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Observation of nonconservation characteristics of radio frequency noise mechanism of 40-nm n-MOSFET 被引量:1
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作者 王军 彭小梅 +3 位作者 刘志军 王林 罗震 王丹丹 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第2期527-532,共6页
Bias non-conservation characteristics of radio-frequency noise mechanism of 40-nm n-MOSFET are observed by modeling and measuring its drain current noise. A compact model for the drain current noise of 40-nm MOSFET is... Bias non-conservation characteristics of radio-frequency noise mechanism of 40-nm n-MOSFET are observed by modeling and measuring its drain current noise. A compact model for the drain current noise of 40-nm MOSFET is proposed through the noise analysis. This model fully describes three kinds of main physical sources that determine the noise mechanism of 40-nm MOSFET, i.e., intrinsic drain current noise, thermal noise induced by the gate parasitic resistance, and coupling thermal noise induced by substrate parasitic effect. The accuracy of the proposed model is verified by noise measurements, and the intrinsic drain current noise is proved to be the suppressed shot noise, and with the decrease of the gate voltage, the suppressed degree gradually decreases until it vanishes. The most important findings of the bias non-conservative nature of noise mechanism of 40-nm n-MOSFET are as follows.(i) In the strong inversion region, the suppressed shot noise is weakly affected by the thermal noise of gate parasitic resistance. Therefore, one can empirically model the channel excess noise as being like the suppressed shot noise.(ii) In the middle inversion region, it is almost full of shot noise.(iii) In the weak inversion region, the thermal noise is strongly frequency-dependent, which is almost controlled by the capacitive coupling of substrate parasitic resistance. Measurement results over a wide temperature range demonstrate that the thermal noise of 40-nm n-MOSFET exists in a region from the weak to strong inversion, contrary to the predictions of suppressed shot noise model only suitable for the strong inversion and middle inversion region. These new findings of the noise mechanism of 40-nm n-MOSFET are very beneficial for its applications in ultra low-voltage and low-power RF, such as novel device electronic structure optimization, integrated circuit design and process technology evaluation. 展开更多
关键词 nanoscale MOSFET non-conservation characteristics noise mechanism radio frequency
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Extraction Characteristics of Radio Frequency ICP Ion Source
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作者 许沭华 任兆杏 沈克明 《Plasma Science and Technology》 SCIE EI CAS CSCD 2002年第4期1407-1410,共4页
An inductively coupled radio frequency ion source has been developed and its extraction characteristics measured. Beam current density up to 0.11 mA/ cm2 was obtained with argon at a rf discharge power of about 140 W.... An inductively coupled radio frequency ion source has been developed and its extraction characteristics measured. Beam current density up to 0.11 mA/ cm2 was obtained with argon at a rf discharge power of about 140 W. The dependences of ion beam on the discharge parameters such as rf source power, gas pressure and gas flow rate was studied. 展开更多
关键词 radio frequency inductively coupled plasma ion source extraction characteristics
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Aerodynamic actuation characteristics of radio-frequency discharge plasma and control of supersonic flow
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作者 Zhen Yang Hui-Min Song +3 位作者 Hong-Yu Wang Shan-Guang Guo Min Jia Kang Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第2期321-330,共10页
