A retarding field energy analyzer(RFEA) is used to measure the time-averaged ion energy distributions(IEDs) on the substrate in both continuous wave(CW) and synchronous pulse modulated radio-frequency(RF) indu...A retarding field energy analyzer(RFEA) is used to measure the time-averaged ion energy distributions(IEDs) on the substrate in both continuous wave(CW) and synchronous pulse modulated radio-frequency(RF) inductively coupled Ar plasmas(ICPs).The effects of the phase shift θ between the RF bias voltage and the RF source on the IED is investigated under various discharge conditions.It is found that as θ increases from 0 to π,the IED moves towards the low-energy side,and its energy width becomes narrower.In order to figure out the physical mechanism,the voltage waveforms on the substrate are also measured.The results show that as θ increases from 0 to π,the amplitude of the voltage waveform decreases and,meanwhile,the average sheath potential decreases as well.Specifically,the potential drop in the sheath on the substrate exhibits a maximum value at the same phase(i.e.,θ = 0) and a minimum value at the opposite phase(i.e.,θ = π).Therefore,when ions traverse across the sheath region above the substrate,they obtain less energies at lower sheath potential drop,leading to lower ion energy.Besides,as θ increases from π to 2π,the IEDs and their energy widths change reversely.展开更多
针对永磁同步电机下桥臂电流采样拓扑的无位置传感器控制系统,在低载波运行时受数字延时影响易导致位置估计精度低、电流纹波增大、稳定性差等问题,提出一种半周期计算、单采样双更新的空间矢量脉宽调制方法,有效减少系统数字延时。该...针对永磁同步电机下桥臂电流采样拓扑的无位置传感器控制系统,在低载波运行时受数字延时影响易导致位置估计精度低、电流纹波增大、稳定性差等问题,提出一种半周期计算、单采样双更新的空间矢量脉宽调制方法,有效减少系统数字延时。该方法在每个脉冲宽度调制(Pulse-Width Modulation,PWM)的载波过零处采样一次电流,并在采样结束后的半周期内完成目标电压矢量计算。考虑数字延时中电机转过的角度,将目标电压矢量在下一个PWM周期的前、后半周期输出,并分别补偿0.75 T s和1.25 T s等效延时(T s为PWM周期时间),以减小目标电压矢量与实际输出电压矢量之间的误差。将新方法应用于采用模型参考自适应速度观测器的永磁同步电机无位置传感器控制系统中,实验结果表明该方法位置估计精度高、电流纹波小,且可以稳定运行于额定负载、载波比为4.0的工况。展开更多
随着海上风电、光伏等新能源的大规模建设,产生了直流输电、交直流互联和储能的应用需求。目前储能技术的研究和应用主要集中于交流储能领域。模块化多电平电池储能系统(modular multilevel converter based battery energy storage sys...随着海上风电、光伏等新能源的大规模建设,产生了直流输电、交直流互联和储能的应用需求。目前储能技术的研究和应用主要集中于交流储能领域。模块化多电平电池储能系统(modular multilevel converter based battery energy storage system,MMC-BESS)虽然在交直流互联的同时,实现了储能的功能,但电池中流过的工频、二倍频等脉动电流成分对电池寿命有潜在影响,且传统的模块化多电平(modular multilevel converter,MMC)换流站的改造成本高。本工作提出的直流直挂储能装置将换流和储能分离,电池电流仅为直流和高频脉动成分,工况对电池友好,且直流直挂储能系统需要电池单体数量仅为MMC-BESS的1/6,成本低。对直流直挂储能装置的拓扑结构及工作原理进行分析;对级联子模块的数量和参数进行设计;基于载波移相调制,推导直流纹波电流,进而对并网电感参数进行设计;建立直流直挂储能装置的数学模型,推导控制模型,根据控制框图进行功率控制。最后,通过仿真和样机实验,验证该半桥拓扑级联型直流直挂储能装置设计的可行性及正确性。实验证明,该设计和控制方法效果良好,对高压大容量直流直挂储能装置的设计有一定参考价值。展开更多
为了保证可见光通信(VLC)系统能够为智能终端提供高速率、低能耗的数据传输服务。该文基于脉冲位置调制(PPM)技术,提出了一种新型的无载波位相(CPP)调制技术,即通过运用正交滤波器提高了PPM的传输速率。而针对采用CPP调制在VLC系统中功...为了保证可见光通信(VLC)系统能够为智能终端提供高速率、低能耗的数据传输服务。该文基于脉冲位置调制(PPM)技术,提出了一种新型的无载波位相(CPP)调制技术,即通过运用正交滤波器提高了PPM的传输速率。而针对采用CPP调制在VLC系统中功率效率显著降低的问题,提出了全新的时变偏置有效地降低了系统的功耗。最后仿真结果表明,采用时变偏置的CPP系统同采用直流偏置相比,在获得相同BER性能且带宽受限的情况下可以节省2 d B的信噪比。而同时考虑信号时隙之间的相关性,时变偏置可以进一步提升约1.5 d B的BER性能。展开更多
