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“BUMP燃烧室”内混合气形成的多维数值研究 被引量:19
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作者 赵昌普 苏万华 +2 位作者 汪洋 余皎 林铁坚 《内燃机学报》 EI CAS CSCD 北大核心 2003年第6期389-394,共6页
用CFD多维数值分析软件对BUMP燃烧室内柴油喷雾的撞壁混合过程进行了模拟计算,并与用PLIF法取得的试验结果进行了对比,二者基本吻合。试验和模拟计算结果均表明,撞壁射流在遇到BUMP后会剥离燃烧室壁面,形成二次空间射流,扩大撞壁射流与... 用CFD多维数值分析软件对BUMP燃烧室内柴油喷雾的撞壁混合过程进行了模拟计算,并与用PLIF法取得的试验结果进行了对比,二者基本吻合。试验和模拟计算结果均表明,撞壁射流在遇到BUMP后会剥离燃烧室壁面,形成二次空间射流,扩大撞壁射流与空气的空间混合体积及混合速率,出现与周围空气迅速混合的闪混现象,燃烧室壁面燃油堆积量下降。计算结果还表明,BUMP的位置、高度、形状和角度不同对形成二次空间射流及稀混合气的作用也不相同,在实际应用中应对其进行优化和合理匹配,以便降低柴油机的NOx和碳烟排放。 展开更多
关键词 混合气形成 bump燃烧室 撞壁射流 二次射流 数值模拟 柴油机
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一种基于稀扩散燃烧的BUMP燃烧室及其对柴油机碳烟和NO_x排放影响的实验研究 被引量:11
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作者 裴毅强 苏万华 林铁坚 《内燃机学报》 EI CAS CSCD 北大核心 2002年第5期381-386,共6页
在壁面布置限流沿 (BUMP)后 ,撞壁射流从壁面被剥离 ,形成二次空间射流 ,可大大加快空气与流体的混合速率。基于此 ,设计了带有 BUMP的燃烧室 ,采用了可灵活控制喷油规律的 FIRCRI电控共轨式喷油系统进行了发动机实验。实验结果表明 :BU... 在壁面布置限流沿 (BUMP)后 ,撞壁射流从壁面被剥离 ,形成二次空间射流 ,可大大加快空气与流体的混合速率。基于此 ,设计了带有 BUMP的燃烧室 ,采用了可灵活控制喷油规律的 FIRCRI电控共轨式喷油系统进行了发动机实验。实验结果表明 :BU MP燃烧系统能显著降低 NOx 和碳烟排放 ,在平均有效压力为 0 .6 6 MPa(原机 5 0 %负荷 )时 ,烟度只有 0 .1BSU,NOx 为 42 0× 10 - 6;由于在缸内能够形成较均匀的混合气 ,缸内平均过量空气系数在 1.3~ 2 .0的范围内时 ,烟度一直保持在 0 .3BSU以下。实验还发现 BUMP的位置以及喷油定时对排放有重要影响。BUMP燃烧系统在降低 NOx 和碳烟排放方面显示了极大的潜力。 展开更多
关键词 稀扩散燃烧 bump燃烧室 柴油机 碳烟 氮氧化物 排放性
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BUMP燃烧室的稀扩散燃烧机理 被引量:4
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作者 裴毅强 苏万华 +2 位作者 张晓宇 林铁坚 王辉 《燃烧科学与技术》 EI CAS CSCD 北大核心 2006年第1期41-45,共5页
开发了BUMP燃烧室并进行了对比实验,发现BUMP燃烧室中可以形成稀的扩散燃烧氛围,使NOx和碳烟排放同时降低.喷射定时3°CA ATDC时,烟度排放降低了约70%,NOx排放与对比燃烧室相当.CFD模拟研究表明,不同的喷射定时下,燃油到达燃烧... 开发了BUMP燃烧室并进行了对比实验,发现BUMP燃烧室中可以形成稀的扩散燃烧氛围,使NOx和碳烟排放同时降低.喷射定时3°CA ATDC时,烟度排放降低了约70%,NOx排放与对比燃烧室相当.CFD模拟研究表明,不同的喷射定时下,燃油到达燃烧室壁面时的混合和燃烧状态不同,只有油束在滞燃期内到达燃烧室壁面,由限流沿(BUMP环)扰动形成的二次空间射流才能充分形成,稀扩散燃烧才能明显发生. 展开更多
关键词 柴油机 bump燃烧室 稀扩散燃烧 喷射定时 排放
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Bump进气道设计与试验研究 被引量:26
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作者 杨应凯 《空气动力学学报》 CSCD 北大核心 2007年第3期336-338,350,共4页
对一种先进的无隔道超音速进气道(Bump或者DSI)进行了设计方法和风洞试验研究。研究表明:Bump进气道性能优异,并且取消了传统的超音速战斗机进气道设计中的附面层隔道、泄放系统和旁路系统,使得飞机阻力小、重量轻、可靠性高。Bump进气... 对一种先进的无隔道超音速进气道(Bump或者DSI)进行了设计方法和风洞试验研究。研究表明:Bump进气道性能优异,并且取消了传统的超音速战斗机进气道设计中的附面层隔道、泄放系统和旁路系统,使得飞机阻力小、重量轻、可靠性高。Bump进气道是根据锥型流理论,采用乘波原理设计的。即用机身形面去截取锥形流场,在此范围内进行压缩面的设计,由于锥型波波后产生等熵压缩,在压缩面展向形成一定的压力梯度,将附面层排出进气道口外。 展开更多
关键词 bump进气道 DSI技术 进/发匹配 综合畸变指数
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枭龙飞机Bump进气道设计 被引量:21
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作者 杨应凯 《南京航空航天大学学报》 EI CAS CSCD 北大核心 2007年第4期449-452,共4页
对枭龙飞机先进的无隔道超声速进气道(Bump)的设计和风洞试验进行了分析。结果表明:枭龙飞机Bump进气道性能优异,总压恢复系数高,与斜板进气道比,σ提高0.02-0.04;综合畸变指数低,满足进/发匹配要求;并且取消了附面层隔道和放气门系... 对枭龙飞机先进的无隔道超声速进气道(Bump)的设计和风洞试验进行了分析。结果表明:枭龙飞机Bump进气道性能优异,总压恢复系数高,与斜板进气道比,σ提高0.02-0.04;综合畸变指数低,满足进/发匹配要求;并且取消了附面层隔道和放气门系统,使得飞机阻力小、重量轻、可靠性高。 展开更多
关键词 bump进气道 总压恢复系数 综合畸变指数 进/发匹配
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TRANSONIC DRAG REDUCTION ON SUPERCRITICAL WING SECTION USING SHOCK CONTROL BUMPS 被引量:3
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作者 杨洋 刘学强 Asif Saeed 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 2012年第3期207-214,共8页