In this paper, aerodynamic actuation characteristics of radio-frequency(RF) discharge plasma are studied and a method is proposed for shock wave control based on RF discharge. Under the static condition, a RF diffuse ... In this paper, aerodynamic actuation characteristics of radio-frequency(RF) discharge plasma are studied and a method is proposed for shock wave control based on RF discharge. Under the static condition, a RF diffuse glow discharge can be observed; under the supersonic inflow, the plasma is blown downstream but remains continuous and stable.Time-resolved schlieren is used for flow field visualization. It is found that RF discharge not only leads to continuous energy deposition on the electrode surface but also induces a compression wave. Under the supersonic inflow condition, a weak oblique shock wave is induced by discharge. Experimental results of the shock wave control indicate that the applied actuation can disperse the bottom structure of the ramp-induced oblique shock wave, which is also observed in the extracted shock wave structure after image processing. More importantly, this control effect can be maintained steadily due to the continuous high-frequency(MHz) discharge. Finally, correlations for schlieren images and numerical simulations are employed to further explore the flow control mechanism. It is observed that the vortex in the boundary layer increases after the application of actuation, meaning that the boundary layer in the downstream of the actuation position is thickened. This is equivalent to covering a layer of low-density smooth wall around the compression corner and on the ramp surface, thereby weakening the compressibility at the compression corner. Our results demonstrate the ability of RF plasma aerodynamic actuation to control the supersonic airflow. 展开更多
关键词 radio-frequency(rf) DISCHARGE PLASMA surface DISCHARGE FLOW control aerodynamic ACTUATION
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Influences of the inner diameter of the solid shielding tube on the characteristics of the radio-frequency cold atmospheric plasma jet
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作者 Jing LI Heping LI 《Plasma Science and Technology》 SCIE EI CAS CSCD 2019年第9期82-90,共9页
Active control of the local environment of the cold atmospheric plasma(CAP) jet is of great importance in actual applications since the CAP operates in an open atmosphere with the inevitable entrainment of the surroun... Active control of the local environment of the cold atmospheric plasma(CAP) jet is of great importance in actual applications since the CAP operates in an open atmosphere with the inevitable entrainment of the surrounding cold air. In this paper, the solid shielding effects of the cylindrical quartz tubes with different inner diameters on the characteristics of the CAP jets driven by a radio-frequency(RF) power supply are studied experimentally. The experimental results show that the total length of the shielded plasma jet can be increased significantly by an appropriate combination of the quartz tube inner diameter and that of the plasma generator nozzle exit with other parameters being unchanged. This phenomenon may be qualitatively attributed to the loss of diffusion of the charged particles in the radial direction under different inner diameters of the quartz tubes. Compared with the plasma free jet, the plasma shielding jet is produced with optimized parameters including longer plasma jet length, higher concentrations of chemically reactive species, higher rotational, vibrational, and electron excitation temperatures when the inner diameters of the solid shielding tube and the generator nozzle exit are the same. A maximum plasma jet length of 52.0 cm is obtained in contrast to that of 5.0 cm of the plasma free jet in this study. The experimental results indicate that the solid shielding effect provides a new method for the active control of the local environment of the RF-CAP jet operating in an open atmosphere. 展开更多
关键词 COLD ATMOSPHERIC plasma JET radio-frequency glow discharge SOLID SHIELDING effect effect of the tube inner diameter active control of plasma JET characteristics
