum carbide
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Controllable Synthesis of Few⁃layer Graphene/Cu Powders by Additives
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作者 MA Yu YANG Jun FU Jinliang 《材料导报》 北大核心 2025年第S1期441-447,共7页
Cu suffers from oxidation and corrosion during application due to its active chemical properties.Graphene⁃modified Cu can significantly improve its stability during application.However,copper is easily sintered at hig... Cu suffers from oxidation and corrosion during application due to its active chemical properties.Graphene⁃modified Cu can significantly improve its stability during application.However,copper is easily sintered at high temperatures,so that graphene cannot be grown inside.We demonstrate two kinds of spacers,graphite and SiO_(2),which are effective in preventing the sintering of copper and are used to assist in the growth of graphene.In the Cu⁃C system,the nucleation of graphene is scarce,and it tends to nucleate and grow on the concave surface of copper first,and then grow epitaxially to the convex surface of copper.Eventually,the obtained graphene is relatively thick.In the Cu⁃SiO_(2) system,due to the oxygen released by SiO_(2) at high temperatures,the surface of copper becomes rough.This leads to an increase in the number of graphene nucleation sites without preferred orientation,and relatively thin graphene is obtained.Two different growth mechanisms have been established for spacerseffects on graphene growth.It provides insights for graphene engineering for further applications. 展开更多
关键词 graphene/Cu powder silicon dioxides graphite antisintering chemical vapor deposition(CVD)
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硅对缓解水稻镉毒害效果的研究 被引量:3
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作者 张磊 常本超 +5 位作者 陈雪丽 王爽 谷学佳 李一丹 孙磊 王玉峰 《现代化农业》 2015年第4期16-17,共2页
镉(Cadmium ,Cd)是非必需的有毒元素,是农业环境和农产品的重要污染物质,镉对植物和人体健康具有毒害作用。近年来,由于化肥农药的不合理施用、污水灌溉等农作活动也引起了农田的镉污染。镉一旦在土壤中大量积累,就难以消除,因... 镉(Cadmium ,Cd)是非必需的有毒元素,是农业环境和农产品的重要污染物质,镉对植物和人体健康具有毒害作用。近年来,由于化肥农药的不合理施用、污水灌溉等农作活动也引起了农田的镉污染。镉一旦在土壤中大量积累,就难以消除,因此,如何解决镉在作物内的积累成为热点问题。硅(Silicon ,Si)是地球上继氧之后最为丰富的元素,硅能提高植物抗重金属性己是不争的事实,但对其用机理尚存在争论,K IDD等发现施硅可以促进玉米根部释放出酚类物质,而鳌合根际的铝,减少根系的吸收;硅通过区隔化作用使锰更均匀地分布在叶片中与重金属的共沉淀来减轻毒害。 展开更多
关键词 镉毒害 Silicon 水稻 有毒元素 污染物质 农业环境 毒害作用
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Stress relaxation behavior and life prediction of gasket materials used in proton exchange membrane fuel cells 被引量:1
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作者 LI Guo GONG Jian-ming +2 位作者 TAN Jin-zhu ZHU Da-sheng JIA Wen-hua 《Journal of Central South University》 SCIE EI CAS CSCD 2019年第3期623-631,共9页
Silicone rubber gaskets are employed to keep fuel gases and oxidation in their own zones. Due to the viscosity and elasticity, the assembly force could relax when the silicone rubber is compressed in a proton exchange... Silicone rubber gaskets are employed to keep fuel gases and oxidation in their own zones. Due to the viscosity and elasticity, the assembly force could relax when the silicone rubber is compressed in a proton exchange membrane fuel cell. In this work, the stress relaxation behavior of silicone rubber samples is studied under different temperatures and simulated operating conditions. The results show that the stress relaxes exponentially with time at 25% strain level, especially at higher temperature or with higher acid concentration solution. The three-term Prony series can simulate the viscoelastic behavior well, and the Master curves are established by applying a time–temperature superposition method to estimate the life of the samples. It can save approximately 50% and 78% of the test time when an operating temperature and acid solution are chosen appropriately. 展开更多
关键词 stress relaxation GASKET silicone rubber life prediction fuel cell
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IBM研究院院士对“摩尔定率”提出新观点——谈半导体技术未来的发展方向 被引量:1
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作者 胡平生 《半导体技术》 CAS CSCD 北大核心 2006年第12期908-911,共4页
关键词 半导体技术 研究院 IBM 摩尔 SILICON CMOS技术 院士 半导体工艺
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粗线条的2.5D硅转接板高速信号布线设计与仿真分析 被引量:2
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作者 平野 王海东 +5 位作者 王志 尚文亚 秦征 武晓萌 刘晓阳 于大全 《科学技术与工程》 北大核心 2014年第23期61-65,共5页
