Polycrystalline diamond films have been synthesized on various substrates by hot filament CVD from the mixture gases of methane and hydrogen. The interface layers between CVD diamond films and substrates have been inv...Polycrystalline diamond films have been synthesized on various substrates by hot filament CVD from the mixture gases of methane and hydrogen. The interface layers between CVD diamond films and substrates have been investigated by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). In addition, visible luminescence between 2.0～3.5eV of undoped and boron-doped CVD diamond films has also been studied by cathodoluminescence.展开更多
基金This work is supported by the National Natural Science Foundation of China.
文摘Polycrystalline diamond films have been synthesized on various substrates by hot filament CVD from the mixture gases of methane and hydrogen. The interface layers between CVD diamond films and substrates have been investigated by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). In addition, visible luminescence between 2.0～3.5eV of undoped and boron-doped CVD diamond films has also been studied by cathodoluminescence.