Two-dimensional and three-dimensional shock control contour bumps are designed for a supercritical wing section with the aim of transonic wave drag reduction. The supercritical airfoil (NASA SC (02)-0714) is selec... Two-dimensional and three-dimensional shock control contour bumps are designed for a supercritical wing section with the aim of transonic wave drag reduction. The supercritical airfoil (NASA SC (02)-0714) is selected considering the fact that most modern jet transport aircrafts that operate in the transonic flow regime (cruise at transonic speeds) employ supercritical airfoil sections. Here it is to be noted that a decrease in the transonic wave drag without loss in lift would result in an increased lift to drag ratio, which is a key range parameter that can potentially increase both the range and endurance of the aircraft. The major geometric bump parameters such as length, height and span are altered for both the two-dimensional and three-dimensional bumps in order to obtain the optimum location and shape of the bump. Once an optimum standalone three-dimensional bump is acquired, an array of bumps is manually placed spanwise of an unswept supercritical wing and analyzed under fully turbulent flow conditions. Different configurations are tested with varying three-dimensional bump spacing in order to determine the contribution of bump spacing on overall performance. The results show a 14% drag reduction and a consequent 16% lift to drag ratio rise at the design Mach number for the optimum arrangement of bumps along the wing span. 展开更多
关键词 shock control bumps TRANSONIC supercritical wing drag reduction
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飞机快速俯仰机动下Bump进气道的动态特性研究 被引量:4
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作者 杨应凯 《实验流体力学》 CAS CSCD 北大核心 2013年第6期39-42,共4页
对两侧Bump进气道进行了动态特性风洞试验研究。研究表明:飞机做俯仰机动时,进气道相关性能参数随着时间作周期性变化;迎角α>10°时,上仰过程中,进道总压恢复系数σ、出口总压综合畸变W、出口总压周向畸变Δσ0降低,下俯过程中... 对两侧Bump进气道进行了动态特性风洞试验研究。研究表明:飞机做俯仰机动时,进气道相关性能参数随着时间作周期性变化;迎角α>10°时,上仰过程中,进道总压恢复系数σ、出口总压综合畸变W、出口总压周向畸变Δσ0降低,下俯过程中则升高,且上仰过程中上述参数值明显小于下俯过程,一个俯仰周期形成一个闭合环路;进气道出口总压脉动平均紊流度Tu在整个过程中变化不大。 展开更多
关键词 进气道动态特性 bump进气道 发匹配 流场畸变
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Numerical investigation on the assessment and mitigation of coal bump in an island longwall panel 被引量:6
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作者 Wang Hongwei Jiang Yaodong +2 位作者 Zhu Jie Shan Ruyue Wang Chen 《International Journal of Mining Science and Technology》 SCIE EI 2013年第5期625-630,共6页
This study presents a numerical investigation to assess the risk of coal bumps and produces a stress–relief technology using boreholes to mitigate risk during the extraction of an island longwall panel.Based on the g... This study presents a numerical investigation to assess the risk of coal bumps and produces a stress–relief technology using boreholes to mitigate risk during the extraction of an island longwall panel.Based on the geological condition in an island longwall panel in the Tangshan Coal Mine,Tangshan,China,a numerical FLAC3D(Fast Lagrangian Analysis of