A new analytical model for reverse characteristics of 4H-SiC merged PN Sehottky diodes （MPS or 3BS） is developed. To accurately calculate the reverse characteristics of the 4H SiC MPS diode, the relationship between...A new analytical model for reverse characteristics of 4H-SiC merged PN Sehottky diodes （MPS or 3BS） is developed. To accurately calculate the reverse characteristics of the 4H SiC MPS diode, the relationship between the electric field at the Schottky contact and the reverse bias is analytically established by solving the cylindrical Poisson equation after the channel has pinched off. The reverse current density calculated from the Wentzel-Kramers-Brillouin （WKB） theory is verified by comparing it with the experimental result, showing that they are in good agreement with each other. Moreover, the effects of P-region spacing （S） and P-junction depth （Xj） on the characteristics of 4H-SiC MPS are analysed, and are particularly useful for optimizing the design of the high voltage MPS diodes.展开更多
A new structure of 4H-silicon carbide （SIC） merged PiN-Schottky （MPS） diodes with offset field-plate （FP） as edge termination is developed. To understand the influences of 4H-SiC MPS diodes with offset FP on the...A new structure of 4H-silicon carbide （SIC） merged PiN-Schottky （MPS） diodes with offset field-plate （FP） as edge termination is developed. To understand the influences of 4H-SiC MPS diodes with offset FP on the characteristics, simulations have been done by using ISE TCAD. Related factors of offset FP have been studied as well to optimise the reverse characteristics of 4H SiC MPS diodes. The simulation results show that the device using offset FP can create a higher blocking voltage under reverse bias as compared with that using field guard rings. Besides, the offset FP does not cause any extra steps in the manufacture of MPS diodes.展开更多
基金Project supported by the Xi’an Applied Materials Innovation Fund (Grant No XA-AM-200702)
文摘A new analytical model for reverse characteristics of 4H-SiC merged PN Sehottky diodes （MPS or 3BS） is developed. To accurately calculate the reverse characteristics of the 4H SiC MPS diode, the relationship between the electric field at the Schottky contact and the reverse bias is analytically established by solving the cylindrical Poisson equation after the channel has pinched off. The reverse current density calculated from the Wentzel-Kramers-Brillouin （WKB） theory is verified by comparing it with the experimental result, showing that they are in good agreement with each other. Moreover, the effects of P-region spacing （S） and P-junction depth （Xj） on the characteristics of 4H-SiC MPS are analysed, and are particularly useful for optimizing the design of the high voltage MPS diodes.
基金Project supported by Applied Materials Innovation Fund (Grant No. XA-AM-200702)the 13115 Innovation Engineering of Shaanxi Province,China (Grant No. 2008ZDKG-30)
文摘A new structure of 4H-silicon carbide （SIC） merged PiN-Schottky （MPS） diodes with offset field-plate （FP） as edge termination is developed. To understand the influences of 4H-SiC MPS diodes with offset FP on the characteristics, simulations have been done by using ISE TCAD. Related factors of offset FP have been studied as well to optimise the reverse characteristics of 4H SiC MPS diodes. The simulation results show that the device using offset FP can create a higher blocking voltage under reverse bias as compared with that using field guard rings. Besides, the offset FP does not cause any extra steps in the manufacture of MPS diodes.
