In this paper, the manufacturing and testing procedures to make large off-axis aspherical mirrors are presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors ar...In this paper, the manufacturing and testing procedures to make large off-axis aspherical mirrors are presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors are previewed, and a possible solution is given. The two mirrors have been polished by means of CCOS, and the final accuracy is 25nm rms for 770mm×210mm rectangular mirror and 20nm rms for φ600mm circular mirror. These results just meet the optical tolerances specified by the designer, and the manufacturing and testing procedures presented here show good ability to make the large off-axis aspherical mirrors.展开更多
With the rapid development of information and multi me dia technologies, the demand for the optical plastic aspheric elements used in o pto-electronic devices, camera, optical disc and projector lens etc. has been i n...With the rapid development of information and multi me dia technologies, the demand for the optical plastic aspheric elements used in o pto-electronic devices, camera, optical disc and projector lens etc. has been i ncreased rapidly in the recent years. The key technologies of fabrication of asp heric plastic lens are the design and manufacturing moulds, selection of proper injection moulding equipment, and optimization of injection moulding parameters etc. In this paper, the effect of injection pressure, moulding temperature, cool ing time and injection speed on the surface profile of the lenses during injecti on and holding process is investigated. Surface quality of plastic lenses is mea sured by Talysurf Texture Measuring System. The experimental results showed that the injection pressure and moulding temperature are important parameters compar ing to cooling time and injection speed. A bit change of injection pressure or m oulding temperature will affect the property of the surface profile. Either incr easing injection pressure or mould temperature can achieve less shrinkage. Other wise, a lower injection pressure will produce more shrinkage, more air traps and a lower mould temperature results greater warp and higher shrinkage. The dynami c process of injection for optical plastic lenses is simulated by 3D Moldflow pl astic Insight software (MPI). The MPI will help us to optimize injection mouldin g parameters.展开更多
The original idea and shaping principle of locus shaping method for processing the aspheric optical parts are introduced, and the partial structure of the machine tool designed is described. The method has the advanta...The original idea and shaping principle of locus shaping method for processing the aspheric optical parts are introduced, and the partial structure of the machine tool designed is described. The method has the advantage of high efficiency and low cost compared to the numerical control method. And it is proven that the method is feasible.展开更多
In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-pre...In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-precision aspheric grinding system is then designed and manufactured. Aerostatic form is adopted to build the spindle of the workpiece, transverse guideway, longitudinal guideway and the spindle of the grinder in this system. The following specification is achieved, such as the turning accuracy of the spindle of the workpiece is 0.05 μm, radial rigidity of the spindle is GE 220N/μm, axial rigidity is GE 160 N/μm, radial rigidity of the guideway is GE 200N/μm, the highest rotational speed of the grinder is 80 000 rev/min and its turning accuracy is 0.1 μm, the resolution of linear displacement of the transverse and longitudinal guideway is 4.9 nm. Adjusting range of this adjusting mechanism is 2 mm in the Y direction, the adjusting accuracy of the precise adjusting mechanism is 0.1 μm. Micro displacement measuring system of this ultra-precision aspheric grinding adopts two-backfeed strategy, and angle displacement back-feed is realized by photoelectric encoder, it’s resolution is 655 360 pulse/rev. after 4 frequency multiplication, it’s angle displacement resolution is achieved 2 621 440 pulse/rev. Straight-line displacement is monitored by single frequency laser interferometer (DLSTAX LTM-20B, made in Japan). This CNC system adopts inimitable bi-arc step length flex CN interpolation algorithm, it’s CN system resolution is 5 nm.So this aspheric grinding system ensures profile accuracy of the machined part. The resolution of this interferometer is 5 nm. Finally, lots of ultra-precision grinding experiments are carried out on this grinding system. Some optical aspheric parts, with profiles accuracy of 0.3 μm, surface roughness less than 0.01 μm, are obtained.展开更多
Reflective optics with wide field of view has been applied more and more widely in EUVL or space optics, and also plays an important role in promoting scientific and technological research. Among the reflective optics...Reflective optics with wide field of view has been applied more and more widely in EUVL or space optics, and also plays an important role in promoting scientific and technological research. Among the reflective optics, the off-axis reflective optics is the most hopeful solution to the ever-highest demands of these applications. This paper gives the requirements of both the above mentioned applications and the similarities and differences between these two kinds of optical systems. Finally, a design example of off-axis reflective optics with wide field of view is presented and described.展开更多
离轴非球面形状不对称且其表面曲率变化非线性,给面形高精度测量带来挑战。为解决现有离轴非球面面形测量方法高度依赖待测件初始调整位姿和曲率变化难适应的问题,本文提出了一种基于空间约束的差动共焦离轴非球面自适应测量方法,以实...离轴非球面形状不对称且其表面曲率变化非线性,给面形高精度测量带来挑战。为解决现有离轴非球面面形测量方法高度依赖待测件初始调整位姿和曲率变化难适应的问题,本文提出了一种基于空间约束的差动共焦离轴非球面自适应测量方法,以实现对离轴非球面的无初始位姿依赖、曲率变化自适应、高精度测量。首先,根据平移-回转扫描测量原理和差动共焦技术抗表面倾角精准定焦的性能,从规划测量点和待测点之间的距离和倾角两个维度出发,构建了空间约束模型,基于该模型,对等面积准则下的螺旋扫描路径规划算法进行优化,实现对离轴非球面测量路径的曲率自适应动态调整。使用该方法对离轴非球面和20°倾斜平面进行测量实验,将测量结果与Zygo干涉仪的测量结果点对点作差,面形差别的均方根(Root Mean Square,RMS)值均优于10 nm,对应3σ优于5 nm,满足离轴非球面的高精度测量要求。展开更多
文摘In this paper, the manufacturing and testing procedures to make large off-axis aspherical mirrors are presented. The difficulties in polishing and testing for both circular aperture and rectangular aperture mirrors are previewed, and a possible solution is given. The two mirrors have been polished by means of CCOS, and the final accuracy is 25nm rms for 770mm×210mm rectangular mirror and 20nm rms for φ600mm circular mirror. These results just meet the optical tolerances specified by the designer, and the manufacturing and testing procedures presented here show good ability to make the large off-axis aspherical mirrors.