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Effects of back gate bias on radio-frequency performance in partially depleted silicon-on-inslator nMOSFETs
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作者 吕凯 陈静 +4 位作者 罗杰馨 何伟伟 黄建强 柴展 王曦 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第8期605-608,共4页
The effects of back gate bias(BGEs) on radio-frequency(RF) performances in PD SOI n MOSFETs are presented in this paper. Floating body(FB) device, T-gate body-contact(TB) device, and tunnel diode body-contact(TDBC) de... The effects of back gate bias(BGEs) on radio-frequency(RF) performances in PD SOI n MOSFETs are presented in this paper. Floating body(FB) device, T-gate body-contact(TB) device, and tunnel diode body-contact(TDBC) device, of which the supply voltages are all 1.2 V, are compared under different back gate biases by different figures of merit, such as cut-off frequency( fT), maximum frequency of oscillation( fmax), etc. Because of the lack of a back gate conducting channel, the drain conductance(gd) of TDBC transistor shows a smaller degradation than those of the others, and the trans-conductance(gm) of TDBC is almost independent of back gate bias. The values of fT of TDBC are also kept nearly constant under different back gate biases. However, RF performances of FB and TB each show a significant degradation when the back gate bias is larger than ~ 20 V. The results indicate that TDBC structures could effectively improve the back gate bias in RF performance. 展开更多
关键词 silicon-on-insulator(SOI) back gate bias tunnel diode body contact radio-frequency(rf)
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Spatial distribution of electron characteristic in argon rf glow discharges 被引量:3
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作者 祝祖送 林揆训 +3 位作者 林璇英 邱桂明 余云鹏 罗以琳 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第5期969-974,共6页
The spatial distributions of the electron density and the mean electron energy of argon radio frequency (rf) glow discharge plasma in a plasma-enhanced chemical vapour deposition (PECVD) system have been investiga... The spatial distributions of the electron density and the mean electron energy of argon radio frequency (rf) glow discharge plasma in a plasma-enhanced chemical vapour deposition (PECVD) system have been investigated using an established movable Langmuir probe. The results indicate that in the axial direction the electron density tends to peak at midway between the two electrodes while the axial variation trend of mean electron energy is different from that of the electron density, the mean electron energy is high near the electrodes. And the mean electron energy near the cathode is much higher than that near the anode. This article focuses on the radial distribution of electron density and mean electron energy. A proposed theoretical model distribution agrees well with the experimental one: the electron density and the mean electron energy both increase from the centre of the glow to the edge of electrodes. This is useful for better understanding the discharge mechanism and searching for a better deposition condition to improve thin film quality. 展开更多
关键词 spatial distribution of electron characteristic a movable Langmuir probe radio frequency glow discharge
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Radio Frequency Fingerprint-Based Satellite TT&C Ground Station Identification Method 被引量:1
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作者 Xiaogang Tang Junhao Feng +1 位作者 Binquan Zhang Hao Huan 《Journal of Beijing Institute of Technology》 EI CAS 2023年第1期1-12,共12页