硅转接板作为2.5D集成的核心结构,通过TSV(through silicon via)提供垂直互联大大缩短了连线长度;同时其热膨胀系数与芯片较好匹配,并兼容圆片级工艺,因此硅转接板拥有着广阔的应用与发展空间。然而由于现有的封装工艺条件的限制,以及... 硅转接板作为2.5D集成的核心结构,通过TSV(through silicon via)提供垂直互联大大缩短了连线长度;同时其热膨胀系数与芯片较好匹配,并兼容圆片级工艺,因此硅转接板拥有着广阔的应用与发展空间。然而由于现有的封装工艺条件的限制,以及半导体硅高损耗的特性,在实现高速信号的高密度集成时,会出现损耗、串扰等多方面的信号完整性问题。结合封装工艺,针对硅转接板10μm线宽的RDL(redistribution layer)传输线多种布线结构在ANSYS的全波电磁场仿真软件HFSS中建立模型。通过仿真,得出硅衬底对传输线电性能的影响;以及单端和差分传输线的合理布线方式,并且提出了高速传输线的高密度排布结构。通过20μm线宽RDL传输线的高频电测试与仿真的结果分析,得出转接板RDL制作工艺的可靠性以及仿真方法的准确性,同时得出RDL层间介质厚度对传输线高频电性能的影响。 展开更多
关键词 2 5D封装 硅通孔(through SILICON VIA TSV) 转接板 RDL电仿真 电设计
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高度屈光不正人眼的视网膜自适应成像系统 被引量:4
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作者 刘丽丽 邓玉福 《红外与激光工程》 EI CSCD 北大核心 2012年第12期3331-3335,共5页
为了更好的利用液晶自适应成像系统进行具有较大屈光不正人眼像差校正及视网膜的成像,建立了一套基于低阶像差自补偿的眼底自适应成像系统。该系统采用基于人眼调节特性的光学系统进行屈光补偿,用夏克哈特曼波前传感器进行实时的波面探... 为了更好的利用液晶自适应成像系统进行具有较大屈光不正人眼像差校正及视网膜的成像,建立了一套基于低阶像差自补偿的眼底自适应成像系统。该系统采用基于人眼调节特性的光学系统进行屈光补偿,用夏克哈特曼波前传感器进行实时的波面探测,将探测所得波前畸变进行波前重构,通过LCOS波前校正器进行高阶像差的波面校正提高系统成像质量。经过校正后系统波前误差得到有效控制。光学系统的分辨率接近70 lp/mm,已经到达该光学系统的衍射极限分辨。可以得出:液晶自适应视网膜成像系统可以满足高度屈光不正情况下的人眼视网膜成像要求。 展开更多
关键词 自适应光学 夏克哈特曼波前传感器 LCOS(Liquid CRYSTAL on silicon) 衍射极限
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Body armour-New materials, new systems 被引量:30
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作者 Ian G.Crouch 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2019年第3期241-253,共13页
This is a very timely review of body armour materials and systems since new test standards are currently being written, or reviewed, and new, innovative products released. Of greatest importance, however, is the recen... This is a very timely review of body armour materials and systems since new test standards are currently being written, or reviewed, and new, innovative products released. Of greatest importance, however, is the recent evolution, and maturity, of the Ultra High Molecular Weight Polyethylene fibres enabling a completely new style of system to evolve e a stackable system of Hard Armour Plates. The science of body armour materials is quickly reviewed with emphasis upon current understanding of relevant energy-absorbing mechanisms in fibres, fabrics, polymeric laminates and ceramics. The trend in ongoing developments in ballistic fibres is then reviewed, analysed and future projections offered. Weaknesses in some of the ceramic grades are highlighted as is the value of using cladding materials to improve the robustness, and multi-strike performance, of Hard Armour Plates. Finally, with the drive for lighter, and therefore smaller, soft armour systems for military personnel the challenges for armour designers are reported, and the importance of the relative size of the Hard Armour Plate to the Soft Armour Insert is strongly emphasised. 展开更多
关键词 BODY armour BODY ARMOR Ceramic armour Reaction sintered silicon carbide UHMWPE Fibres Fabrics Strike-face materials Aramids Small-arms AMMUNITION
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修正的非正交紧束缚总能模型在Si团簇中的应用
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作者 仇树田 赵纪军 +1 位作者 罗有华 王广厚 《原子与分子物理学报》 CAS CSCD 北大核心 1998年第S1期277-278,共2页
采用修正后的非正交紧束缚总能模型并结合遗传算法研究了半导体团簇Si的基态能和基态构型,修正后的非正交紧束缚总能模型考虑了晶体场效应的影响,其结合能计算结果在实验结果的误差范围之内,通过它得出的基态构型与第一性原理的结... 采用修正后的非正交紧束缚总能模型并结合遗传算法研究了半导体团簇Si的基态能和基态构型,修正后的非正交紧束缚总能模型考虑了晶体场效应的影响,其结合能计算结果在实验结果的误差范围之内,通过它得出的基态构型与第一性原理的结果完全一致,这充分说明了修正后的非正交紧束缚总能模型的正确性。 展开更多
关键词 GENETIC algorithm SILICON CLUSTER Nonorthogonal tightbinding
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Microstructure and mechanical properties of as-cast and extruded Mg–8Li–3Al–0.7Si alloy 被引量:7
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作者 YANG Guo-qing PENG Xiao-dong +4 位作者 YANG Yan LI Meng-luan WEI Guo-bing SHAO Hong-yan WANG Bao 《Journal of Central South University》 SCIE EI CAS CSCD 2018年第4期764-771,共8页
Mg–8Li–3Al–0.7Si alloy was prepared by casting and deformed by hot extrusion in this study.And the microstructure of as-cast and extruded specimens was analyzed with OM,XRD,SEM and EDS.Results show that the specime... Mg–8Li–3Al–0.7Si alloy was prepared by casting and deformed by hot extrusion in this study.And the microstructure of as-cast and extruded specimens was analyzed with OM,XRD,SEM and EDS.Results show that the specimens are composed ofα-Mg,β-Li,AlLi,MgLiAl2 and Mg2Si phases.In as-extruded specimen,the microstructure is refined and theβ-Li phase has the effect of coordination during deformation.After hot extrusion,Chinese script Mg2Si phase is crushed into block-like and distributes uniformly in the matrix.Mechanical properties results show that the strength and elongation are both improved after hot extrusion. 展开更多