Continua in 3 Dimensions) model was established to determine and to map the zones in the panel with a high risk for coal bumps.The results of the numerical modeling show that the roof deformation starts to occur at more than 30 m ahead of the longwall face and the deformation starts to accelerate after a distance of 10 m in front of the longwall face.Large and rapid roof deformation is considered to be an important precursor of coal bump occurrence during the extraction of an island longwall panel.Based on the numerical results,a stress–relief technology using boreholes,which was employed to release abutment pressure,was investigated through numerical methods.The modeled results suggest that the peak stress concentration could be released by drilling boreholes in the zones prone to coal bumps.The effectiveness of the stress release increased with the borehole length and decreased with the borehole spacing. 展开更多
关键词 Island longwall panel Coal bump bump-prone zones Stress-relief BOREHOLES
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一种基于Bump-Jump的BOC(1,1)信号码跟踪方法 被引量:1
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作者 常青 梁娜 +1 位作者 李伟强 张其善 《遥测遥控》 2008年第6期22-27,共6页
BOC调制方式使Galileo信号与传统GPS中的BPSK信号相比有着良好的抗多径和抗单频干扰特性,但由于其自相关函数的多峰值性,会带来跟踪误锁问题。文中以BOC(1,1)信号为例,详细介绍Bump-Jump跟踪算法的传统设计思想,并在此基础上提出一种新... BOC调制方式使Galileo信号与传统GPS中的BPSK信号相比有着良好的抗多径和抗单频干扰特性,但由于其自相关函数的多峰值性,会带来跟踪误锁问题。文中以BOC(1,1)信号为例,详细介绍Bump-Jump跟踪算法的传统设计思想,并在此基础上提出一种新的利用鉴别器实现误锁判断的码跟踪方法,且在现有的Galileo软件仿真平台上进行验证。实验结果表明,方法能有效地减少误锁,使码跟踪环路正确地跟踪主峰。 展开更多
关键词 bump-Jump 码跟踪 误锁 BOC(1 1) 伽利略
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Bump/前体一体化对高速进气道起动特性的影响研究 被引量:6
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作者 徐尚成 王翼 +1 位作者 王振国 范晓樯 《推进技术》 EI CAS CSCD 北大核心 2019年第4期780-785,共6页
基于下颌式进气道将Bump/前体一体化设计方法应用于进气道设计,采用特征线法设计五种不同型面的前体,并采用数值仿真的方法,计算每种Bump/前体一体化进气道的自起动过程。研究表明:加入合适的Bump型面可极大提高进气道起动性能,将横向... 基于下颌式进气道将Bump/前体一体化设计方法应用于进气道设计,采用特征线法设计五种不同型面的前体,并采用数值仿真的方法,计算每种Bump/前体一体化进气道的自起动过程。研究表明:加入合适的Bump型面可极大提高进气道起动性能,将横向压力梯度集中在侧板附近的构型使进气道自起动马赫数降低了0.95。Bump/前体一体化对不起动状态下分离区形态进行三维重构,改变了分离区内横向溢流,从而改变了进气道起动能力。另外,通过对进气道起动过程的研究发现,进气道内形成封闭式分离区时,通常在高于设计马赫数时才能起动,进气道设计中应尽量避免这种状态的出现。 展开更多
关键词 进气道 bump 起动 分离区
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RFID标签芯片Bump封装工艺分析
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作者 杨跃胜 傅霖煌 《中国集成电路》 2022年第3期80-84,89,共6页
本文以UHF RFID芯片先进封装Bump工艺结构为切入点,分析了NXP Ucode7芯片和Impinj Monza5芯片常规Au Bump工艺结构特点,进而重点分析了现阶段市场应用诸多且技术最前沿的Impinj M700系列芯片和NXP Ucode9芯片的先进Bump工艺结构形式及特... 本文以UHF RFID芯片先进封装Bump工艺结构为切入点,分析了NXP Ucode7芯片和Impinj Monza5芯片常规Au Bump工艺结构特点,进而重点分析了现阶段市场应用诸多且技术最前沿的Impinj M700系列芯片和NXP Ucode9芯片的先进Bump工艺结构形式及特点,给出对应Bump工艺材料及Bump结构尺寸信息,阐明了先进Bump结构标签芯片的电性能优势,文章对RFID电子标签芯片Bump工艺材料及结构的选择具有一定参考意义。 展开更多
关键词 RFID 封装 bump 电子标签 芯片
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“Bump燃烧室”内新概念稀扩散燃烧混合气形成机理的研究 被引量:6
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作者 赵昌普 苏万华 +2 位作者 汪洋 余皎 林铁坚 《燃烧科学与技术》 EI CAS CSCD 2004年第4期327-335,共9页