This study presents a radio frequency(RF)fingerprint identification method combining a convolutional neural network(CNN)and gated recurrent unit(GRU)network to identify measurement and control signals.The proposed alg... This study presents a radio frequency(RF)fingerprint identification method combining a convolutional neural network(CNN)and gated recurrent unit(GRU)network to identify measurement and control signals.The proposed algorithm(CNN-GRU)uses a convolutional layer to extract the IQ-related learning timing features.A GRU network extracts timing features at a deeper level before outputting the final identification results.The number of parameters and the algorithm’s complexity are reduced by optimizing the convolutional layer structure and replacing multiple fully-connected layers with gated cyclic units.Simulation experiments show that the algorithm achieves an average identification accuracy of 84.74% at a -10 dB to 20 dB signal-to-noise ratio(SNR)with fewer parameters and less computation than a network model with the same identification rate in a software radio dataset containing multiple USRP X310s from the same manufacturer,with fewer parameters and less computation than a network model with the same identification rate.The algorithm is used to identify measurement and control signals and ensure the security of the measurement and control link with theoretical and engineering applications. 展开更多
关键词 measurement and control security radio frequency(rf)fingerprinting identity identification deep learning
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Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure 被引量:1
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作者 Tagra Samir 刘悦 +1 位作者 赵璐璐 周艳文 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第11期329-337,共9页
A one-dimensional(1D) fluid model on capacitively coupled radio frequency(RF) argon glow discharge between parallel-plates electrodes at low pressure is established to test the effect of the driving frequency on e... A one-dimensional(1D) fluid model on capacitively coupled radio frequency(RF) argon glow discharge between parallel-plates electrodes at low pressure is established to test the effect of the driving frequency on electron heating. The model is solved numerically by a finite difference method. The numerical results show that the discharge process may be divided into three stages: the growing rapidly stage, the growing slowly stage, and the steady stage. In the steady stage,the maximal electron density increases as the driving frequency increases. The results show that the discharge region has three parts: the powered electrode sheath region, the bulk plasma region and the grounded electrode sheath region. In the growing rapidly stage(at 18 μs), the results of the cycle-averaged electric field, electron temperature, electron density, and electric potentials for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are compared, respectively. Furthermore,the results of cycle-averaged electron pressure cooling, electron ohmic heating, electron heating, and electron energy loss for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are discussed, respectively. It is also found that the effect of the cycle-averaged electron pressure cooling on the electrons is to "cool" the electrons; the effect of the electron ohmic heating on the electrons is always to "heat" the electrons; the effect of the cycle-averaged electron ohmic heating on the electrons is stronger than the effect of the cycle-averaged electron pressure cooling on the electrons in the discharge region except in the regions near the electrodes. Therefore, the effect of the cycle-averaged electron heating on the electrons is to "heat" the electrons in the discharge region except in the regions near the electrodes. However, in the regions near the electrodes, the effect of the cycle-averaged electron heating on the electron is to "cool" the electrons. Finally, the space distributions of the electron pressure cooling the electron ohmic heating and the electron heating at 1/4 T, 2/4 T, 3/4 T, and 4/4 T in one RF-cycle are presented and compared. 展开更多
关键词 capacitively coupled plasmas electron heating radio frequency(rf) glow discharges driving frequency
