We present an all polymer asymmetric Mach-Zehnder interferometer （AMZI） waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide se...We present an all polymer asymmetric Mach-Zehnder interferometer （AMZI） waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 μm in a refractive index range between 1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between-80.36 dB and-10.63 dB. The average and linear sensitivity are 768.1 dB/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.3010-6 RIU （RIU：refractive index unit） and 1.8210-5 RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.展开更多
In this work, long-period waveguide grating-based tunable wavelength filters using organic–inorganic grafting poly（methyl methacrylate）（PMMA） materials are designed and fabricated by metal-cladding directly defin...In this work, long-period waveguide grating-based tunable wavelength filters using organic–inorganic grafting poly（methyl methacrylate）（PMMA） materials are designed and fabricated by metal-cladding directly defined technique.The thermal stabilities and optical properties of the organic–inorganic grafting PMMA core materials are analyzed. Structures and performance parameters of the waveguide gratings and self-electrode heaters are designed and simulated. The contrast of the filter is about 15 d B and the resonant wavelength can be tuned by different electric powers applied to the metal-cladding self-electrode heaters. The temperature sensitivity is 3.5 nm/℃ and the switching time is about 1 ms. The technique is very suitable for realizing the optoelectronic integrated wavelength-division-multiplexing systems.展开更多
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61605057,61475061,and 61575076)the Science and Technology Development Plan of Jilin Province,China(Grant No.20140519006JH)the Excellent Youth Foundation of Jilin Province,China(Grant No.20170520158JH)
文摘We present an all polymer asymmetric Mach-Zehnder interferometer （AMZI） waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 μm in a refractive index range between 1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between-80.36 dB and-10.63 dB. The average and linear sensitivity are 768.1 dB/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.3010-6 RIU （RIU：refractive index unit） and 1.8210-5 RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61575076,61475061,and 61405070)the Fundamental Research Funds for the Central Universities,China(Grant No.JCKY-QKJC08)+1 种基金the Science and Technology Development Plan of Jilin Province,China(Grant Nos.20130522151JH,20140519006JH,and 20160520091JH)the China Postdoctoral Science Foundation(Grant No.2015M571362)
文摘In this work, long-period waveguide grating-based tunable wavelength filters using organic–inorganic grafting poly（methyl methacrylate）（PMMA） materials are designed and fabricated by metal-cladding directly defined technique.The thermal stabilities and optical properties of the organic–inorganic grafting PMMA core materials are analyzed. Structures and performance parameters of the waveguide gratings and self-electrode heaters are designed and simulated. The contrast of the filter is about 15 d B and the resonant wavelength can be tuned by different electric powers applied to the metal-cladding self-electrode heaters. The temperature sensitivity is 3.5 nm/℃ and the switching time is about 1 ms. The technique is very suitable for realizing the optoelectronic integrated wavelength-division-multiplexing systems.