基于自行研制的实验装置 ,用片状激光诱导荧光法 (PLIF)对普通商用柴油喷雾的撞壁混合过程进行了实验研究 ,并用CFD数值分析软件对其进行了模拟计算 ,二者结果基本吻合 .平板和实际燃烧室的实验及计算结果均表明 ,撞壁射流在遇到限流沿 ... 基于自行研制的实验装置 ,用片状激光诱导荧光法 (PLIF)对普通商用柴油喷雾的撞壁混合过程进行了实验研究 ,并用CFD数值分析软件对其进行了模拟计算 ,二者结果基本吻合 .平板和实际燃烧室的实验及计算结果均表明 ,撞壁射流在遇到限流沿 (Bump)后会剥离壁面 ,形成二次空间射流 ,扩大撞壁射流与空气的空间混合体积及混合速率 ,出现与周围空气迅速混合的“闪混”现象 ,减少壁面燃油堆积量 .计算结果还表明 ,Bump的存在改变了缸内气流运动的流场结构 ,Bump附近旋向相反的“双涡结构”极大地增强了二次空间射流对周围空气的卷吸 ,促进了燃油与空气的混合 。 展开更多
关键词 混合气形成 限流沿 撞壁射流 二次射流 激光诱导荧光法 数值模拟 缸内流动
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Applying robust design to study the effects of stratigraphic characteristics on brittle failure and bump potential in a coal mine 被引量:3
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作者 Bo-Hyun Kim Mark K.Larson Heather E.Lawson 《International Journal of Mining Science and Technology》 SCIE EI CSCD 2018年第1期137-144,共8页
Bumps and other types of dynamic failure have been a persistent, worldwide problem in the underground coal mining industry, spanning decades.For example, in just five states in the U.S.from 1983 to 2014,there were 388... Bumps and other types of dynamic failure have been a persistent, worldwide problem in the underground coal mining industry, spanning decades.For example, in just five states in the U.S.from 1983 to 2014,there were 388 reportable bumps.Despite significant advances in mine design tools and mining practices,these events continue to occur.Many conditions have been associated with bump potential, such as the presence of stiff units in the local geology.The effect of a stiff sandstone unit on the potential for coal bumps depends on the location of the stiff unit in the stratigraphic column, the relative stiffness and strength of other structural members, and stress concentrations caused by mining.This study describes the results of a robust design to consider the impact of different lithologic risk factors impacting dynamic failure risk.Because the inherent variability of stratigraphic characteristics in sedimentary formations,such as thickness, engineering material properties, and location, is significant and the number of influential parameters in determining a parametric study is large, it is impractical to consider every simulation case by varying each parameter individually.Therefore, to save time and honor the statistical distributions of the parameters, it is necessary to develop a robust design to collect sufficient sample data and develop a statistical analysis method to draw accurate conclusions from the collected data.In this study,orthogonal arrays, which were developed using the robust design, are used to define the combination of the(a) thickness of a stiff sandstone inserted on the top and bottom of a coal seam in a massive shale mine roof and floor,(b) location of the stiff sandstone inserted on the top and bottom of the coal seam,and(c) material properties of the stiff sandstone and contacts as interfaces using the 3-dimensional numerical model, FLAC3D.After completion of the numerical experiments, statistical and multivariate analysis are performed using the calculated results from the orthogonal arrays to analyze the effect of these variables.As a consequence, the impact of each of the parameters on the potential for bumps is quantitatively classified in terms of a normalized intensity of plastic dissipated energy.By multiple regression, the intensity of plastic dissipated energy and migration of the risk from the roof to the floor via the pillars is predicted based on the value of the variables.The results demonstrate and suggest a possible capability to predict the bump potential in a given rock mass adjacent to the underground excavations and pillars.Assessing the risk of bumps is important to preventing fatalities and injuries resulting from bumps. 展开更多