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Rydberg electromagnetically induced transparency and Autler–Townes splitting in a weak radio-frequency electric field 被引量:1
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作者 Liping Hao Yongmei Xue +3 位作者 Jiabei Fan Yuechun Jiao Jianming Zhao Suotang Jia 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第5期80-84,共5页
We utilize an electromagnetically induced transparency(EIT) of a three-level cascade system involving Rydberg state in a room-temperature cell, formed with a cesium 6 S_(1/2)–6 P_(3/2)–66 S_(1/2) scheme, to investig... We utilize an electromagnetically induced transparency(EIT) of a three-level cascade system involving Rydberg state in a room-temperature cell, formed with a cesium 6 S_(1/2)–6 P_(3/2)–66 S_(1/2) scheme, to investigate the Autler–Townes(AT)splitting resulting from a 15.21-GHz radio-frequency(RF) field that couples the |66 S_(1/2) → |65 P_(1/2) Rydberg transition.The radio-frequency electric field induced AT splitting, γAT, is defined as the peak-to-peak distance of an EIT-AT spectrum.The dependence of AT splitting γAT on the probe and coupling Rabi frequency, ?_p and ?_c, is investigated. It is found that the EIT-AT splitting strongly depends on the EIT linewidth that is related to the probe and coupling Rabi frequency in a weak RF-field regime. Using a narrow linewidth EIT spectrum would decrease the uncertainty of the RF field measurements.This work provides new experimental evidence for the theoretical framework in [J. Appl. Phys. 121, 233106(2017)]. 展开更多
关键词 RYDBERG electromagnetically induced transparency-Autler–Townes (EIT-AT) cascade FOUR-LEVEL atom radio-frequency (rf) electric field
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A novel radio frequency coil for veterinary magnetic resonance imaging system
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作者 孟斌 黄开文 王为民 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第7期408-413,共6页
In this article, a novel designed radio frequency (RF) coil is designed and built for the imaging of puppies in a V-shape permanent magnetic resonance imaging (MRI) system. Two sets of Helmholtz coil pairs with a ... In this article, a novel designed radio frequency (RF) coil is designed and built for the imaging of puppies in a V-shape permanent magnetic resonance imaging (MRI) system. Two sets of Helmholtz coil pairs with a V-shape structure are used to improve the holding of an animal in the coil. The homogeneity and the sensitivity of the RF field in the coil are analysed by theoretical calculation. The size and the shape of the new coil are optimized and validated by simulation through using the finite element method (FEM). Good magnetic resonance (MR) images are achieved on a shepherd dog. 展开更多
关键词 veterinary magnetic resonance imaging (MRI) radio frequency (rf coil homogeneity receiving sensitivity
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Comparison of pulse-modulated and continuous operation modes of a radio-frequency inductive ion source
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作者 Ilya ZADIRIEV Elena KRALKINA +2 位作者 Konstantin VAVILIN Alexander NIKONOV Georgy SHVIDKIY 《Plasma Science and Technology》 SCIE EI CAS CSCD 2023年第2期131-145,共15页
The paper describes an experimental study of the characteristics of a pulse-modulated radiofrequency(RF)discharge sustained at low pressures,typical of the operating modes of RF gridded ion sources.The motivation for ... The paper describes an experimental study of the characteristics of a pulse-modulated radiofrequency(RF)discharge sustained at low pressures,typical of the operating modes of RF gridded ion sources.The motivation for the study is the question of whether the RF pulsemodulated mode can increase the efficiency of the ion source.The ion current values extracted from an RF inductive ion source operating in continuous and pulse-modulated modes were compared.The experimental data were also compared with the parameter calculations based on a0D numerical model of the discharge.The measurements showed that the pulse-modulated operation mode of the RF ion source had a noticeable advantage when the power of the RF generator was 140 W or lower.However,as the generator power increased,the advantage was lost because the pulse-modulated operation mode,having a higher RF power instant value,entered the region of existence sooner than the continuous mode,where the ion production cost begins to grow with RF power. 展开更多