关键词 Mg–Li alloy microstructure mechanical properties EXTRUSION silicon
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Research on Abrasives in the Chemical Mechanical Polishing Process for Silicon Nitride Balls 被引量:6
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作者 YUAN Ju-long, Lü Bing-hai, LIN Xü, JI Shi-ming, ZHANG Li-bin (Mechanical and Electronic Engineering College, Zhejiang University of Technology, Hangzhou 310014, China) 《厦门大学学报(自然科学版)》 CAS CSCD 北大核心 2002年第S1期63-64,共2页
Silicon nitride (Si 3N 4) has been the main material for balls in ceramic ball bearings, for its lower density, high strength, high hardness, fine thermal stability and anticorrosive, and is widely used in various fie... Silicon nitride (Si 3N 4) has been the main material for balls in ceramic ball bearings, for its lower density, high strength, high hardness, fine thermal stability and anticorrosive, and is widely used in various fields, such as high speed and high temperature areojet engines, precision machine tools and chemical engineer machines. Silicon nitride ceramics is a kind of brittle and hard material that is difficult to machining. In the traditional finishing process of silicon nitride balls, balls are lapped by expensive diamond abrasive. The machining is inefficiency and the cost is high, but also lots of pits, scratch subsurface micro crazes and dislocations will be caused on the surface of the balls, the performance of the ball bearings would be declined seriously. In these year, a kind of new technology known as chemical mechanical polishing is introduced in the ultraprecision machining process of ceramic balls. In this technology, abrasives such as ZrO 2, CeO 2 whose hardness is close to or lower than the work material (Si 3N 4) are used to polishing the balls. In special slurry, these abrasives can chemo-mechanically react with the work material and environment (air or water) to generate softer material (SiO 2). And the resultants will be removed easily at 0.1 nm level. So the surface defects can be minimized, very smooth surface (Ra=4 nm) and fine sphericity (0.15~0.25 μm ) can be obtained, and the machining efficiency is also improved. The action mechanism of the abrasives in the chemical mechanical polishing process in finishing of silicon nitride ball will be introduced in this paper. 展开更多
关键词 silicon nitride ball chemical mechanical polishing ABRASIVES
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Desilication kinetics of calcined boron mud in molten sodium hydroxide media 被引量:4
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作者 NING Zhi-qiang SONG Qiu-shi +2 位作者 ZHAI Yu-chun XIE Hong-wei YU Kai 《Journal of Central South University》 SCIE EI CAS CSCD 2016年第9期2191-2198,共8页
Desilication kinetics of calcined boron mud(CBM) occurring in molten sodium hydroxide media was investigated. The effects of factors such as reaction temperature and Na OH-to-CBM mass ratio on silicon extraction effic... Desilication kinetics of calcined boron mud(CBM) occurring in molten sodium hydroxide media was investigated. The effects of factors such as reaction temperature and Na OH-to-CBM mass ratio on silicon extraction efficiency were studied. The results show that silicon extraction efficiency increases with increasing the reaction time and Na OH-to-CBM mass ratio. There are two stages for the desilication process of the calcined boron mud. The overall desilication process follows the shrinking-core model, and the first and second stages of the process were determined to obey the shrinking-core model for surface chemical reaction and the diffusion through the product layer, respectively. The activation energies of the first and second stages were calculated to be 44.78 k J/mol and 15.94 k J/mol, respectively. 展开更多
关键词 boron mud sodium hydroxide silicon dioxide KINETICS DESILICATION
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Study on the Performance of PECVD Silicon Nitride Thin Films 被引量:4
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作者 LIU Liang LIU Weiguo +1 位作者 CAO Na CAI Changlong 《Defence Technology(防务技术)》 SCIE EI CAS 2013年第2期152-159,共8页
