A new rod-shaped traveling wave ultrasonic micromotor is developed. In the micromotor, five pieces of piezoelectric ceramics clamped by two metal cylinders are used as its stator. The driving principle of the rodshape...A new rod-shaped traveling wave ultrasonic micromotor is developed. In the micromotor, five pieces of piezoelectric ceramics clamped by two metal cylinders are used as its stator. The driving principle of the rodshaped ultrasonic motor is simulated. The stator structure and the position to lay these piezoelectric ceramics are calculated to improve the electro mechanical conversion efficiency. A flexible rotor is designed to reduce the radial slip between the stator and the rotor, and to improve the motor efficiency. The prototype motor and its micror driver are tested. The motor is 9 mm in out-diameter, 15 mm in length and 3.2 g in weight. When the motor operates with the first bending frequency （72 kHz） of the stator, its maximal rotational speed and the torque reach 520 r/rain and 4.5 mN · m. Results show that the motor has good stability. The speed fluctuation is controlled within 3% by the frequency automatic tracking technique.展开更多
The particles suspending in liquid suffer acoustical radiation force from ultrasonic field. The force may cause particles movement and has special advantage to separate particles from liquid in Micro Electro Mechanica...The particles suspending in liquid suffer acoustical radiation force from ultrasonic field. The force may cause particles movement and has special advantage to separate particles from liquid in Micro Electro Mechanical Systems （MEMS）. It is important to improve the energy stored in liquid layer so as to increase separation ability for decreasing drive demand in MEMS. Resonance may hugely increase the magnitude and generally be employed in micro separator. The summits of admittance spectrum show the resonance frequencies. It may come from resonance in one layer or multi layers in micro separator. This paper studies the difference of energy stored in layers at each rein frequency. It provides the way to select the most effect separation frequency other than admittance spectrum.展开更多
A novel structure design of micro optic electro mechanical system（MOEMS）gyroscope is presented in this paper.The structure combining surface acoustic wave（SAW）sensor,optical waveguide diffractive component,electro...A novel structure design of micro optic electro mechanical system（MOEMS）gyroscope is presented in this paper.The structure combining surface acoustic wave（SAW）sensor,optical waveguide diffractive component,electro-optical modulator etc.is integrated on a LiNbO3 substrate as the gyroscope for sensing rotating angular velocity,and an optical readout device is added on the traditional SAW typed TE-TM mode converter as the detecting device.The principles of the MOEMS are discussed in the paper,and simulation result shows that there would be apparent advantages of higher precision and stronger anti-vibration capacity.展开更多
文摘A new rod-shaped traveling wave ultrasonic micromotor is developed. In the micromotor, five pieces of piezoelectric ceramics clamped by two metal cylinders are used as its stator. The driving principle of the rodshaped ultrasonic motor is simulated. The stator structure and the position to lay these piezoelectric ceramics are calculated to improve the electro mechanical conversion efficiency. A flexible rotor is designed to reduce the radial slip between the stator and the rotor, and to improve the motor efficiency. The prototype motor and its micror driver are tested. The motor is 9 mm in out-diameter, 15 mm in length and 3.2 g in weight. When the motor operates with the first bending frequency （72 kHz） of the stator, its maximal rotational speed and the torque reach 520 r/rain and 4.5 mN · m. Results show that the motor has good stability. The speed fluctuation is controlled within 3% by the frequency automatic tracking technique.
文摘The particles suspending in liquid suffer acoustical radiation force from ultrasonic field. The force may cause particles movement and has special advantage to separate particles from liquid in Micro Electro Mechanical Systems （MEMS）. It is important to improve the energy stored in liquid layer so as to increase separation ability for decreasing drive demand in MEMS. Resonance may hugely increase the magnitude and generally be employed in micro separator. The summits of admittance spectrum show the resonance frequencies. It may come from resonance in one layer or multi layers in micro separator. This paper studies the difference of energy stored in layers at each rein frequency. It provides the way to select the most effect separation frequency other than admittance spectrum.
基金Sponsored by Postgraduate Science and Technology Innovation Fund of BIT(Rank A)
文摘A novel structure design of micro optic electro mechanical system（MOEMS）gyroscope is presented in this paper.The structure combining surface acoustic wave（SAW）sensor,optical waveguide diffractive component,electro-optical modulator etc.is integrated on a LiNbO3 substrate as the gyroscope for sensing rotating angular velocity,and an optical readout device is added on the traditional SAW typed TE-TM mode converter as the detecting device.The principles of the MOEMS are discussed in the paper,and simulation result shows that there would be apparent advantages of higher precision and stronger anti-vibration capacity.
