Nanocrystalline diamond films were deposited on Co-cemented carbide substrates using acetone/ H<sub>2</sub>/Ar gas mixture by bias-enhanced hot filament chemical vapor deposition（HFCVD） technique.The evi...Nanocrystalline diamond films were deposited on Co-cemented carbide substrates using acetone/ H<sub>2</sub>/Ar gas mixture by bias-enhanced hot filament chemical vapor deposition（HFCVD） technique.The evidence of nanocrystallinity,smoothness and purity was obtained by characterizing the sample with scanning electron microscopy（SEM）,X-ray diffraction（XRD）,Raman spectroscopy,atomic force microscopy （AFM ）,and field emission transmission electron microscopy（FE-TEM ）.The results show that nanocrystalline diamond films consists of nanocrystalline diamond grains with sizes range from 20 to 80 nm and contain a large amount of grain boundaries.The surface roughness of the films is measured as R<sub>a</sub>【50nm.The Raman spectroscopy,XRD pattern,and FE-TEM image of the films indicate the presence of nanocrystalline diamond.A new process is used to deposit composite diamond coatings by a two-step chemical vapor deposition procedure,including first the deposition of the rough polycrystalline diamond and then the smooth fine-grained nanocrystalline diamond film.Such composite diamond coatings not only display good adhesion and wear resistant properties,but also have smooth surfaces that are liable to polishing.This coating technology can not only meet the requirement of the adhesion of diamond coatings,but also reduce surface roughness of diamond coatings effectively,thus remove the obstacles for the industrialization of CVD diamond coatings.The diamondcoated dies with these composite coatings show obvious effect in the practical application.展开更多
在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后...在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后的沉积中,随着甲烷浓度的增加,金刚石膜表面的晶粒大小是逐渐减小的。当甲烷浓度达到20%以上时,金刚石膜生长面晶粒呈现菜花状的小晶团,膜体侧面已经没有了粗大的柱状晶,而是呈现出光滑的断口,对该层进行拉曼谱分析显示,位于1145 cm-1附近有一定强度的散射峰出现。这说明所沉积的晶粒全部变为纳米级尺寸。展开更多
基金Supported by the National Natural Science Foundation of China(50575135)
文摘Nanocrystalline diamond films were deposited on Co-cemented carbide substrates using acetone/ H<sub>2</sub>/Ar gas mixture by bias-enhanced hot filament chemical vapor deposition（HFCVD） technique.The evidence of nanocrystallinity,smoothness and purity was obtained by characterizing the sample with scanning electron microscopy（SEM）,X-ray diffraction（XRD）,Raman spectroscopy,atomic force microscopy （AFM ）,and field emission transmission electron microscopy（FE-TEM ）.The results show that nanocrystalline diamond films consists of nanocrystalline diamond grains with sizes range from 20 to 80 nm and contain a large amount of grain boundaries.The surface roughness of the films is measured as R<sub>a</sub>【50nm.The Raman spectroscopy,XRD pattern,and FE-TEM image of the films indicate the presence of nanocrystalline diamond.A new process is used to deposit composite diamond coatings by a two-step chemical vapor deposition procedure,including first the deposition of the rough polycrystalline diamond and then the smooth fine-grained nanocrystalline diamond film.Such composite diamond coatings not only display good adhesion and wear resistant properties,but also have smooth surfaces that are liable to polishing.This coating technology can not only meet the requirement of the adhesion of diamond coatings,but also reduce surface roughness of diamond coatings effectively,thus remove the obstacles for the industrialization of CVD diamond coatings.The diamondcoated dies with these composite coatings show obvious effect in the practical application.
文摘在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后的沉积中,随着甲烷浓度的增加,金刚石膜表面的晶粒大小是逐渐减小的。当甲烷浓度达到20%以上时,金刚石膜生长面晶粒呈现菜花状的小晶团,膜体侧面已经没有了粗大的柱状晶,而是呈现出光滑的断口,对该层进行拉曼谱分析显示,位于1145 cm-1附近有一定强度的散射峰出现。这说明所沉积的晶粒全部变为纳米级尺寸。