关键词 bumps Robust design FLAC3D PLASTIC dissipated energy Multiple regression
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Using LaModel to analyze coal bumps 被引量:2
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作者 Keith A.Heasley Ihsan Berk Tulu 《International Journal of Mining Science and Technology》 SCIE EI CSCD 2018年第5期729-737,共9页
Coal bumps have long been a safety hazard in coal mines, and even after decades of research, the exact mechanics that cause coal bumps are still not well understood. Therefore, coal bumps are still difficult to predic... Coal bumps have long been a safety hazard in coal mines, and even after decades of research, the exact mechanics that cause coal bumps are still not well understood. Therefore, coal bumps are still difficult to predict and control. The LaModel program has a long history of being used to effectively analyze displacements and stresses in coal mines, and with the recent addition of energy release and local mine stiffness calculations, the LaModel program now has greatly increased capabilities for evaluating coal bump potential. This paper presents three recent case histories where coal stress, pillar safety factor, energy release rate and local mine stiffness calculations in LaModel were used to evaluate the pillar plan and cut sequencing that were associated with a number of bumps. The first case history is a longwall mine where a simple stress analysis was used to help determine the limiting depth for safely mining in bump-prone ground. The second case history is a room-and-pillar retreat mine where the LaModel analysis is used to help optimize the pillar extraction sequencing in order to minimize the frequent pillar line bumps. The third case history is the Crandall Canyon mine where an initial bump and then a massive pillar collapse/bump which killed 6 miners is extensively back-analyzed. In these case histories, the calculation tools in LaModel are ultimately shown to be very effective for analyzing various aspects of the bump problem, and in the conclusions, a number of critical insights into the practical calculation of mine failure and stability developed as a result of this research are presented. 展开更多
关键词 COAL bump BURST Energy RELEASE rate Local MINE STIFFNESS LaModel
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Numerical analysis for the prediction of bump prone conditions:A southern Appalachian pillar coal bump case study 被引量:2
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作者 Christopher Newman David Newman 《International Journal of Mining Science and Technology》 SCIE EI CAS CSCD 2021年第1期75-81,共7页
