The spatial distributions of the electron density and the mean electron energy of argon radio frequency （rf） glow discharge plasma in a plasma-enhanced chemical vapour deposition （PECVD） system have been investiga...The spatial distributions of the electron density and the mean electron energy of argon radio frequency （rf） glow discharge plasma in a plasma-enhanced chemical vapour deposition （PECVD） system have been investigated using an established movable Langmuir probe. The results indicate that in the axial direction the electron density tends to peak at midway between the two electrodes while the axial variation trend of mean electron energy is different from that of the electron density, the mean electron energy is high near the electrodes. And the mean electron energy near the cathode is much higher than that near the anode. This article focuses on the radial distribution of electron density and mean electron energy. A proposed theoretical model distribution agrees well with the experimental one： the electron density and the mean electron energy both increase from the centre of the glow to the edge of electrodes. This is useful for better understanding the discharge mechanism and searching for a better deposition condition to improve thin film quality.展开更多
Terrain is an important environment factor that plays a vital role in human development by influencing the spatial layout of land use patterns. The terrain niche index, combined with slope and elevation, can comprehen...Terrain is an important environment factor that plays a vital role in human development by influencing the spatial layout of land use patterns. The terrain niche index, combined with slope and elevation, can comprehensively present detailed information about spatial differences in terrain and is superior to single terrain factors. We applied remote sensing and geographical information system to terrain gradient, used the non-dimensional distribution index to examine spatial distribution characteristics of various landscape types, and analyzed the ecological effects of landscape were quantitatively on terrain gradients. Eco-environment quality (EEQ) was evaluated using the forestry operation area as the evaluation unit. The spatial distributions in various landscapes were significantly influenced by terrain factors, especially by bodies of water, cropland and residential land. The spatial distribution varied greatly in different terrain gradients for similar landscape types. The areas associated with good, intermediate and poor EEQ were occupied primarily by natural landscape, semi-natural and largely artificial landscapes, respectively.展开更多
文摘The spatial distributions of the electron density and the mean electron energy of argon radio frequency （rf） glow discharge plasma in a plasma-enhanced chemical vapour deposition （PECVD） system have been investigated using an established movable Langmuir probe. The results indicate that in the axial direction the electron density tends to peak at midway between the two electrodes while the axial variation trend of mean electron energy is different from that of the electron density, the mean electron energy is high near the electrodes. And the mean electron energy near the cathode is much higher than that near the anode. This article focuses on the radial distribution of electron density and mean electron energy. A proposed theoretical model distribution agrees well with the experimental one： the electron density and the mean electron energy both increase from the centre of the glow to the edge of electrodes. This is useful for better understanding the discharge mechanism and searching for a better deposition condition to improve thin film quality.
基金supported by National High Technology Research and Development Program 863(Grant No.2012AA102001)Natural Scientific Foundation of Heilongjiang Province(Grant No.D201410)Natural Science Foundation of Heilongjiang Province Department Education Commission(Grant No.12531513)
文摘Terrain is an important environment factor that plays a vital role in human development by influencing the spatial layout of land use patterns. The terrain niche index, combined with slope and elevation, can comprehensively present detailed information about spatial differences in terrain and is superior to single terrain factors. We applied remote sensing and geographical information system to terrain gradient, used the non-dimensional distribution index to examine spatial distribution characteristics of various landscape types, and analyzed the ecological effects of landscape were quantitatively on terrain gradients. Eco-environment quality (EEQ) was evaluated using the forestry operation area as the evaluation unit. The spatial distributions in various landscapes were significantly influenced by terrain factors, especially by bodies of water, cropland and residential land. The spatial distribution varied greatly in different terrain gradients for similar landscape types. The areas associated with good, intermediate and poor EEQ were occupied primarily by natural landscape, semi-natural and largely artificial landscapes, respectively.