文摘With the rapid development of information and multi me dia technologies, the demand for the optical plastic aspheric elements used in o pto-electronic devices, camera, optical disc and projector lens etc. has been i ncreased rapidly in the recent years. The key technologies of fabrication of asp heric plastic lens are the design and manufacturing moulds, selection of proper injection moulding equipment, and optimization of injection moulding parameters etc. In this paper, the effect of injection pressure, moulding temperature, cool ing time and injection speed on the surface profile of the lenses during injecti on and holding process is investigated. Surface quality of plastic lenses is mea sured by Talysurf Texture Measuring System. The experimental results showed that the injection pressure and moulding temperature are important parameters compar ing to cooling time and injection speed. A bit change of injection pressure or m oulding temperature will affect the property of the surface profile. Either incr easing injection pressure or mould temperature can achieve less shrinkage. Other wise, a lower injection pressure will produce more shrinkage, more air traps and a lower mould temperature results greater warp and higher shrinkage. The dynami c process of injection for optical plastic lenses is simulated by 3D Moldflow pl astic Insight software (MPI). The MPI will help us to optimize injection mouldin g parameters.
文摘The original idea and shaping principle of locus shaping method for processing the aspheric optical parts are introduced, and the partial structure of the machine tool designed is described. The method has the advantage of high efficiency and low cost compared to the numerical control method. And it is proven that the method is feasible.
文摘In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-precision aspheric grinding system is then designed and manufactured. Aerostatic form is adopted to build the spindle of the workpiece, transverse guideway, longitudinal guideway and the spindle of the grinder in this system. The following specification is achieved, such as the turning accuracy of the spindle of the workpiece is 0.05 μm, radial rigidity of the spindle is GE 220N/μm, axial rigidity is GE 160 N/μm, radial rigidity of the guideway is GE 200N/μm, the highest rotational speed of the grinder is 80 000 rev/min and its turning accuracy is 0.1 μm, the resolution of linear displacement of the transverse and longitudinal guideway is 4.9 nm. Adjusting range of this adjusting mechanism is 2 mm in the Y direction, the adjusting accuracy of the precise adjusting mechanism is 0.1 μm. Micro displacement measuring system of this ultra-precision aspheric grinding adopts two-backfeed strategy, and angle displacement back-feed is realized by photoelectric encoder, it’s resolution is 655 360 pulse/rev. after 4 frequency multiplication, it’s angle displacement resolution is achieved 2 621 440 pulse/rev. Straight-line displacement is monitored by single frequency laser interferometer (DLSTAX LTM-20B, made in Japan). This CNC system adopts inimitable bi-arc step length flex CN interpolation algorithm, it’s CN system resolution is 5 nm.So this aspheric grinding system ensures profile accuracy of the machined part. The resolution of this interferometer is 5 nm. Finally, lots of ultra-precision grinding experiments are carried out on this grinding system. Some optical aspheric parts, with profiles accuracy of 0.3 μm, surface roughness less than 0.01 μm, are obtained.
文摘Reflective optics with wide field of view has been applied more and more widely in EUVL or space optics, and also plays an important role in promoting scientific and technological research. Among the reflective optics, the off-axis reflective optics is the most hopeful solution to the ever-highest demands of these applications. This paper gives the requirements of both the above mentioned applications and the similarities and differences between these two kinds of optical systems. Finally, a design example of off-axis reflective optics with wide field of view is presented and described.
文摘离轴非球面形状不对称且其表面曲率变化非线性,给面形高精度测量带来挑战。为解决现有离轴非球面面形测量方法高度依赖待测件初始调整位姿和曲率变化难适应的问题,本文提出了一种基于空间约束的差动共焦离轴非球面自适应测量方法,以实现对离轴非球面的无初始位姿依赖、曲率变化自适应、高精度测量。首先,根据平移-回转扫描测量原理和差动共焦技术抗表面倾角精准定焦的性能,从规划测量点和待测点之间的距离和倾角两个维度出发,构建了空间约束模型,基于该模型,对等面积准则下的螺旋扫描路径规划算法进行优化,实现对离轴非球面测量路径的曲率自适应动态调整。使用该方法对离轴非球面和20°倾斜平面进行测量实验,将测量结果与Zygo干涉仪的测量结果点对点作差,面形差别的均方根(Root Mean Square,RMS)值均优于10 nm,对应3σ优于5 nm,满足离轴非球面的高精度测量要求。