关键词 discharge plasma radio frequency(rf) PULSE ELECTRONS ions
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Ignition dynamics of radio frequency discharge in atmospheric pressure cascade glow discharge
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作者 张亚容 韩乾翰 +2 位作者 方骏林 郭颖 石建军 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第2期354-357,共4页
A cascade glow discharge in atmospheric helium was excited by a microsecond voltage pulse and a pulse-modulated radio frequency(RF) voltage, in which the discharge ignition dynamics of the RF discharge burst was inves... A cascade glow discharge in atmospheric helium was excited by a microsecond voltage pulse and a pulse-modulated radio frequency(RF) voltage, in which the discharge ignition dynamics of the RF discharge burst was investigated experimentally. The spatio-temporal evolution of the discharge, the ignition time and optical emission intensities of plasma species of the RF discharge burst were investigated under different time intervals between the pulsed voltage and RF voltage in the experiment. The results show that by increasing the time interval between the pulsed discharge and RF discharge burst from 5 μs to 20 μs, the ignition time of the RF discharge burst is increased from 1.6 μs to 2.0 μs, and the discharge spatial profile of RF discharge in the ignition phase changes from a double-hump shape to a bell-shape. The light emission intensity at 706 nm and 777 nm at different time intervals indicates that the RF discharge burst ignition of the depends on the number of residual plasma species generated in the pulsed discharges. 展开更多
关键词 pulsed voltage modulated radio frequency radio frequency(rf)discharge burst residual plasma species
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Influence of Discharge Parameters on Tuned Substrate Self-Bias in an Radio-Frequency Inductively Coupled Plasma
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作者 丁振峰 孙景超 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2005年第6期3117-3121,共5页
The tuned substrate self-bias in an rf inductively coupled plasma source is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. The influencing paramet... The tuned substrate self-bias in an rf inductively coupled plasma source is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. The influencing parameters such as the substrate axial position, different coupling coils and inserted resistance are experimentally studied. To get a better understanding of the experimental results, the axial distributions of the plasma density, electron temperature and plasma potential are measured with an rf compensated Langmuir probe; the coil rf peak-to-peak voltage is measured with a high voltage probe. As in the case of changing discharge power, it is found that continuity, instability and bi-stability of the tuned substrate bias can be obtained by means of changing the substrate axial position in the plasma source or the inserted resistance. Additionally, continuity can not transit directly into bi-stability, but evolves via instability. The inductance of the coupling coil has a substantial effect on the magnitude and the property of the tuned substrate bias. 展开更多
关键词 radio-frequency (rf plasma inductive coupling capacitive coupling mode transition
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基于lift-off工艺的RF MEMS开关触点平坦化方法
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作者 杨彪 诸葛明华 +1 位作者 吴国才 容炎森 《微纳电子技术》 2025年第2期116-121,共6页