Two miners were fatally injured when a pillar bump occurred during retreat mining in a southern West Virginia coal mine.The mine was operating in the Eagle seam with overmining in the No.2 Gas and Powellton seams.A co... Two miners were fatally injured when a pillar bump occurred during retreat mining in a southern West Virginia coal mine.The mine was operating in the Eagle seam with overmining in the No.2 Gas and Powellton seams.A coal bump is defined as a sudden and violent failure of coal caused by the release of stored strain energy in the pillar.While significant strides have been made by academia,industry,and regulatory agencies to better understand bump conditions and mitigation techniques,coal bumps represent a long standing,highly site-specific engineering problem in which the exact failure mechanism is not clearly understood.In this case history,a cut-by-cut analysis of retreat mining operations was conducted on the 4 East Main leading up to the pillar bump event.Numerical input parameters were derived from site-specific geologic information and mine geometry for the analysis of pillar stress conditions and energy release using LaModel.An overview of stress conditions in the panel was presented including a precursor event that occurred two crosscuts inby the bump site.The methodology presented in the paper for the evaluation of the fatal bump event can be used for the identification of bump prone conditions prior to development and retreat of a mining area. 展开更多
关键词 bump BURST Coal Energy release rate LaModel Numerical modeling
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Bump Mapping技术的研究与实现
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作者 张洁 璩柏青 董元平 《电子科技》 2007年第1期41-43,47,共4页
介绍了Blinn于1978年提出的几何凹凸纹理映射技术(Bump Mapping)的实现原理,通过比较Phong shading(法向量插值明暗处理)和Gouraud shading(光亮度插值明暗处理)方法的不同,说明了Bump Mapping是法向量光亮度插值方法的一种扩展。并且... 介绍了Blinn于1978年提出的几何凹凸纹理映射技术(Bump Mapping)的实现原理,通过比较Phong shading(法向量插值明暗处理)和Gouraud shading(光亮度插值明暗处理)方法的不同,说明了Bump Mapping是法向量光亮度插值方法的一种扩展。并且简要介绍了其实现方法,最后给出了利用偏移函数生成凹凸纹理的实例。 展开更多
关键词 凹凸纹理 法向量插值明暗处理 光亮度插值明暗处理 高度场
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Mechanical Behavior of Bistable Bump Surface for Morphing Inlet
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作者 张平 周丽 程文杰 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI CSCD 2015年第6期610-622,共13页
There exists inlet-engine match conflict between high and low speeds for a non-adjustable bump inlet.A scheme of using a bistable bump surface at the throat region of the inlet is proposed to adjust the throat area.Th... There exists inlet-engine match conflict between high and low speeds for a non-adjustable bump inlet.A scheme of using a bistable bump surface at the throat region of the inlet is proposed to adjust the throat area.The FEM model of the bistable surface is established with hinged constraint,and the bistability condition and structural transition process are investigated in detail.Moreover,the effects of loading method,loading position and structural parameters on critical driving force,input energy and structural strain are studied.Finally,the influences of an elastic boundary condition on the structural bistability are discussed.The results show that the bistability of the adjustable bump surface requires a certain boundary constraint and geometric parameter combination,and that there are local and overall snap-through phenomena during transition which are related to the loading position and structural parameters.Therefore,suitable loading position and structural material could reduce input energy and meet the demand of structural strain. 展开更多