Mechanical properties and corrosion resistance of Si3N4 films are studied by using different experiment parameters, such as plasma enhanced chemical vapor deposition(PECVD) RF power, ratio of reaction gas, reaction pr... Mechanical properties and corrosion resistance of Si3N4 films are studied by using different experiment parameters, such as plasma enhanced chemical vapor deposition(PECVD) RF power, ratio of reaction gas, reaction pressure and working temperature. The etching process of Si3N4 is studied by inductively coupled plasma (ICP) with a gas mixture of SF6 and O2. The influence of the technique parameters, such as ICP power, DC bias, gas composition, total flow rate, on the etching selectivity of Si3N4/EPG533 which is used as a mask layer and the etching rate of Si3N4 is studied, in order to get a better etching selectivity of Si3N4/EPG533 with a faster etching rate of Si3N4. The optimized process parameters of etching Si3N4 by ICP are obtained after a series of experiments and analysis. Under the conditions of total ICP power of 250 W, DC bias of 50W, total flow rate of 40 sccm and O2 composition of 30%, the etching selectivity of 2.05 can be reached when Si3N4 etching rate is 336 nm/min. 展开更多
关键词 electron technology silicon nitride STRESS inductively coupled plasma etch rate SELECTIVITY
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Screening, identification and desilication of a silicate bacterium 被引量:5
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作者 周洪波 曾晓希 +2 位作者 刘飞飞 邱冠周 胡岳华 《Journal of Central South University of Technology》 EI 2006年第4期337-341,共5页
The strain Lv(1- z) isolated from the Henan bauxite was characterized by morphological observation, biochemical and physiological identification, and 16S rDNA sequence analysis. The influences of temperature, initia... The strain Lv(1- z) isolated from the Henan bauxite was characterized by morphological observation, biochemical and physiological identification, and 16S rDNA sequence analysis. The influences of temperature, initial pH value, the volume of medium, shaking speed and illite concentration on the desilicating ability of the strain Lv(1- z) were investigated. The results show that the bacterium is a Gram-negative rod-shaped bacterium with oval endspores and thick capsule, but without flagellum. The biochemical and physiological tests indicate that the strain Lv(1- z) is similar to Bacillus rnucilaginosus. In GenBank the 16S rDNA sequence similarity of the strain Lv(1- z) and the B. rnucilaginosus YNUCC0001(AY571332) is more than 99%. Based on the above results, the strain Lv(1- z) is identified as B. rnucilaginosus. The optimum conditions for the strain L(1- z) to remove silicon from illite are as follows., temperature is 30℃ ;initial pH value is 7.5; medium volume in 200 mL bottle is 60 mL; shaking speed of rotary shaker is 220 r/m ; illite concentration is 1%. 展开更多
关键词 SCREENING IDENTIFICATION Bacillus rnucilaginosus silicon removal
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Multi objective prediction and optimization of control parameters in the milling of aluminium hybrid metal matrix composites using ANN and Taguchi-grey relational analysis 被引量:3
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作者 S.Ajith Arul Daniel R.Pugazhenthi +1 位作者 R.Kumar S.Vijayananth 《Defence Technology(防务技术)》 SCIE EI CAS CSCD 2019年第4期545-556,共12页
This study aims to optimize the input parameters such as mass fraction and particle size of SiC along with depth of cut,feed and cutting speed in the milling of Al5059/SiC/MoS2.The hybrid metal matrix composites are g... This study aims to optimize the input parameters such as mass fraction and particle size of SiC along with depth of cut,feed and cutting speed in the milling of Al5059/SiC/MoS2.The hybrid metal matrix composites are generally fabricated by reinforcing of different sizes(10,20,40 μm)of SiC with aluminium at a different levels(5%,10%& 15%)whereas the MoS2 addition is fixed as 2%.The effect of each control factor on response variables are analyzed through Taguchi S/N ratio method.Also,the most significant method for prediction of response parameters is satisfied by ANN model than the regression model.Analysis of variance(ANOVA)results envisage that mass fraction of SiC,feed rate is the most domineering factor on response variable. 展开更多
关键词 Silicon CARBIDE Temperature Surface ROUGHNESS Cutting FORCES Artificial neural network GREY RELATIONAL analysis
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