采用表面微加工工艺制备射频微机电系统(RF MEMS)开关,开关触点的平坦化是一项关键工艺,直接影响RF MEMS开关的机械和电学性能。设计静电驱动接触式的RF MEMS开关结构,然后通过在触点上进行套刻制备光刻胶岛、蒸镀制备铝牺牲层,利用lift... 采用表面微加工工艺制备射频微机电系统(RF MEMS)开关,开关触点的平坦化是一项关键工艺,直接影响RF MEMS开关的机械和电学性能。设计静电驱动接触式的RF MEMS开关结构,然后通过在触点上进行套刻制备光刻胶岛、蒸镀制备铝牺牲层,利用lift-off工艺解决触点与牺牲层平坦化的问题。再采用电镀工艺制备金悬臂梁,使用氢氧化钠溶液腐蚀铝释放获得RF MEMS开关。通过原子力显微镜(AFM)、聚焦离子束显微镜(FIB)等仪器对样品进行形貌测量,数据显示开关触点与铝牺牲层的高度差约为27.36 nm,悬臂梁与下方平面的左右空隙差约为22 nm,结果表明通过该方法能够实现开关触点与牺牲层的高度平坦化。 展开更多
关键词 射频微机电系统(rf MEMS)开关 开关触点 牺牲层 平坦化 lift-off工艺
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基于RF芯片的通信技术在分布式网络传感器中的应用
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作者 王栋岩 《通信电源技术》 2024年第9期199-201,205,共4页
文章旨在探讨基于无线射频(Radio Frequency,RF)芯片的通信技术在分布式网络传感器中的应用。传统的分布式网络传感器系统通常使用有线连接或基于特定通信协议的无线传输技术,但这些方案在部署和维护上存在一定的限制。因此,采用RF收发... 文章旨在探讨基于无线射频(Radio Frequency,RF)芯片的通信技术在分布式网络传感器中的应用。传统的分布式网络传感器系统通常使用有线连接或基于特定通信协议的无线传输技术,但这些方案在部署和维护上存在一定的限制。因此,采用RF收发一体化芯片作为通信技术的载体,实现分布式网络传感器之间的无线数据传输具有重要意义。文章围绕传输终端硬件设计基础,提出一种具体的方案,包括硬件选型、通信协议设计、功耗管理以及安全性考虑等方面,以实现高效稳定的分布式网络传感器无线数据传输。 展开更多
关键词 无线射频(rf) 通信技术 分布式网络传感器
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激光与RF链路融合异质通信网络构建策略
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作者 郭子铭 《通信电源技术》 2024年第7期175-177,共3页
文章探讨了激光与射频(Radio Frequency,RF)链路融合的异质通信网络构建策略。首先,分析异质通信网络中链路异构、资源管理和性能保障等问题。其次,提出激光与RF链路融合网络架构,包括网络层次框架和空间资源映射机制的建设。再次,在资... 文章探讨了激光与射频(Radio Frequency,RF)链路融合的异质通信网络构建策略。首先,分析异质通信网络中链路异构、资源管理和性能保障等问题。其次,提出激光与RF链路融合网络架构,包括网络层次框架和空间资源映射机制的建设。再次,在资源协同管理方面,引入链路状态信息获取与更新机制,以及基于业务优先级的资源调度技术。最后,采用软切换决策算法和切换过程中的业务保障技术,解决异质网络切换问题。设计的策略可以提升通信网络的整体性能,提高资源利用效率,为未来异质通信网络的发展提供可行的解决方案。通过激光与RF链路的协同,实现更高效的数据传输和稳定的切换,为通信技术的创新提供有力支持。 展开更多
关键词 激光通信 射频(rf)链路 异质通信网络
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高频RFID读写器射频模拟前端的实现 被引量:7
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作者 刘冬生 邹雪城 杨秋平 《半导体技术》 CAS CSCD 北大核心 2006年第9期669-672,679,共5页
射频识别(RFID)系统主要由RFID读写器和RFID电子标签两部分组成。给出了高频(13.56MHz)RFID系统中读写器射频模拟前端的电路设计,符合ISO/IEC14443typeA/typeB,ISO/IEC15693和ISO/IEC18000-3中任一个标准的读写器芯片设计均可采用,设计... 射频识别(RFID)系统主要由RFID读写器和RFID电子标签两部分组成。给出了高频(13.56MHz)RFID系统中读写器射频模拟前端的电路设计,符合ISO/IEC14443typeA/typeB,ISO/IEC15693和ISO/IEC18000-3中任一个标准的读写器芯片设计均可采用,设计工艺采用了中芯国际0.35μm2P3M混合CMOS技术,并给出了Cadence环境下的仿真结果。 展开更多
关键词 射频识别 读写器 射频模拟前端 调谐电路 接收电路
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静电式RF MEMS开关的可靠性 被引量:6
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作者 张永华 曹如平 赖宗声 《微纳电子技术》 CAS 北大核心 2010年第11期701-707,共7页
MEMS开关是最常见的RF MEMS控制元件,是RF结构中一个关键的MEMS器件。长期可靠性是目前制约MEMS开关商业化进程中的一个主要问题。主要综述了静电式RF MEMS开关可靠性的新进展。欧姆式开关通常由于黏附或接触电阻的增大而失效,电容式开... MEMS开关是最常见的RF MEMS控制元件,是RF结构中一个关键的MEMS器件。长期可靠性是目前制约MEMS开关商业化进程中的一个主要问题。主要综述了静电式RF MEMS开关可靠性的新进展。欧姆式开关通常由于黏附或接触电阻的增大而失效,电容式开关的主要失效机理则与电介质层的充电有关。接触材料的选择是决定欧姆开关可靠性最重要的一个因素,"主动断开/被动接触"MEMS开关适用于软金属材料欧姆接触的可靠性要求。改善电容式开关可靠性的途径是改善介电层、优化驱动电压波形等以减小介质层的充电。 展开更多
关键词 射频微电子机械系统(rf MEMS) 开关 可靠性 欧姆接触 介质充电
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电容式RF MEMS谐振器 被引量:2
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作者 贾英茜 赵正平 +1 位作者 杨拥军 王立发 《微纳电子技术》 CAS 北大核心 2010年第2期99-104,共6页
介绍了应用于通信领域的电容式RF MEMS谐振器及其在通信系统小型化中的优势。对电容式微机械谐振器进行了综合分析,包括基本工作过程分析、基本参数的理论分析及等效电路的分析。介绍了目前几种常用结构的谐振器,包括梳状谐振器、梁式... 介绍了应用于通信领域的电容式RF MEMS谐振器及其在通信系统小型化中的优势。对电容式微机械谐振器进行了综合分析,包括基本工作过程分析、基本参数的理论分析及等效电路的分析。介绍了目前几种常用结构的谐振器,包括梳状谐振器、梁式谐振器及盘式谐振器的工作过程和谐振频率的发展空间。重点分析了谐振器的电容间隙及锚这两个重要的结构参数对谐振器性能的影响。最后,对电容式微机械谐振器存在的问题作了总结,对其发展趋势做出展望。 展开更多
关键词 谐振器 射频 谐振频率 品质因数 电容间隙
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服装企业原材料仓库RFID应用方案研究 被引量:6
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作者 叶建芳 王正肖 潘晓弘 《纺织学报》 EI CAS CSCD 北大核心 2008年第3期132-136,共5页
在分析服装企业原材料仓库管理业务过程的基础上,指出仓库管理存在盘点工作量巨大、库存数量不准确等问题,结合RFID(radio frequency identification)技术的高速移动物体识别、多目标和非接触识别、环境适应性好等特点,提出在服装企业... 在分析服装企业原材料仓库管理业务过程的基础上,指出仓库管理存在盘点工作量巨大、库存数量不准确等问题,结合RFID(radio frequency identification)技术的高速移动物体识别、多目标和非接触识别、环境适应性好等特点,提出在服装企业原材料仓库实施RFID的应用方案。该应用方案由3个部分组成,描述应用系统信息需求的信息方案,说明如何使用标签的方法与过程的标签方案和结合具体业务过程的应用方案。该方案可以给服装企业构建RFID应用系统提供较高的参考价值。 展开更多
关键词 服装企业 原材料仓库管理 rfID 应用方案 标签方案 信息方案
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