关键词 bistable structure inlet-engine match bump surface morphing inlet transition process
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Effect of pad geometry on current density and temperature distributions in solder bump joints
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作者 李毅 赵修臣 +1 位作者 刘颖 李洪洋 《Journal of Beijing Institute of Technology》 EI CAS 2014年第2期270-278,共9页
Three-dimensional thermo-electrical finite element analyses were conducted to simulate the current density and temperature distributions in solder bump joints with different pad geometries.The effects of pad thickness... Three-dimensional thermo-electrical finite element analyses were conducted to simulate the current density and temperature distributions in solder bump joints with different pad geometries.The effects of pad thickness,diameter and shape on current density and temperate distributions were investigated respectively.It was found that pads with larger thickness or/and diameter could reduce current density and temperature in solder bump significantly.Pad shapes affected the current density and temperature distributions in solder bumps.The relatively low current density and temperature didn't occur in the bump joint with traditional rounded pad but occurred in bump joints with octagonal and nonagonal pads respectively.Therefore,optimized pad geometry may be designed to alleviate the current crowding effect and reduce the bump temperature,and therefore delay electromigration failure and increase the mean-time-to-failure. 展开更多
关键词 electromigration solder bump joint pad geometry current crowding effect current density temperature
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Bump智能手机与Pc实现数据共享
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《中国高新技术企业》 2013年第6期I0003-I0003,共1页
Bump是一款用户只需互碰手机即可在两个手机之间交换数据的应用,其开发商BumpTechnoIogies于当地时间2013年2月14日宣布对该应用的Web共享功能进行了升级。
关键词 智能手机 数据共享 bump PC 交换数据 Web 开发商 应用
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蒸发因素对高密度焦平面铟凸点制备影响研究
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作者 宝鹏飞 朱宪亮 +4 位作者 于春蕾 杨波 邵秀梅 李雪 刘大福 《红外与激光工程》 北大核心 2025年第1期137-145,共9页
高一致性、高深宽比凸点制备是高密度红外焦平面制造的关键技术之一。以10μm间距铟凸点阵列为研究对象,通过提取铟凸点高度、顶部直径、生长速率纵横比和铟膜粗糙度等参数,结合薄膜形核生长理论,深入分析热蒸发过程中关键因素对铟凸点... 高一致性、高深宽比凸点制备是高密度红外焦平面制造的关键技术之一。以10μm间距铟凸点阵列为研究对象,通过提取铟凸点高度、顶部直径、生长速率纵横比和铟膜粗糙度等参数,结合薄膜形核生长理论,深入分析热蒸发过程中关键因素对铟凸点生长的影响,为更小间距铟凸点制备提供理论与技术参考。实验结果表明,沉积速率和基底温度对铟凸点生长的影响具有两面性:一方面,高沉积速率和低基底温度会细化铟膜晶粒,有利于沉积高均匀性铟凸点阵列。基底温度下降了45 K,铟凸点高度非均匀性从15.4%降低到6.6%,铟凸点顶部直径范围差下降了0.9μm。沉积速率增加了21A/s后,铟凸点高度非均匀性从11.8%降低到6.6%,铟凸点顶部直径范围差下降了0.4μm。另一方面,高沉积速率下的动理学粗糙化影响比重增加,铟薄膜粗糙度随沉积速率变化趋缓。同时高沉积速率和低基底温度下的光刻孔缘铟向四周扩散的能力减弱,继续降温后铟层横向生长速率从3.4?/s升至4.1?/s,光刻孔加速闭合不利于高密度、高深宽比、高均匀性铟凸点的生长制备。 展开更多
关键词 红外焦平面 铟凸点 热蒸发 基底温度 沉积速率
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