Guest Editor Prof.Jianfeng Li Univ.of Electronic Science and Technology of China lijianfeng@uestc.edu.cn The mid-infrared spectral domain is critically important and has considerable significance to fundamental scienc...Guest Editor Prof.Jianfeng Li Univ.of Electronic Science and Technology of China lijianfeng@uestc.edu.cn The mid-infrared spectral domain is critically important and has considerable significance to fundamental science and technological applications.展开更多
A surface crystallization phenomenon on bonding pads and wires of integrated circuit chip is reported in this paper. Through a lot of experiments, an unknown failure effect caused by mixed crystalline matter is reveal...A surface crystallization phenomenon on bonding pads and wires of integrated circuit chip is reported in this paper. Through a lot of experiments, an unknown failure effect caused by mixed crystalline matter is revealed, whereas non-plasma fluorine contamination cannot cause the failure of bonding pads. By experiments combined with infrared spectroscopy analysis, the surface crystallization effect is studied. The conclusion of the study can provide the guidance for IC fabrication, modelling and analysis.展开更多
文摘Guest Editor Prof.Jianfeng Li Univ.of Electronic Science and Technology of China lijianfeng@uestc.edu.cn The mid-infrared spectral domain is critically important and has considerable significance to fundamental science and technological applications.
文摘A surface crystallization phenomenon on bonding pads and wires of integrated circuit chip is reported in this paper. Through a lot of experiments, an unknown failure effect caused by mixed crystalline matter is revealed, whereas non-plasma fluorine contamination cannot cause the failure of bonding pads. By experiments combined with infrared spectroscopy analysis, the surface crystallization effect is studied. The conclusion of the study can provide the guidance for IC fabrication, modelling and analysis.