基金Project supported by the Important National Science and Technology Specific Project,China(Grant No.2011ZX02403-001)the National Natural Science Foundation of China(Grand No.11675039)the Fundamental Research Funds for the Central Universities,China(Grand No.DUT16LK06)
文摘A retarding field energy analyzer(RFEA) is used to measure the time-averaged ion energy distributions(IEDs) on the substrate in both continuous wave(CW) and synchronous pulse modulated radio-frequency(RF) inductively coupled Ar plasmas(ICPs).The effects of the phase shift θ between the RF bias voltage and the RF source on the IED is investigated under various discharge conditions.It is found that as θ increases from 0 to π,the IED moves towards the low-energy side,and its energy width becomes narrower.In order to figure out the physical mechanism,the voltage waveforms on the substrate are also measured.The results show that as θ increases from 0 to π,the amplitude of the voltage waveform decreases and,meanwhile,the average sheath potential decreases as well.Specifically,the potential drop in the sheath on the substrate exhibits a maximum value at the same phase(i.e.,θ = 0) and a minimum value at the opposite phase(i.e.,θ = π).Therefore,when ions traverse across the sheath region above the substrate,they obtain less energies at lower sheath potential drop,leading to lower ion energy.Besides,as θ increases from π to 2π,the IEDs and their energy widths change reversely.
文摘针对永磁同步电机下桥臂电流采样拓扑的无位置传感器控制系统,在低载波运行时受数字延时影响易导致位置估计精度低、电流纹波增大、稳定性差等问题,提出一种半周期计算、单采样双更新的空间矢量脉宽调制方法,有效减少系统数字延时。该方法在每个脉冲宽度调制(Pulse-Width Modulation,PWM)的载波过零处采样一次电流,并在采样结束后的半周期内完成目标电压矢量计算。考虑数字延时中电机转过的角度,将目标电压矢量在下一个PWM周期的前、后半周期输出,并分别补偿0.75 T s和1.25 T s等效延时(T s为PWM周期时间),以减小目标电压矢量与实际输出电压矢量之间的误差。将新方法应用于采用模型参考自适应速度观测器的永磁同步电机无位置传感器控制系统中,实验结果表明该方法位置估计精度高、电流纹波小,且可以稳定运行于额定负载、载波比为4.0的工况。
文摘随着海上风电、光伏等新能源的大规模建设,产生了直流输电、交直流互联和储能的应用需求。目前储能技术的研究和应用主要集中于交流储能领域。模块化多电平电池储能系统(modular multilevel converter based battery energy storage system,MMC-BESS)虽然在交直流互联的同时,实现了储能的功能,但电池中流过的工频、二倍频等脉动电流成分对电池寿命有潜在影响,且传统的模块化多电平(modular multilevel converter,MMC)换流站的改造成本高。本工作提出的直流直挂储能装置将换流和储能分离,电池电流仅为直流和高频脉动成分,工况对电池友好,且直流直挂储能系统需要电池单体数量仅为MMC-BESS的1/6,成本低。对直流直挂储能装置的拓扑结构及工作原理进行分析;对级联子模块的数量和参数进行设计;基于载波移相调制,推导直流纹波电流,进而对并网电感参数进行设计;建立直流直挂储能装置的数学模型,推导控制模型,根据控制框图进行功率控制。最后,通过仿真和样机实验,验证该半桥拓扑级联型直流直挂储能装置设计的可行性及正确性。实验证明,该设计和控制方法效果良好,对高压大容量直流直挂储能装置的设计有一定参考价值。
文摘为了保证可见光通信(VLC)系统能够为智能终端提供高速率、低能耗的数据传输服务。该文基于脉冲位置调制(PPM)技术,提出了一种新型的无载波位相(CPP)调制技术,即通过运用正交滤波器提高了PPM的传输速率。而针对采用CPP调制在VLC系统中功率效率显著降低的问题,提出了全新的时变偏置有效地降低了系统的功耗。最后仿真结果表明,采用时变偏置的CPP系统同采用直流偏置相比,在获得相同BER性能且带宽受限的情况下可以节省2 d B的信噪比。而同时考虑信号时隙之间的相关性,时变偏置可以进一步提升约1.5 d B的BER性能。